IP Library Granted Patent US 9,590,044
Granted Patent B2
US 9,590,044 · App. 13/860,612 · Granted Mar 7, 2017

Two-dimensional material containing electronic components

Inventors: Guenther Ruhl (Regensburg, DE); Wolfgang Lehnert (Lintach, DE); Rudolf Berger (Regensburg, DE)
Assignee: INFINEON TECHNOLOGIES AG
H01L29/1606H01L29/408H01L29/778H01L29/7788H01L29/7789H01L29/861
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Quick Facts
Patent No.
US 9,590,044
App. No.
13/860,612
Granted
Mar 7, 2017
Kind
B2
Abstract

In various embodiments, an electronic component is provided. The electronic component may include a dielectric structure; and a two-dimensional material containing structure over the dielectric structure. The dielectric structure is doped with dopants to change the electric characteristic of the two-dimensional material containing structure.

Claims (69)

1. An electronic component, comprising:

a dielectric layer comprising a dielectric material selected from a group of dielectric materials consisting of an oxide, a nitride, a carbide and an oxynitride; and

a two-dimensional material containing structure over the dielectric layer;

wherein the dielectric material is doped with dopants within the dielectric material, the dopants comprising fixed charge carriers within the dielectric material changing the electric characteristic of the two-dimensional material containing structure.

2. The electronic component of claim 1 ,

wherein the dielectric structure is doped with p-type dopants.

3. The electronic component of claim 2 ,

wherein the p-type dopants are selected from a group of doping atoms consisting of:

nitrogen; and

cesium.

4. The electronic component of claim 1 ,

wherein the dielectric structure is doped with n-type dopants.

5. The electronic component of claim 4 ,

wherein the n-type dopants contain aluminum.

6. The electronic component of claim 1 ,

wherein the dielectric structure comprises a dielectric material selected from a group of dielectric materials consisting of:

silicon oxide;

silicon nitride;

siliconoxynitride;

silicon carbide;

aluminum oxide;

hafnium oxide and

zirconium oxide.

7. The electronic component of claim 1 ,

wherein the dielectric structure comprises a first dielectric portion being doped with n-type dopants and a second dielectric portion being doped with p-type dopants, wherein the first dielectric portion and the second dielectric portion are adjacent to each other.

8. The electronic component of claim 7 ,

being configured as a diode.

9. The electronic component of claim 1 ,

being configured as a transistor.

10. The electronic component of claim 9 ,

wherein the two-dimensional material containing structure forms a channel region of the transistor.

11. The electronic component of claim 1 ,

being configured as a planar electronic component.

12. The electronic component of claim 1 ,

being configured as a vertical electronic component.

13. The electronic component of claim 1 ,

wherein the two-dimensional material containing structure comprises graphene.

14. The electronic component of claim 1 ,

wherein the two-dimensional material containing structure comprises a metal chalcogenide.

15. The electronic component of claim 1 ,

wherein the two-dimensional material containing structure comprises a plurality of layers so that a band gap is provided between at least two layers of the plurality of layers.

16. An electronic component, comprising:

a dielectric layer comprising a dielectric material and dopants incorporated within the dielectric material; and

a two-dimensional material layer disposed over the dielectric layer, wherein the dopants comprise fixed charges in the dielectric material changing the electric characteristic of the two-dimensional material layer.

17. The electronic component of claim 16 ,

wherein the dielectric material is doped with p-type dopants.

18. The electronic component of claim 16 ,

wherein the dielectric material is doped with n-type dopants.

19. The electronic component of claim 16 ,

wherein the dielectric material is selected from a group of dielectric materials consisting of:

an oxide;

a nitride; and

an oxynitride.

20. The electronic component of claim 16 ,

wherein the dielectric structure material comprises a first dielectric portion being doped with n-type dopants and a second dielectric portion being doped with p-type dopants, wherein the first dielectric portion and the second dielectric portion are adjacent to each other.

21. The electronic component of claim 20 ,

being configured as a diode.

22. The electronic component of claim 16 ,

being configured as a transistor.

23. The electronic component of claim 16 ,

wherein the two-dimensional material containing structure forms a channel region of the transistor.

24. The electronic component of claim 16 ,

wherein the two-dimensional material containing structure comprises a plurality of layers so that a band gap is provided between at least two layers of the plurality of layers.

25. An electronic component, comprising:

a dielectric layer comprising dopants within a dielectric material of the dielectric layer; and

a graphene containing layer structure disposed over the dielectric layer;

wherein the dopants comprise fixed charges changing the electric characteristic of the graphene containing layer.

26. The electronic component of claim 25 ,

wherein the graphene containing layer structure comprises a plurality of graphene containing layers so that a band gap is provided between at least two graphene containing layers of the plurality of graphene containing layers.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2013
From: RUHL, GUENTHER; LEHNERT, WOLFGANG; BERGER, RUDOLF
To: INFINEON TECHNOLOGIES AG
Reel/Frame 030211/0664 →
Continuity (1)
Related Publication 20140306184A1 · Oct 16, 2014