IP Library › Granted Patent US 9,721,920
Granted Patent B2
US 9,721,920 · App. 13/736,097 · Granted Aug 1, 2017

Embedded chip packages and methods for manufacturing an embedded chip package

Inventors: Gottfried Beer (Nittendorf, DE); Walter Hartner (Bad Abbach, DE)
Assignee: INFINEON TECHNOLOGIES AG
H01L24/82H01L21/78H01L23/5384H01L23/5389H01L24/19H01L24/24H01L24/96H01L24/97H01Q1/2283H01Q23/00H01L23/3128H01L23/49816H01L23/66H01L24/16H01L24/32H01L24/48H01L24/73H01L25/105H01L25/16H01L2223/6627H01L2223/6677H01L2223/6683H01L2224/0401H01L2224/04105H01L2224/12105H01L2224/16225H01L2224/24195H01L2224/32145H01L2224/32245H01L2224/451H01L2224/48227H01L2224/73267H01L2224/97H01L2225/06551H01L2225/06562H01L2225/1035H01L2225/1041H01L2225/1058H01L2924/00014H01L2924/12042H01L2924/1301H01L2924/1423H01L2924/1431H01L2924/1434H01L2924/1461H01L2924/15311H01L2924/181H01L2924/19041H01L2924/19042H01L2924/19043H01L2924/19105
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Quick Facts
Patent No.
US 9,721,920
App. No.
13/736,097
Granted
Aug 1, 2017
Kind
B2
Abstract

A method for manufacturing an embedded chip package is provided. The method may include: forming electrically conductive lines over a substrate; placing the substrate next to a chip arrangement comprising a chip, the chip comprising one or more contact pads, wherein one or more of the electrically conductive lines are arranged proximate to a side wall of the chip; and forming one or more electrical interconnects over the chip arrangement to electrically connect at least one electrically conductive line to at least one contact pad.

Claims (64)

1. A method for manufacturing an embedded chip package, the method comprising

forming a first layer of electrically conductive lines over a substrate to form a pre-formed via arrangement; wherein the first layer of electrically conductive lines are substantially the same length;

placing the pre-formed via arrangement perpendicularly next to a first side of a chip arrangement comprising a chip, the chip comprising a chip bottom side disposed directly over at least one solder structure and a chip top side comprising one or more contact pads, wherein one or more of the electrically conductive lines of the first layer are arranged proximate to a first side wall of the chip and wherein the pre-formed via arrangement is turned so that the electrically conductive lines are facing the first side wall of the chip;

forming a second layer of electrically conductive lines at a second side of the chip arrangement; wherein the first layer of electrically conductive lines comprises a first width, and wherein the second layer of electrically conductive lines comprises a second width, and wherein the first width and the second width are different; and

subsequent to the placing the pre-formed via arrangement next to the chip arrangement, forming one or more electrical interconnects over the chip arrangement substantially perpendicular to the electrically conductive lines and substantially parallel to a top side of the chip so as to electrically connect at least one electrically conductive line to at least one of the contact pads.

2. The method according to claim 1 , further comprising:

forming an electrically insulating material over the pre-formed via arrangement and at least partially surrounding each of the first layer and/or the second layer of electrically conductive lines.

3. The method according to claim 1 ,

wherein the first layer of electrically conductive lines are formed over the substrate using a planar deposition.

4. The method according to claim 1 ,

wherein the first layer and/or the second layer of the electrically conductive lines are one of substantially parallel to each other and arranged with an angle to each other.

5. The method according to claim 1 ,

wherein each of the electrically conductive lines comprises a metal.

6. The method according to claim 1 ,

wherein the substrate comprises at least one material from the following group of materials, the group of materials consisting of: mold compound, laminate, ceramic, semiconductor, liquid crystal polymer and isolated metal substrates.

7. The method according to claim 2 ,

wherein the electrically insulating material comprises at least one material from the following group of materials, the group of materials consisting of: mold compound; laminate; duroplast; thermoplast; and ceramic.

8. The method according to claim 1 ,

wherein the chip comprises one or more chip side walls, and

wherein the one or more contact pads are formed over at least one of a chip top side and a chip bottom side.

9. The method according to claim 8 ,

wherein the first layer of the electrically conductive lines are substantially parallel to the chip side wall.

10. The method according to claim 8 ,

wherein the first layer of electrically conductive lines are arranged substantially equidistant from a chip side wall.

11. A method for manufacturing an embedded chip package, the method comprising

forming a first layer of electrically conductive lines over a first substrate side to form a pre-formed via arrangement, each electrically conductive line having substantially the same length,

wherein each electrically conductive line is covered by electrically insulating material at least partially surrounding the electrically conductive lines;

placing a surface of the pre-formed via arrangement perpendicularly next to a first side of a chip arrangement comprising a chip, the chip comprising a chip bottom side disposed directly over at least one solder structure and a chip top side comprising one or more contact pads, wherein the first layer of electrically conductive lines are arranged proximate to a first side wall of the chip and wherein the pre-formed via arrangement is turned so that the electrically conductive lines are facing the first side wall of the chip;

forming a second layer of electrically conductive lines at a second side of the chip arrangement, wherein each conductive line of the first layer is separated from a neighboring electrically conductive line by a first pitch, wherein each conductive line of the second layer is separated from a neighboring electrically conductive line by a second pitch, and wherein the first pitch and the second pitch are different; and

subsequent to the placing the pre-formed via arrangement next to the chip arrangement, forming at least one electrical interconnect over the chip arrangement substantially perpendicular to the successive layers of electrically conductive lines and parallel to a top side of the chip so as to electrically connect at least one electrically conductive line to at least one of the contact pads.

