Thin film transistor substrate, organic light-emitting apparatus including the same, method of manufacturing the thin film transistor substrate, and method of manufacturing the organic light-emitting apparatus
A thin film transistor (TFT) substrate which may facilitate subsequent TFT processing by reducing an elevation difference on the top surface of the substrate is disclosed. Aspects include an organic light-emitting apparatus including the TFT substrate, a method of manufacturing the TFT substrate, and a method of manufacturing the organic light-emitting apparatus. In one aspect the TFT substrate includes: a substrate; a height adjusting layer that is disposed on the substrate and has a thickness in a first region greater than a thickness in a second region; and a TFT that is formed on the height adjusting layer to correspond to the second region of the height adjusting layer.
1. A thin film transistor (TFT) substrate, comprising:
a substrate;
a height adjusting layer that is formed on the substrate and has a thickness in a first region greater than a thickness in a second region;
a TFT including a semiconductor layer different from the height adjusting layer, the TFT being formed on the second region of the height adjusting layer; and
a capacitor formed in a third region, wherein the height adjusting layer is further formed in the third region, and wherein the thickness of the height adjusting layer in the third region is greater than the thickness of the height adjusting layer in the second region and less than the thickness of the height adjusting layer in the first region.
2. The TFT substrate of claim 1 , wherein the difference in the thickness of the height adjusting layer in the first region and the thickness of the height adjusting layer in the second region corresponds to the height of the TFT.
3. The TFT substrate of claim 1 , wherein the height adjusting layer comprises an organic material.
4. The TFT substrate of claim 1 , further comprising a planarization film that is formed to cover the height adjusting layer and the TFT.
5. The TFT substrate of claim 4 , further comprising a protective film that is formed between the planarization film, and the height adjusting layer and the TFT.
6. The TFT substrate of claim 1 , further comprising a pixel electrode that is electrically connected to the TFT.
7. An organic light-emitting apparatus comprising:
the TFT substrate of claim 6 ;
an intermediate layer that is formed on the pixel electrode and comprises an emission layer (EML); and
a counter electrode that is formed on the intermediate layer.
8. The organic light-emitting apparatus of claim 7 , wherein light is emitted from the EML to the environment outside the apparatus through the counter electrode.
9. A thin film transistor (TFT) substrate, comprising:
a substrate that has a thickness in a first region greater than a thickness in a second region;
a TFT including a semiconductor layer different from the substrate, the TFT being formed on the second region of the substrate; and
a capacitor formed in a third region, wherein the substrate is further formed in the third region, and wherein the thickness of the substrate in the third region is greater than the thickness of the substrate in the second region and less than the thickness of the substrate in the first region.
10. The TFT substrate of claim 9 , wherein the difference in the thickness of the substrate in the first region and the thickness of the substrate in the second region corresponds to a height of the TFT.
11. The TFT substrate of claim 9 , wherein the substrate is formed of an organic material.
12. The TFT substrate of claim 9 , further comprising a planarization film that is formed to cover the substrate and the TFT.
13. The TFT substrate of claim 12 , further comprising a protective film that is formed between the planarization film, and the substrate and the TFT.
14. The TFT substrate of claim 9 , further comprising a pixel electrode that is electrically connected to the TFT.
15. An organic light-emitting apparatus comprising:
the TFT substrate of claim 14 ;
an intermediate layer that is formed on the pixel electrode and comprises an emission layer (EML); and
a counter electrode that is formed on the intermediate layer.
16. The organic light-emitting apparatus of claim 15 , wherein light is emitted from the EML to the environment outside the apparatus through the counter electrode.
17. A method of manufacturing a thin film transistor (TFT) substrate, the method comprising:
forming a height adjusting layer on a substrate such that a thickness of the height adjusting layer in a first region is greater than a thickness of the height adjusting layer in a second region;
forming a TFT including a semiconductor layer different from the height adjusting layer on the second region of the height adjusting layer; and
forming a capacitor in a third region, wherein the height adjusting layer is further formed in the third region, and wherein the thickness of the height adjusting layer in the third region is greater than the thickness of the height adjusting layer in the second region and less than the thickness of the height adjusting layer in the first region.
18. The method of claim 17 , wherein the forming of the height adjusting layer comprises forming the height adjusting layer such that a difference between the thickness of the height adjusting layer in the first region and the thickness of the height adjusting layer in the second region corresponds to a height of the TFT.
19. The method of claim 17 , wherein the forming of the height adjusting layer comprises forming the height adjusting layer by using an organic material.
20. The method of claim 17 , further comprising forming a planarization film to cover the height adjusting layer and the TFT.
21. The method of claim 17 , further comprising forming a protective film to cover the height adjusting layer and the TFT and forming a planarization film on the protective film.
22. The method of claim 17 , further comprising removing the substrate.
23. The method of claim 17 , further comprising forming a pixel electrode configured to be electrically connected to the TFT.
24. The method of claim 23 , further comprising removing the substrate.
25. A method of manufacturing an organic light-emitting apparatus, the method comprising:
preparing a thin film transistor (TFT) substrate manufactured by using the method of claim 23 ;
forming an intermediate layer comprising an emission layer (EML) on the pixel electrode; and
forming a counter electrode on the intermediate layer.
26. The method of claim 25 , further comprising removing the substrate.
27. The method of claim 25 , wherein the forming of the intermediate layer comprises forming the intermediate layer by using a liquid process.
28. A method of manufacturing an organic light-emitting apparatus, the method comprising:
preparing a thin film transistor (TFT) substrate manufactured by using the method of claim 24 ;
forming an intermediate layer comprising an emission layer (EML) on the pixel electrode; and
forming a counter electrode on the intermediate layer.
29. The method of claim 28 , wherein the forming of the intermediate layer comprises forming the intermediate layer by using a liquid process.
30. The TFT substrate of claim 1 , wherein the TFT comprises a plurality of TFTs formed only on the second region of the height adjusting layer.
31. The TFT substrate of claim 1 , wherein the height adjusting layer is continuously formed across the substrate.