Method for removing native oxide and residue from a III-V group containing surface
Native oxides and residue are removed from surfaces of a substrate by performing a multiple-stage native oxide cleaning process. In one example, the method for removing native oxides from a substrate includes supplying a first gas mixture including an inert gas onto a surface of a material layer disposed on a substrate into a first processing chamber, wherein the material layer is a III-V group containing layer for a first period of time, supplying a second gas mixture including an inert gas and a hydrogen containing gas onto the surface of the material layer for a second period of time, and supplying a third gas mixture including a hydrogen containing gas to the surface of the material layer while maintaining the substrate at a temperature less than 550 degrees Celsius.
1. A method for removing native oxides from a material layer disposed on a substrate, comprising:
supplying an inert gas to a surface of a material layer disposed on a substrate to alter bonding structures of native oxide on the surface of the material layer for a first period of time at a first temperature, wherein the material layer is a III-V group containing layer;
supplying a H 2 gas and an inert gas to remove the native oxide from the material layer for a second period of time at a second temperature; and
supplying a H 2 gas to remove residual oxide from the material layer for a third period of time while maintaining the substrate at a third temperature, wherein the third temperature is higher than the first and the second temperature.
2. The method for claim 1 , further comprising:
forming a III-V group material on the material layer while maintaining the substrate at the third temperature.