Mechanical seal device

1. A mechanical seal device for sealing a sealed fluid inside of a machine at a space formed between a device main body and a rotary shaft, comprising:

a seal case attached to the device main body,

a rotary seal ring attached to the rotary shaft,

a stationary seal ring arranged in an axial direction opposing to the rotary seal ring,

a bellows attached extendably in the axial direction between the stationary seal ring and the seal case, the bellows applying compressive force pressing the stationary seal ring toward the rotary seal ring,

a resilient member pressing the stationary seal ring toward the rotary seal ring,

a static pressure fluid supplying hole, formed on the seal case, supplying a static pressure fluid to a static pressure fluid chamber arranged at an inner circumferential side of the bellows, and

a seal member, arranged between the seal case and the stationary seal ring at the inner circumferential side of the bellows, holding the stationary seal ring movably in the axial direction and sealing the static pressure fluid chamber from an atmosphere side space, wherein

communication holes are formed on the stationary steel ring extending from the static pressure fluid chamber, and guiding the static pressure fluid of the static pressure fluid chamber between a sealing surface of the stationary seal ring and a sealing surface of the rotary seal ring,

an annular groove connecting each communication hole is formed on the stationary seal ring,

an outer diameter of the annular groove is designed so that it is essentially equal to a pressure acting diameter of the bellows,

an inner diameter of the annular groove is designed so that it is essentially equal to a contact diameter where the seal member contacts the stationary seal ring, and

the sealed fluid is arranged at an outer circumferential side of the bellows.

2. The mechanical seal device as set forth in claim 1 , wherein the resilient member is arranged closer to the atmosphere side than the seal member.

3. The mechanical seal device as set forth in claim 1 , wherein the resilient member is arranged inside the static pressure fluid chamber.

4. The mechanical seal device as set forth in claim 1 , wherein dynamic pressure generating grooves are formed on the sealing surface of the rotary seal ring which opposes the sealing surface of the stationary seal ring on which the annular groove is formed.

5. The mechanical seal device as set forth in claim 1 , further comprising:

a flinger arranged in the axial direction at the machine inside of the rotary seal ring, wherein

a cylindrical portion, extending in the axial direction, is formed at an outer circumference of the flinger, the cylindrical portion covering a protruding portion protruding from the device main body in the axial direction.

6. The mechanical seal device as set forth in claim 1 , wherein the static pressure fluid is a purge gas or a liquid.

7. A mechanical seal device for sealing a sealed fluid inside of a machine at a space formed between a device main body and a rotary shaft, comprising:

a seal case attached to the device main body,

a rotary seal ring attached to the rotary shaft,

a stationary seal ring arranged in an axial direction opposing to the rotary seal ring,

a bellows attached extendably in the axial direction between the stationary seal ring and the seal case, the bellows applying compressive force pressing the stationary seal ring toward the rotary seal ring,

a resilient member pressing the stationary seal ring toward the rotary seal ring,

a static pressure fluid supplying hole, formed on the seal case, supplying a static pressure fluid to a static pressure fluid chamber arranged at an inner circumferential side of the bellows, and

a seal member, arranged between the seal case and the stationary seal ring at the inner circumferential side of the bellows, holding the stationary seal ring movably in the axial direction and sealing the static pressure fluid chamber from an atmosphere side space, wherein

communication holes are formed on the stationary steel ring extending from the static pressure fluid chamber, and guiding the static pressure fluid of the static pressure fluid chamber between a sealing surface of the stationary seal ring and a sealing surface of the rotary seal ring,

an annular groove connecting each communication hole is formed on the stationary seal ring,

dynamic pressure generating grooves are formed on the sealing surface of the rotary seal ring opposing to a sealing surface of the stationary seal ring on which the annular groove is formed,

an outer diameter of the annular groove is designed so that it is essentially equal to a pressure acting diameter of the bellows,

an inner diameter of the annular groove is designed so that it is essentially equal to a contact diameter where the seal member contacts the stationary seal ring, and

the sealed fluid is arranged at an outer circumferential side of the bellows.

8. The mechanical seal device as set forth in claim 7 , wherein the resilient member is arranged closer to the atmosphere side than the seal member.

9. The mechanical seal device as set forth in claim 7 , wherein the resilient member is arranged inside the static pressure fluid chamber.

10. The mechanical seal device as set forth in claim 7 , further comprising:

a flinger arranged in the axial direction at the machine inside of the rotary seal ring, wherein

a cylindrical portion, extending in the axial direction, is formed at an outer circumference of the flinger, the cylindrical portion covering a protruding portion protruding from the device main body in the axial direction.

11. The mechanical seal device as set forth in claim 7 , wherein the static pressure fluid is a purge gas or a liquid.