12. The method according to claim 11 ,

further comprising forming a first electrically insulating material over the substrate and at least partially surrounding the first layer of electrically conductive lines.

13. The method according to claim 12 ,

further comprising forming a second electrically insulating material over the second layer of electrically conductive lines.

14. The method according to claim 13 ,

wherein placing the pre-formed via arrangement next to the chip arrangement comprises adjoining the second electrically insulating material to the chip arrangement.

15. The method according to claim 11 , further comprising

forming one or more further successive layers of further electrically conductive lines over a second substrate side, each further layer comprising a plurality of substantially parallel further electrically conductive lines, wherein each further layer is covered by further electrically insulating material at least partially surrounding the further electrically conductive lines;

adhering a surface of the further electrically insulating material to a further chip arrangement comprising a further chip comprising one or more further contact pads,

wherein the further electrically conductive lines are arranged proximate to a side wall of the further chip; and

forming at least one further electrical interconnect over the further chip arrangement to electrically connect at least one further electrically conductive line to at least one further contact pad.

16. The method according to claim 11 ,

further comprising forming one or more successive rows of electrical interconnects over the chip arrangement, wherein each row comprises a plurality of electrical interconnects arranged substantially perpendicular to the first layer of electrically conductive lines.

17. The method according to claim 11 , further comprising

dicing through the substrate in to form an individualized embedded chip package.

18. An embedded chip package comprising:

a chip arrangement comprising a chip comprising a chip bottom side disposed directly over at least one solder structure and a chip top side comprising one or more contact pads;

a pre-formed via arrangement comprising a first layer of electrically conductive lines formed over a first substrate side, each electrically conductive line of the first layer having substantially the same length;

wherein a surface of the substrate is embedded with the chip arrangement;

wherein the first layer of electrically conductive lines are arranged proximate to a first side wall of the chip and facing the first side wall of the chip;

a second layer of electrically conductive lines at a second sidewall of the chip, wherein the first layer of electrically conductive lines comprises a first width, and wherein the second layer of electrically conductive lines comprises a second width, and wherein the first width and the second width are different; and

at least one electrical interconnect disposed over the chip arrangement substantially perpendicular to the first layer of electrically conductive lines and substantially parallel to a top side of the chip so as, the at least one electrical interconnect electrically connecting at least one electrically conductive line to at least one of the contact pads, wherein one or more portions of the at least one interconnect are exposed.

19. The embedded chip package of claim 18 ,

wherein the first layer and/or the second layer of electrically conductive lines is covered by electrically insulating material at least partially surrounding the electrically conductive lines.

20. The embedded chip package of claim 18 ,

wherein widths and pitches of the electrically conductive lines are dimensioned in such a way, that adjacent or neighboring electrically conductive lines cannot be shortened even at maximal allowed lateral offset of electrical interconnects.

21. An embedded chip package comprising:

a chip arrangement comprising a chip comprising a chip bottom side disposed directly over at least one solder structure and a chip top side comprising one or more contact pads;

a pre-formed through-encapsulant via arrangement comprising a first layer of through-encapsulant vias atop a substrate;

wherein the pre-formed through-encapsulant via arrangement is arranged perpendicularly next to a first side of the chip arrangement, wherein the pre-formed through-encapsulant via arrangement is vertically aligned to and facing a first side wall of the chip;

a second layer of electrically conductive lines at a second sidewall of the chip, wherein each conductive line of the first layer is separated from a neighboring electrically conductive line by a first pitch, wherein each conductive line of the second layer is separated from a neighboring electrically conductive line by a second pitch, and wherein the first pitch and the second pitch are different; and

at least one electrical interconnect disposed over the chip arrangement and on a top or bottom surface of the chip, the pre-formed through-encapsulant via arrangement and arranged substantially perpendicular to the through-encapsulant vias and parallel to the top surface of the chip so that the at least one electrical interconnect electrically connects with at least one through-encapsulant via to the chip, wherein one or more portions of the at least one interconnect are exposed.

22. The embedded chip package according to claim 21 ,

wherein the through-encapsulant via arrangement is adhered directly to a side of the chip arrangement.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 8, 2013
From: BEER, GOTTFRIED; HARTNER, WALTER
To: INFINEON TECHNOLOGIES AG
Reel/Frame 029582/0195 →
Priority Claims (1)
EP 12007249 · Oct 19, 2012 · regional
Continuity (1)
Related Publication 20140110858A1 · Apr 24, 2014