X-ray generator and fluorescent X-ray analyzer
The present invention provides an X-ray generator including an X-ray tube 2 radiating primary X-rays X 1 to a specimen S, a housing 3 accommodating the X-ray tube 2 , an X-ray radiation area controller 4 limiting the radiation area of the primary X-rays X 1 from the X-ray tube 2 to the specimen S, and a device holder 5 holding the X-ray radiation area controller 4 with respect to the housing 3 . The X-ray tube includes a case 6 , an electron ray source 7 generating electron rays, and a target unit 8 having a base fixed to the case and receiving electron rays through a protruding free end. The device holder has a fixed-base 5 a fixed to the housing, directly under the base of the target unit, and a supporting extension 5 b extending from the fixed-base in the protrusion direction of the target unit and supporting the X-ray radiation area controller.
1. An X-ray generator, comprising:
an X-ray tube radiating primary X-rays to a specimen;
a housing accommodating the X-ray tube;
an X-ray radiation area controller limiting a radiation area of the primary X-rays from the X-ray tube to the specimen; and
a device holder holding the X-ray radiation area controller with respect to the housing,
wherein the X-ray tube includes a vacuumized case, an electron ray source disposed as a cathode in the case and generating electron rays, and a target unit disposed as an anode facing the electron ray source in the case, with a base fixed to the case, and receiving electron rays through a protruding free end,
the device holder has a fixed-base fixed to the housing, directly under the base of the target unit, and a supporting extension extending from the fixed-base in a protrusion direction of the target unit and supporting the X-ray radiation area controller,
a thermal expansion rate in an extension direction of the supporting extension from the fixed-base in the same direction as the protrusion direction of the target unit is the same as a thermal expansion rate in the protrusion direction of the target unit, and
a distance from a portion of the supporting extension fixed to the housing to a central axis of the X-ray radiation area controller is the same as a distance from the base to an X-ray generation position at the free end of the target unit.
2. The X-ray generator of claim 1 , wherein the supporting extension is made the same material as the target unit.
3. The X-ray generator of claim 1 , wherein the device holder has a guide that guides the supporting extension such that the supporting extension can thermally expand in the extension direction.
4. A fluorescent X-ray analyzer comprising the X-ray generator of claim 1 and a detector detecting fluorescent X-rays coming out of the specimen receiving the primary X-rays.