IP Library › Granted Patent US 9,695,501
Granted Patent B2
US 9,695,501 · App. 14/642,742 · Granted Jul 4, 2017

Sapphire thin film coated substrate

Inventors: Kok Wai Cheah (Hong Kong, HK); King Fai Li (Hong Kong, HK); Hoi Lam Tam (Hong Kong, HK); Wing Yui Lam (Hong Kong, HK); Ka Suen Lee (Hong Kong, HK)
Assignee: HONG KONG BAPTIST UNIVERSITY
C23C14/081C03C17/00C23C14/5806
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Quick Facts
Patent No.
US 9,695,501
App. No.
14/642,742
Granted
Jul 4, 2017
Kind
B2
Abstract

A method to deposit a layer of harder thin film substrate onto a softer substrate. In particular, the present invention provides a method to deposit a layer of sapphire thin film on to a softer substrate e.g. quartz, fused silica, silicon and (toughen) glass. This combination is better than pure sapphire substrate.

Claims (19)

1. A method for coating sapphire on to a substrate comprising,

an e-beam evaporation or sputtering deposition process at room temperature, wherein sapphire is deposited directly on to a substrate selected from quartz, fused silica, silicon, glass, or toughened glass to form a sapphire coated substrate, wherein the substrate during deposition is without external cooling or heating; and

at least one anneal process, wherein said sapphire coated substrate is annealed under an annealing temperature ranging between 500° C. and 2040° C. for an effective duration of time.

2. The method according to claim 1 , wherein said substrate comprises at least one material with a Mohs value less than that of said sapphire.

3. The method according to claim 1 , wherein said sapphire is deposited as a sapphire thin film on to said substrate.

4. The method according to claim 3 , wherein a thickness of said substrate is of one or more orders of magnitude greater than a thickness of said sapphire thin film.

5. The method according to claim 4 , wherein said sapphire thin film has the thickness between 150 nm and 600 nm.

6. The method according to claim 4 , wherein said sapphire thin film has the thickness between 150 nm and 300 nm.

7. The method according to claim 3 , wherein a thickness of said sapphire thin film is about 1/1000 of a thickness of said substrate.

8. The method according to claim 1 , wherein said effective duration of time is no less than 30 minutes and no more than 2 hours.

9. The method according to claim 1 , wherein said at least one anneal process has a temperature raising rate of 5° C. per minute and a temperature declining rate of 1° C. per minute.

10. The method according to claim 1 , wherein said annealing temperature ranges between 850° C. and 1300° C.

11. The method according to claim 1 , wherein said annealing temperature ranges between 1150° C. and 1300° C.

12. A method for protecting a surface of a substrate by coating said surface with sapphire using the method according to claim 1 .

13. The method according to claim 12 , wherein said surface allows light to pass through.

14. A screen fabricated by using the method according to claim 1 for use in displays.

15. The screen according to claim 14 , wherein said screen is used as one or more interfaces in electronic or digital devices.

16. The screen according to claim 14 , wherein said screen is scratch resistant, shatter resistant, and light in weight.

17. The screen according to claim 14 , wherein said screen allows light to pass through.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2020
From: HONG KONG BAPTIST UNIVERSITY
To: HKBU R&D LICENSING LIMITED
Reel/Frame 052992/0153 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 10, 2015
From: CHEAH, KOK WAI; LI, KING FAI; TAM, HOI LAM; LAM, WING YUI; LEE, KA SUEN
To: HONG KONG BAPTIST UNIVERSITY
Reel/Frame 035120/0812 →
Continuity (2)
Provisional Application 62049364 · Sep 12, 2014
Related Publication 20160076135A1 · Mar 17, 2016