IP Library Granted Patent US 9,616,524
Granted Patent B2
US 9,616,524 · App. 12/999,313 · Granted Apr 11, 2017

Light induced patterning

Inventors: Mikhael Matusovsky (Rishon-LeZion, IL); Amir Noy (Kfar Mordechai, IL); Moshe Finarov (Rechovot, IL); Giora Dishon (Jerusalem, IL)
Assignee: Utilight Ltd.
B23K26/0738B23K26/0006B23K26/0066B23K26/0821B41M5/38207B41M5/38221C23C14/04C23C14/28H01L31/022425H05K3/207B23K2201/34B23K2201/40B23K2203/56B41M2205/02H05K3/0097H05K2201/0108H05K2203/107Y02E10/50Y10T428/2457Y10T428/24479
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Quick Facts
Patent No.
US 9,616,524
App. No.
12/999,313
Granted
Apr 11, 2017
Kind
B2
Abstract

A method of depositing a material on a receiving substrate, the method comprising: providing a source substrate having a back surface and a front surface, the back surface carrying at least one piece of coating material; providing a receiving substrate positioned adjacent to the source substrate and facing the coating material; and radiating light towards the front surface of the source substrate, to remove at least one piece of the coating material from the source substrate and deposit said removed at least one piece onto the receiving substrate as a whole.

Claims (91)

1. A method of depositing material on a receiving substrate, the method comprising:

providing a source substrate having a back surface and a front surface, the back surface carrying at least one continuous piece of coating material;

providing a receiving substrate positioned adjacent to the source substrate and facing the at least one continuous piece of coating material; and

radiating light towards the front surface of the source substrate, to remove the at least one continuous piece of the coating material from the back surface of the source substrate as a whole, without detaching parts of the continuous piece from other parts of the continuous piece of coating material such that the entire continuous piece of the coating material is transferred as a whole onto the receiving substrate,

wherein radiating light comprises scanning a light beam across the front surface of the source substrate to follow a pattern of said at least one continuous piece of coating material.

2. A method according to claim 1 , wherein radiating light comprises radiating light which covers less than said at least one continuous piece of coating material.

3. A method according to claim 1 , wherein radiating light comprises radiating a non-laser light beam.

4. A method according to claim 3 , wherein radiating a non-laser light beam comprises radiating a broadband flash light beam.

5. A method according to claim 1 , wherein radiating light comprises radiating a laser beam.

6. A method according to claim 5 , wherein radiating light comprises radiating with a continuous laser radiation.

7. A method according to claim 5 , wherein radiating light comprises radiating with a repetition pulsed laser.

8. A method according to claim 1 , wherein radiating light towards the front surface of the source substrate comprises heating the at least one continuous piece of coating material thereby volatizing volatile material between the back surface of the source substrate and the at least one continuous piece of coating material, which provides a force for removing the at least one continuous piece of coating material from the back surface of the source substrate.

9. A method according to claim 1 , wherein removal of the at least one continuous piece of the coating material, comprises removing a continuous piece which has an aspect ratio of more than 0.1.

10. A method according to claim 1 , wherein removal of the at least one continuous piece of the coating material, comprises removing a continuous piece which has a height more than 5 μm.

11. A method according to claim 1 , wherein radiating light towards the front surface of the source substrate, to remove the at least one continuous piece of the coating material from the source substrate comprises radiating the at least one continuous piece of coating material once to remove said at least one continuous piece of coating material from the source substrate as a whole.

12. A method according to claim 1 wherein radiating light comprises radiating a line.

13. A method according to claim 1 , wherein radiating light comprises radiating light at a power less than 3 W.

14. A method according to claim 1 further comprising adding coating material to the source substrate at a portion from which the at least one continuous piece of coating material was deposited to the receiving substrate.

15. A method according to claim 1 , further comprising cleaning the source substrate at a portion from which the at least one continuous piece of coating material was deposited to the receiving substrate.

16. A method according to claim 1 , further comprising:

radiating light towards the receiving substrate, to ablate openings in the receiving substrate.

17. A method according to claim 16 , further comprising aligning the source and receiving substrates such that radiating light radiated towards the source substrate will cause the removed at least one continuous piece of coating material to be deposited in the ablated opening in the receiving substrate.

