Semiconductor device and method for fabricating the same
The on-state characteristics of a transistor are improved and thus, a semiconductor device capable of high-speed response and high-speed operation is provided. A highly reliable semiconductor device showing stable electric characteristics is made. The semiconductor device includes a transistor including a first oxide layer; an oxide semiconductor layer over the first oxide layer; a source electrode layer and a drain electrode layer in contact with the oxide semiconductor layer; a second oxide layer over the oxide semiconductor layer; a gate insulating layer over the second oxide layer; and a gate electrode layer over the gate insulating layer. An end portion of the second oxide layer and an end portion of the gate insulating layer overlap with the source electrode layer and the drain electrode layer.
1. A semiconductor device, comprising:
a first oxide layer;
an oxide semiconductor layer over the first oxide layer;
a source electrode layer and a drain electrode layer which are in contact with the oxide semiconductor layer;
a second oxide layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer;
a gate insulating layer over the second oxide layer; and
a gate electrode layer over the gate insulating layer,
wherein the source electrode layer comprises a first region and a second region,
wherein the drain electrode layer comprises a third region and a fourth region,
wherein the second oxide layer is in direct contact with a top surface of the first region and a top surface of the third region,
wherein each of the first region and the third region are in direct contact with a top surface of the oxide semiconductor layer,
wherein the second region and the fourth region do not overlap with the second oxide layer and the gate insulating layer, and
wherein a side surface of the second oxide layer and a side surface of the gate insulating layer are aligned over the source electrode layer and the drain electrode layer.
2. The semiconductor device according to claim 1 , wherein the side surface of the gate insulating layer is aligned with a side surface of the gate electrode layer.
3. The semiconductor device according to claim 1 , further comprising a sidewall insulating layer in contact with a side surface of the gate electrode layer.
4. The semiconductor device according to claim 3 , wherein a top end portion of the second oxide layer is aligned with a bottom end portion of the gate insulating layer, and a top end portion of the gate insulating layer is aligned with a bottom end portion of the sidewall insulating layer.
5. The semiconductor device according to claim 1 ,
wherein an electron affinity of the oxide semiconductor layer is higher than an electron affinity of the first oxide layer by 0.2 eV or more, and
wherein the electron affinity of the oxide semiconductor layer is higher than an electron affinity of the second oxide layer by 0.2 eV or more.
6. The semiconductor device according to claim 1 ,
wherein the first oxide layer, the second oxide layer, and the oxide semiconductor layer contain indium,
wherein a proportion of indium contained in the oxide semiconductor layer is larger than a proportion of indium contained in the first oxide layer, and
wherein the proportion of indium contained in the oxide semiconductor layer is larger than a proportion of indium contained in the second oxide layer.
7. The semiconductor device according to claim 1 , wherein each of the first oxide layer, the second oxide layer, and the oxide semiconductor layer contains indium, zinc, and gallium.
8. The semiconductor device according to claim 1 , further comprising an oxide insulating layer over the gate electrode layer,
wherein the amount of oxygen released from the oxide insulating layer, which is converted into oxygen atoms in thermal desorption spectroscopy, is greater than or equal to 1.0×10 19 atoms/cm 3 .
9. The semiconductor device according to claim 1 , wherein each of the oxide semiconductor layer and the second oxide layer comprises a crystalline region having c-axis alignment in a direction substantially perpendicular to a surface.
10. An electronic device comprising the semiconductor device according to claim 1 .
11. A semiconductor device, comprising:
a first oxide layer;
an oxide semiconductor layer over the first oxide layer;
a source electrode layer and a drain electrode layer which are in contact with the oxide semiconductor layer;
a second oxide layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer;
a gate insulating layer over the second oxide layer; and
a gate electrode layer over the gate insulating layer,
wherein the oxide semiconductor layer comprises In and Zn,
wherein the source electrode layer comprises a first region and a second region,
wherein the drain electrode layer comprises a third region and a fourth region,
wherein the second oxide layer is in direct contact with a top surface of the first region and a top surface of the third region,
wherein each of the first region and the third region are in direct contact with a top surface of the oxide semiconductor layer,
wherein the second region and the fourth region do not overlap with the second oxide layer and the gate insulating layer, and
wherein a side surface of the second oxide layer and a side surface of the gate insulating layer are aligned over the first region of the source electrode layer and the third region of the drain electrode layer.
12. The semiconductor device according to claim 11 , wherein the side surface of the gate insulating layer is aligned with a side surface of the gate electrode layer.
13. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises Ga.
14. An electronic device comprising:
a semiconductor device comprising:
a first oxide layer;
an oxide semiconductor layer over the first oxide layer;
a source electrode layer and a drain electrode layer which are in contact with the oxide semiconductor layer;
a second oxide layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer;
a gate insulating layer over the second oxide layer; and
a gate electrode layer over the gate insulating layer,
wherein the oxide semiconductor layer comprises In and Zn,
wherein the source electrode layer comprises a first region and a second region,
wherein the drain electrode layer comprises a third region and a fourth region,
wherein the second oxide layer is in direct contact with a top surface of the first region and a top surface of the third region,
wherein each of the first region and the third region are in direct contact with a top surface of the oxide semiconductor layer,
wherein the second region and the fourth region do not overlap with the second oxide layer and the gate insulating layer, and
wherein a side surface of the second oxide layer and a side surface of the gate insulating layer are aligned over the source electrode layer and the drain electrode layer.
15. The electronic device according to claim 14 , wherein the side surface of the gate insulating layer is aligned with a side surface of the gate electrode layer.