IP Library Granted Patent US 9,595,685
Granted Patent B2
US 9,595,685 · App. 14/124,816 · Granted Mar 14, 2017

Nanoscale wires, nanoscale wire FET devices, and nanotube-electronic hybrid devices for sensing and other applications

Inventors: Charles M. Lieber (Lexington, MA); Xiaojie Duan (Somerville, MA); Ruixuan Gao (Cambridge, MA); Ping Xie (Needham, MA); Xiaocheng Jiang (Cambridge, MA)
Assignee: President and Fellows of Harvard College
H01L51/0512B82Y10/00B82Y30/00B82Y40/00G01N27/4146G01R1/02H01L51/0002H01L29/0676H01L29/775
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Quick Facts
Patent No.
US 9,595,685
App. No.
14/124,816
Granted
Mar 14, 2017
Kind
B2
Abstract

The present invention generally relates to nanotechnology, including field effect transistors and other devices used as sensors (for example, for electrophysiological studies), nanotube structures, and applications. Certain aspects of the present invention are generally directed to transistors such as field effect transistors, and other similar devices. In one set of embodiments, a field effect transistor is used where a nanoscale wire, for example, a silicon nanowire, acts as a transistor channel connecting a source electrode to a drain electrode. In some cases, a portion of the transistor channel is exposed to an environment that is to be determined, for example, the interior or cytosol of a cell. A nanotube or other suitable fluidic channel may be extended from the transistor channel into a suitable environment, such as a contained environment within a cell, so that the environment is in electrical communication with the transistor channel via the fluidic channel. In some embodiments, the rest of the transistor channel may be coated, e.g., so that the electrical properties of the transistor channel reflect the electrical behavior of the environment that the fluidic channel is in communication with. Other aspects of the invention are generally directed to methods of making such sensors, methods of using such sensors, kits involving such sensors, or the like.

Claims (22)

1. A field effect transistor, comprising:

a source electrode;

a drain electrode;

a transistor channel electrically connecting the source electrode to the drain electrode wherein the transistor channel comprises a nanoscale wire; and

a nanotube positioned such that one end of the nanotube physically contacts a side of the transistor channel.

2. The field effect transistor of claim 1 , wherein the nanotube contains a liquid.

3. The field effect transistor of claim 1 , wherein the nanotube comprises an oxide.

4. The field effect transistor of claim 1 , wherein the nanotube comprises a metal.

5. The field effect transistor of claim 1 , wherein the nanotube is substantially nonconductive.

6. The field effect transistor of claim 1 , wherein the nanotube has an inner diameter of less than about 5 micrometers.

7. The field effect transistor of claim 1 , wherein the nanotube has a length of at least about 50 nm.

8. The field effect transistor of claim 1 , wherein the nanotube has a length of at least about 1 micrometer.

9. The field effect transistor of claim 1 , wherein the transistor channel is positioned substantially perpendicularly relative to the nanotube.

10. The field effect transistor of claim 1 , wherein the transistor channel comprises a semiconductor.

11. The field effect transistor of claim 1 , wherein the transistor channel is a solid nanowire.

12. The field effect transistor of claim 1 , wherein the transistor channel has an average cross-sectional diameter of less than about 200 nm.

13. The field effect transistor of claim 1 , wherein the transistor channel further comprises a coating.

14. A sensor, comprising:

a substrate comprising a plurality of field effect transistors, at least some of which are the field effect transistors comprising a source electrode, a drain electrode, a transistor channel electrically connecting the source electrode to the drain electrode wherein the transistor channel comprises a nanoscale wire, and a nanotube positioned such that one end of the nanotube physically contacts a side of the transistor channel.

15. A method of determining an electrical property of a cell, comprising:

inserting a fluidic channel into an interior of a cell, wherein the fluidic channel is in electrical communication with a portion of a gate of a field effect transistor and the gate is external of the cell, and wherein the fluidic channel is a nanotube; and

determining an electrical property of the cell.

Assignments (2)
CONFIRMATORY LICENSE Recorded Mar 5, 2014
From: HARVARD UNIVERSITY
To: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT
Reel/Frame 032389/0008 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2013
From: LIEBER, CHARLES M.; DUAN, XIAOJIE; GAO, RUIXUAN; XIE, PING; JIANG, XIAOCHENG
To: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
Reel/Frame 031763/0344 →
Continuity (2)
Provisional Application 61495919 · Jun 10, 2011
Related Publication 20140184196A1 · Jul 3, 2014