Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer features
A semiconductor device and method of forming the same are disclosed. The method includes receiving a substrate having an active fin, an oxide layer over the active fin, a dummy gate stack over the oxide layer, and a spacer feature over the oxide layer and on sidewalls of the dummy gate stack. The method further includes removing the dummy gate stack, resulting in a first trench; etching the oxide layer in the first trench, resulting in a cavity underneath the spacer feature; depositing a dielectric material in the first trench and in the cavity; and etching in the first trench so as to expose the active fin, leaving a first portion of the dielectric material in the cavity.
1. A method of forming a semiconductor device, comprising:
receiving a substrate having an active fin, an oxide layer over the active fin, a dummy gate stack over the oxide layer, and a spacer feature over the oxide layer and on sidewalls of the dummy gate stack;
removing the dummy gate stack, resulting in a first trench;
etching the oxide layer in the first trench, resulting in a cavity extending laterally underneath the spacer feature;
depositing a dielectric material in the first trench and in the cavity; and
etching in the first trench so as to expose the active fin, leaving a first portion of the dielectric material in the cavity.
2. The method of claim 1 , wherein the etching of the oxide layer exposes the active fin.
3. The method of claim 1 , wherein the etching of the oxide layer partially removes the oxide layer, leaving a portion of the oxide layer over the active fin in the first trench.
4. The method of claim 3 , wherein the etching in the first trench includes first and second etching processes, the first etching process is tuned to etch the dielectric material, and the second etching process is tuned to etch the portion of the oxide layer.
5. The method of claim 1 , wherein the depositing of the dielectric material uses one of: atomic layer deposition and chemical vapor deposition.
6. The method of claim 1 , wherein the dielectric material includes a silicon nitride.
7. The method of claim 6 , wherein the dielectric material includes one of: oxygen, carbon, hydrogen, and a combination thereof.
8. The method of claim 1 , wherein the dummy gate stack is formed over an isolation structure over the substrate, further comprising, before the forming of the gate stack:
etching the isolation structure in the first trench.
9. The method of claim 1 , further comprising:
forming a gate stack in the first trench, the gate stack engaging the active fin.
10. The method of claim 9 , wherein the gate stack includes a high-k dielectric layer and a work function metal layer.
11. A method of forming a semiconductor device, comprising:
receiving a substrate having an active fin projecting upwardly through an isolation structure over the substrate, an oxide layer over the active fin, a dummy gate stack over the isolation structure and the oxide layer, and a spacer feature over the isolation structure and the oxide layer and on sidewalls of the dummy gate stack;
removing the dummy gate stack thereby forming a first trench, wherein the first trench exposes the oxide layer;
partially removing the oxide layer in the first trench, resulting in a cavity under the spacer feature and a portion of the oxide layer over the active fin;
depositing a dielectric material in the first trench and in the cavity;
etching in the first trench so as to expose the active fin, leaving a first portion of the dielectric material under the spacer feature; and
forming a gate stack in the first trench, the gate stack engaging the active fin.
12. The method of claim 11 , wherein the etching in the first trench includes first and second etching processes, the first etching process removes the dielectric material in the first trench, the second etching process exposes the active fin in the first trench, and the first and second etching processes use different etching recipes.
13. The method of claim 11 , wherein a first portion of the oxide layer is under the dielectric material in the cavity and a second portion of the oxide layer is under the spacer feature and adjacent to the dielectric material.
14. The method of claim 11 , further comprising, before the forming of the gate stack:
etching the isolation structure in the first trench.
15. The method of claim 14 , wherein:
the spacer feature interposes the first trench and a first portion of the isolation structure; and
the isolation structure in the first trench is etched to have a top surface below another top surface of the first portion of the isolation structure.
16. The method of claim 11 , wherein the dielectric material includes a silicon nitride.
17. The method of claim 11 , wherein the dielectric material includes silicon, nitrogen, and one of: oxygen, carbon, hydrogen, and a combination thereof.
18. The method of claim 11 , wherein the first portion of the dielectric material interposes the spacer feature and the oxide layer.
19. The method of claim 11 , wherein the first portion of the dielectric material interposes the oxide layer and the gate stack.
20. The method of claim 11 , wherein the dielectric material and the oxide layer comprise different materials.