18. A method according to claim 1 , wherein providing a source substrate comprises providing a source substrate wherein said at least one continuous piece of coating material includes a volatile admixture which volatizes when it is irradiated by the light.

19. A method according to claim 1 , wherein providing a source substrate, comprises:

providing a source substrate carrying said at least one continuous piece of coating material which coats less than an entire surface of the source substrate,

wherein the source substrate comprises trenches in which the at least one continuous piece of coating material is positioned,

wherein said trenches comprise a bottom surface and two sidewalls, the bottom surface and sidewalls of the trenches being coated with a material, and

wherein the material coating the sidewalls has a lower surface energy than the material coating the bottom surface.

20. A method according to claim 19 , wherein said trenches are formed as openings made in a metal layer coating the source substrate.

21. A method according to claim 19 , wherein the bottom surface of the trenches is textured.

22. A method according to claim 19 , wherein the source substrate carries at least two continuous pieces of coating material which are made from different materials.

23. A method according to claim 19 , wherein the aspect ratio of the height and width of the at least one continuous piece of coating material is approximately equal or higher than 0.1.

24. A method according to claim 19 , wherein the height of the at least one continuous piece of coating material is more than 5 μm.

25. A method according to claim 19 , further comprising:

providing a filling station adapted for filling the source substrate with coating material.

26. A method according to claim 19 further comprising:

providing a cleaning station adapted for cleaning the source substrate after material deposition therefrom.

27. A method according to claim 19 , wherein radiating light comprises radiating a broadband flash light beam.

28. A method according to claim 19 , wherein radiating light comprises radiating a laser beam.

29. A method according to claim 28 , wherein radiating light further comprises transforming the laser beam into a scan line.

30. A method according to claim 19 , wherein radiating light comprises raster line scanning.

31. A method according to claim 19 , wherein the at least one continuous piece of coating material includes a volatile admixture adapted to volatize when radiated by the light.

32. A method according to claim 19 , further comprising admixturing a volatile between the source substrate and the at least one continuous piece of coating material.

33. A method according to claim 19 , wherein the receiving substrate is positioned below the source substrate.

34. A method according to claim 1 , wherein the source substrate is transparent to the radiated light.

35. A method according to claim 1 , wherein the at least one continuous piece of coating material comprises a plurality of separate continuous pieces of material.

36. A method according to claim 35 wherein the separate continuous pieces of material are formed as lines.

37. A method according to claim 36 wherein the lines are straight lines.

38. A method according to claim 1 , wherein the at least one continuous piece of coating material is formed as a spiral.

39. A method according to claim 1 , further comprising providing an ablating light source adapted to radiate light for ablating openings in the receiving substrate.

40. A method according to claim 39 wherein the ablating light source and the light source used for radiating light towards the front surface of the source substrate, to remove the at least one continuous piece of the coating material from the back surface of the source substrate as a whole, comprise a single light source.

41. A method according to claim 39 , wherein the ablating light source and the light source used for radiating light towards the front surface of the source substrate, to remove the at least one continuous piece of the coating material from the back surface of the source substrate as a whole, are two different light sources radiating light at different energies.

42. A method according to claim 39 , further comprising, providing a controller adapted to align the source and receiving substrates such that the at least one continuous piece of coating material will be deposited in the openings in the receiving substrate.

43. A method according to claim 1 , further comprising moving a plurality of receiving substrates below the radiated light.

44. A method according to claim 1 , wherein said removed at least one continuous piece of coating material is not-segmented during transfer.

45. A method according to claim 1 , wherein the source substrate comprises trenches in which the at least one continuous piece of coating material is positioned.

46. A method according to claim 45 , wherein said trenches have a trapezoidal cross-section with the narrow base of the trapezoid facing the back surface of the source substrate and the wider base of the trapezoid facing outward.

47. A method according to claim 1 , wherein the at least one continuous piece of coating material comprises metallic paste.

48. A method according to claim 1 , wherein providing a source substrate comprises providing a source substrate comprising:

a transparent substrate having a front surface and a back surface;

a coating layer positioned on top of the transparent back surface; and

a plurality of unconnected openings formed in the coating layer for positioning of coating material therein.

