IP Library Granted Patent US 9,595,621
Granted Patent B2
US 9,595,621 · App. 15/085,788 · Granted Mar 14, 2017

MOS capacitors flow type devices and methods of forming the same

Inventors: Rien Gahlsdorf (Bedford, NH); Jianwen Bao (Greensboro, NC)
Assignee: TDK Corporation
H01L29/94G05F3/205G05F3/24H01L27/0811H01L27/1203H01L29/66189H03H19/004
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Quick Facts
Patent No.
US 9,595,621
App. No.
15/085,788
Granted
Mar 14, 2017
Kind
B2
Abstract

A capacitor structure is described. The capacitor structure includes a substrate; a source/drain region formed in the substrate to form an active area, the active area having an active area width; and at least two gates formed above the substrate. The at least two gates having a gate width. The gate width is configured to be less than the active area width. And, the at least two gates are formed such that the source/drain region is between the two gates to form at least one channel between the two gates.

Claims (28)

1. A capacitor structure comprising:

a substrate;

a source/drain region formed in said substrate to form an active area, said active area having an active area width; and

at least two gates formed above said substrate, said at least two gates having a gate width, said gate width configured to be less than said active area width, said at least two gates formed such that said source/drain region is between said two gates to form at least one channel between said two gates.

2. The capacitor structure of claim 1 , wherein said substrate is an silicon-on-insulator substrate.

3. The capacitor structure of claim 1 , wherein said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates are interconnected to form one or more pairs of capacitors connected in an anti-series configuration.

4. The capacitor structure of claim 1 , wherein said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates are interconnected to form a variable capacitor cell of a variable capacitor array.

5. The capacitor structure of claim 4 , wherein the variable capacitor cell is part of an integrated circuit.

6. The capacitor structure of claim 1 , wherein said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates are interconnected to form a plurality of variable capacitor cells of a variable capacitor array.

7. A method to form a plurality of capacitors comprising:

forming a source/drain region in a substrate to form an active area, said active area having an active area width; and

forming at least two gates above said substrate, said at least two gates having a gate width, said gate width configured to be less than said active area width, said at least two gates formed such that said source/drain region is between said two gates to form at least one channel between said two gates.

8. The method of claim 7 , wherein said substrate is an silicon-on-insulator substrate.

9. The method of claim 7 , further comprising forming connections between said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates to form one or more pairs of capacitors connected in an anti-series configuration.

10. The method of claim 7 , further comprising forming connections between said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates to form a variable capacitor cell of a variable capacitor array.

11. The method of claim 7 , further comprising forming connections between said plurality of source/drain regions, first plurality of gates, and said second plurality of gates to form a plurality of variable capacitor cells of a variable capacitor array.

12. An integrated circuit comprising:

a substrate;

a source/drain region formed in said substrate to form an active area, said active area having an active area width and an active area height; and

a least two gates formed above said substrate, said at least two gates having a gate width, said gate width configured to be less than said active area width, said at least two gates formed such that said source/drain region is between said two gates to form at least one channel between said at least two gates.

13. The integrated circuit of claim 12 , wherein said substrate is a silicon-on-insulator substrate.

14. The integrated circuit of claim 12 , wherein said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates are interconnected to form one or more pairs of capacitors connected in an anti-series configuration.

15. The integrated circuit of claim 12 , wherein said plurality of source/drain regions, said first plurality of gates, and said second plurality of gates are interconnected to form a variable capacitor cell of a variable capacitor array.

16. The integrated circuit of claim 12 , wherein said plurality of source/drain regions, first plurality of gates, and said second plurality of gates are interconnected to form a plurality of variable capacitor cells of a variable capacitor array.

17. The integrated circuit of claim 12 , further comprising a bias voltage generator configured to generate a bias voltage for each one of said plurality of variable capacitor cells of said variable capacitor array.

18. The integrated circuit of claim 17 , further comprising an interface configured to receive a control signal for said bias voltage generator used to adjust a value of said bias voltage for each one of said plurality of variable capacitor cells of said variable capacitor array.

19. The integrated circuit of claim 18 , wherein said interface is a Mobile Industry Processor Interface radio front end interface.

20. The integrated circuit of claim 12 , wherein said plurality of source/drain regions, first plurality of gates, and said second plurality of gates are interconnected to form a plurality of variable capacitor arrays.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 23, 2017
From: NEWLANS, INC.
To: TDK CORPORATION
Reel/Frame 041051/0966 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 20, 2017
From: BAO, JIM; GAHLSDORF, RIEN
To: NEWLANS, INC.
Reel/Frame 041030/0647 →
Continuity (2)
Provisional Application 62140320 · Mar 30, 2015
Related Publication 20160293778A1 · Oct 6, 2016