Germanium profile for channel strain
The present disclosure relates to a transistor device having a strained source/drain region comprising a strained inducing material having a discontinuous germanium concentration profile. In some embodiments, the transistor device has a gate structure disposed onto a semiconductor substrate. A source/drain region having a strain inducing material is disposed along a side of the gate structure within a source/drain recess in the semiconductor substrate. The strain inducing material has a discontinuous germanium concentration profile along a line extending from a bottom surface of the source/drain recess to a top surface of the source/drain recess. The discontinuous germanium concentration profile provides improved strain boosting and dislocation propagation.
1. A transistor device, comprising:
a gate structure disposed onto a semiconductor substrate;
strained source/drain regions arranged on opposing sides of the gate structure and comprising:
a first layer arranged along a bottom surface of a source/drain recess located within the semiconductor substrate and having a strain inducing component with a first concentration profile that decreases as a distance from the bottom surface increases; and
a second layer overlying the first layer and having the strain inducing component with a second concentration profile that is discontinuous with the first concentration profile of the first layer along a line extending from the bottom surface of the source/drain recess to a top of the source/drain recess, wherein the second concentration profile increases as a distance from the first layer increases.
2. The transistor device of claim 1 , wherein the strained source/drain regions comprise:
a first silicon-germanium (SiGe) layer disposed onto the bottom surface of the source/drain recess and having a first germanium concentration profile that decreases as the distance from the bottom surface increases;
a second SiGe layer disposed onto the first SiGe layer, wherein the second SiGe layer has a second germanium concentration profile that is discontinuous with the first germanium concentration profile and that increases as a distance from the first SiGe layer increases; and
a third SiGe layer disposed onto the second SiGe layer, wherein the third SiGe layer has a constant third germanium concentration profile less than a maximum germanium concentration of the second SiGe layer.
3. The transistor device of claim 2 , wherein the first SiGe layer has a different doping concentration profile along a first line extending normal to a first bottom surface comprising a <100> surface than along a second line extending normal to a second bottom surface comprising a <111> surface.
4. The transistor device of claim 2 , wherein the first SiGe layer comprises a germanium concentration of approximately 40% along a lower surface of the first SiGe layer to a germanium concentration of approximately 10% along an upper surface of the first SiGe layer.
5. The transistor device of claim 2 , wherein the second SiGe layer comprises a germanium concentration of approximately 30% along a lower surface of the second SiGe layer to a germanium concentration of approximately 70% along an upper surface of the first SiGe layer.
6. The transistor device of claim 2 , wherein the third SiGe layer comprises a silicon cap layer comprising un-doped pure silicon.
7. The transistor device of claim 1 , further comprising:
a first silicon-germanium (SiGe) layer disposed onto the bottom surface of the source/drain recess and having a first germanium concentration profile that decreases as the distance from the bottom surface increases; and
a second SiGe layer disposed onto the first SiGe layer, wherein the second SiGe layer has a second germanium concentration profile that is discontinuous with the first germanium concentration profile and that increases as a distance from the first SiGe layer increases.
8. The transistor device of claim 1 , wherein the first SiGe layer vertically extends to a position that is laterally abuts the second SiGe layer.
9. The transistor device of claim 1 , wherein the first concentration profile monotonically decreases from the bottom surface to a top surface of the first layer.
10. The transistor device of claim 1 , wherein the first layer laterally contacts sidewalls of the second layer.
11. A transistor device, comprising:
a gate structure disposed on a semiconductor substrate;
a source/drain region disposed next to the gate structure in a source/drain recess within the semiconductor substrate and comprising a plurality of strain inducing silicon germanium (SiGe) layers that provide for a discontinuous germanium concentration profile along a line extending from a bottom surface of the source/drain recess to a top surface of the source/drain recess;
wherein one of the plurality of strain inducing SiGe layers abutting a bottom of the source/drain recess comprises a first germanium concentration profile that changes from a high germanium concentration at a first position to a lower germanium concentration at a second position overlying the first position; and
wherein the one of the plurality of strain inducing SiGe layers is separated from a gate dielectric layer of the gate structure by the semiconductor substrate along a vertical line perpendicular to an upper surface of the semiconductor substrate.
12. The transistor device of claim 11 , wherein the plurality of strain inducing SiGe layers comprise:
a first silicon-germanium (SiGe) layer disposed onto the bottom surface of the source/drain recess and having a first germanium concentration profile;
a second SiGe layer disposed onto the first SiGe layer, wherein the second SiGe layer has a second germanium concentration profile that is discontinuous with the first germanium concentration profile; and
a third SiGe layer disposed onto the second SiGe layer, wherein the third SiGe layer has a third germanium concentration profile less than a maximum germanium concentration of the second SiGe layer.
13. The transistor device of claim 12 , wherein the first SiGe layer has a different doping concentration profile along a first line extending normal to a first bottom surface comprising a <100> surface than along a second line extending normal to a second bottom surface comprising a <111> surface.
14. The transistor device of claim 11 , wherein the source/drain recess has a sidewall comprising a first slanted surface with a positive slope connected to a second slanted surface with a negative slope, wherein the one of the plurality of strain inducing SiGe layers abuts the first slanted surface and the second slanted surface.
15. The transistor device of claim 11 , further comprising:
a cap layer arranged over the plurality of strain inducing SiGe layers and having a planar upper surface that extends between the gate structure and a second gate structure.
16. A transistor device, comprising:
a gate structure disposed onto a semiconductor substrate; and
a first silicon germanium (SiGe) layer disposed within a recess in the semiconductor substrate and having a gradient first germanium concentration that decreases as a distance from a bottom of the recess increases;
a second SiGe layer disposed within the recess above the first SiGe layer and having a second germanium concentration that is discontinuous with the gradient first germanium concentration; and
a third SiGe layer arranged vertically over the second SiGe layer and laterally between the second SiGe layer and the gate structure, wherein the third SiGe layer has a third germanium concentration that is less than a maximum germanium concentration within the second SiGe layer.
17. The transistor device of claim 16 , wherein the first SiGe layer is confined within the recess.
18. The transistor device of claim 16 , wherein the second germanium concentration comprises a second gradient germanium concentration that increases as the distance from the bottom of the recess increases.
19. The transistor device of claim 16 , wherein the first SiGe layer has a greater width than the second SiGe layer.
20. The transistor device of claim 16 , wherein the first SiGe layer vertically extends to a position that is laterally abuts the second SiGe layer.