49. A method according to claim 48 , wherein said coating material has a height of between 10 μm-300 μm.

50. A method according to claim 48 , wherein said openings have a trapezoidal cross-section with the narrow base of the trapezoid facing the back surface and the wider base of the trapezoid facing outward.

51. A method according to claim 48 , wherein the coating layer comprises a nickel layer.

52. A method according to claim 48 , wherein the coating layer comprises a metal layer.

53. A method according to claim 48 , wherein said plurality of openings are formed as straight lines.

54. A method according to claim 48 , wherein the source substrate further comprises an intermediate layer between the back surface and the coating layer.

55. A method according to claim 48 , wherein each of said openings comprise a bottom surface and two sidewalls, the bottom surface and sidewalls of the trenches being coated with a material, and wherein the material coating the sidewalls has a lower surface energy than the material coating the bottom surface.

56. A method according to claim 48 , wherein each of said openings comprise a bottom surface which is textured.

57. A method of depositing material on a receiving substrate, the method comprising:

providing a source substrate having a back surface and a front surface, the back surface carrying at least one continuous piece of coating material;

providing a receiving substrate positioned adjacent to the source substrate and facing the at least one continuous piece of coating material; and

radiating light towards the front surface of the source substrate, to remove the at least one continuous piece of coating material from the back surface of the source substrate as a whole, without detaching parts of the continuous piece from other parts of the continuous piece of coating material such that the entire continuous piece of coating material is transferred as a whole onto the receiving substrate,

wherein radiating light comprises scanning a light beam across the front surface of the source substrate to follow a pattern of said at least one continuous piece of coating material, and

wherein said continuous piece of coating material is removed from the source substrate starting at one end of the piece and removing proceeds during said pattern following of the radiating light until the entire piece is detached, without breaking the continuous piece during the detachment.

58. A method of depositing material on a receiving substrate, the method comprising:

providing a source substrate having a back surface and a front surface, the back surface comprising trenches in which coating material is positioned;

providing a receiving substrate positioned adjacent to the source substrate and facing the coating material; and

radiating light towards the front surface of the source substrate, to remove one continuous piece of the coating material from one of said trenches in the back surface of the source substrate as a whole, without detaching parts of the one continuous piece from other parts of the one continuous piece of coating material such that the entire one continuous piece is transferred as a whole onto the receiving substrate,

wherein radiating light comprises scanning a light beam across the front surface of the receiving substrate to follow a pattern of said trench.

59. A method according to claim 58 , wherein said trenches have a trapezoidal cross-section with the narrow base of the trapezoid facing the back surface of the source substrate.

60. A method of depositing material on a receiving substrate, the method comprising:

providing a source substrate having a back surface and a front surface, the back surface carrying at least one continuous piece of metallic paste;

providing a receiving substrate positioned adjacent to the source substrate and facing the at least one continuous piece of metallic paste; and

radiating light towards the front surface of the source substrate, to remove the at least one continuous piece of the metallic paste from the back surface of the source substrate as a whole, without detaching paste of the at least one continuous piece from other parts of the at least one continuous piece of metallic paste such that the entire continuous piece is transferred as a whole onto the receiving substrate,

wherein radiating light comprises scanning a light beam across the front surface of the source substrate to follow a pattern of said at least one continuous piece of metallic paste.

61. A method according to claim 60 , wherein said at least one continuous piece of metallic paste contains a volatile solvent.

62. A method according to claim 60 , wherein said at least one continuous piece of metallic paste contains silver.

63. A method according to claim 60 , wherein a viscosity of said at least one continuous piece of metallic paste is in the range of 10 4 cP to 10 7 cP.

64. A method according to claim 60 , wherein the source substrate comprises trenches in which the metallic paste is positioned.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 22, 2020
From: UTILIGHT LTD
To: WUHAN DR LASER TECHNOLOGY CORP. LTD
Reel/Frame 053837/0974 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 24, 2010
From: MATUSOVSKY, MIKHAEL; NOY, AMIR; FINAROV, MOSHE; DISHON, GIORA
To: UTILIGHT LTD.
Reel/Frame 025568/0243 →
Priority Claims (3)
IL 192291 · Jun 19, 2008 · national
IL 194665 · Oct 12, 2008 · national
IL 198629 · May 7, 2009 · national
Continuity (1)
Related Publication 20110097550A1 · Apr 28, 2011