Thin film transistor, its manufacturing method, array substrate and display device
The present disclosure provides a thin film transistor (TFT), its manufacturing method, an array substrate and a display device. The method for manufacturing the TFT includes steps of forming patterns of a gate electrode, a source electrode and a drain electrode on a base substrate; and forming a pattern of an active layer and a pattern of a passivation layer covering the active layer by a single patterning process. The passivation layer is made of a negative or positive photoresist, and the active layer is insulated from the gate electrode and electrically connected to the source electrode and the drain electrode.
1. A method for manufacturing a thin film transistor (TFT), comprising steps of:
forming patterns of a gate electrode, a source electrode and a drain electrode on a base substrate; and
forming a pattern of an active layer and a pattern of a passivation layer covering the active layer by a single patterning process,
wherein the passivation layer is made of a negative or positive photoresist, and the active layer is insulated from the gate electrode and electrically connected to the source electrode and the drain electrode,
wherein the step of forming the patterns of the active layer and the passivation layer covering the active layer by a single patterning process comprises:
forming an active layer film on the base substrate;
forming a photoresist layer made of the negative or the positive photoresist on the active layer film;
exposing and developing the photoresist layer so as to form the pattern of the passivation layer; and
etching the active layer film using the pattern of the passivation layer as a mask, so as to form the pattern of the active layer,
wherein after forming the pattern of the passivation layer, the base substrate with the passivation layer is subjected to a high-temperature annealing treatment, and
wherein an annealing temperature is a temperature that cures the negative or the positive photoresist that forms the passivation layer.
2. The method according to claim 1 , wherein the step of etching the active layer film comprises:
dry-etching the active layer film with oxygen plasma.
3. The method according to claim 1 , wherein the photoresist layer is applied by spinning.
4. The method according to claim 1 , wherein the passivation layer is of a thickness of 100 nm to 1000 nm.
5. The method according to claim 1 , wherein the active layer is of a thickness of 10 nm to 100 nm.
6. The method according to claim 5 , wherein the active layer is of a thickness of 40 nm to 60 nm.
7. The method according to claim 1 , wherein the step of forming the patterns of the gate electrode, the source electrode, the drain electrode, the active layer and the passivation layer comprises:
forming the pattern of the gate electrode on the base substrate;
forming on the base substrate with the gate electrode a gate insulating layer covering the gate electrode and the base substrate;
forming the patterns of the source electrode and the drain electrode on the gate insulating layer by a single patterning process; and
forming the patterns of the active layer and the passivation layer on the source electrode and the drain electrode by a single patterning process.
8. The method according to claim 2 , wherein the step of forming the patterns of the gate electrode, the source electrode, the drain electrode, the active layer and the passivation layer comprises:
forming the pattern of the gate electrode on the base substrate;
forming on the base substrate with the gate electrode a gate insulating layer covering the gate electrode and the base substrate;
forming the patterns of the source electrode and the drain electrode on the gate insulating layer by a single patterning process; and
forming the patterns of the active layer and the passivation layer on the source electrode and the drain electrode by a single patterning process.
9. The method according to claim 1 , wherein the step of forming the patterns of the gate electrode, the source electrode, the drain electrode, the active layer and the passivation layer on the base substrate comprises:
forming the patterns of the source electrode and the drain electrode on the base substrate by a single patterning process;
forming the patterns of the active layer and the passivation layer on the source electrode and the drain electrode by a single patterning process;
forming the gate insulating layer covering the passivation layer on the base substrate; and
forming the pattern of the gate electrode on the gate insulating layer.
10. The method according to claim 2 , wherein the step of forming the patterns of the gate electrode, the source electrode, the drain electrode, the active layer and the passivation layer on the base substrate comprises:
forming the patterns of the source electrode and the drain electrode on the base substrate by a single patterning process;
forming the patterns of the active layer and the passivation layer on the source electrode and the drain electrode by a single patterning process;
forming the gate insulating layer covering the passivation layer on the base substrate; and
forming the pattern of the gate electrode on the gate insulating layer.