Sulfur doping method for graphene
View Patent ↗The invention provides a sulfur doping method for graphene, which comprises the steps of: 1) providing graphene and placing the grapheme in a chemical vapor deposition reaction chamber; 2) employing an inert gas to perform ventilation and exhaust treatment in the reaction chamber; 3) introducing a sulfur source gas to perform sulfur doping on the graphene at 500-1050° C.; and 4) cooling the reaction chamber in a hydrogen and inert gas atmosphere. The present invention can perform sulfur doping on the graphene simply and efficiently, the economic cost is low, and large-scale production can be realized. Large area sulfur doping on graphene can be realized, and doping of graphene on an insulating substrate or metal substrate can be carried out directly.
1. A sulfur doping method for graphene, which at least comprises the following steps of:
1) providing graphene and placing the grapheme in a chemical vapor deposition reaction chamber;
2) employing an inert gas to perform ventilation and exhaust treatment in the reaction chamber;
3) introducing a sulfur source gas to perform sulfur doping on the graphene at 500-1050° C., the sulfur source gas comprises one or two of hydrogen sulfide and carbonyl sulfide; and
4) cooling the reaction chamber in a hydrogen and inert gas atmosphere.
2. The sulfur doping method for graphene according to claim 1 , characterized in that: a metal substrate is taken as a carrier for the graphene to place in the reaction chamber, after step 2), it also comprises a step of a) introducing hydrogen to the reaction chamber at 200˜400° C., so as to perform reduction on oxide of surface of the metal substrate.
3. The sulfur doping method for graphene according to claim 2 , characterized in that: the hydrogen of step a) has an airflow range of 20˜100 sccm.
4. The sulfur doping method for graphene according to claim 1 , characterized in that: in step 2), ventilation and exhaust time of the inert gas is 10˜30 min, with an airflow range of 500˜5000 sccm.
5. The sulfur doping method for graphene according to claim 1 , characterized in that: the adopted gas for sulfur doping in step 3) comprises inert gas, hydrogen and hydrogen sulfide.
6. The sulfur doping method for graphene according to claim 5 , characterized in that: it is introduced with argon of 500˜1500 sccm, hydrogen of 20˜60 sccm, hydrogen sulfide of 1˜4 sccm at 400˜600° C., to perform doping on grephene for 10˜30 min.
7. The sulfur doping method for graphene according to claim 1 , characterized in that: the adopted gas for sulfur doping in step 3) comprises inert gas, hydrogen and carbonyl sulfide.
8. The sulfur doping method for graphene according to claim 7 , characterized in that: it is introduced with helium of 500˜1500 sccm, hydrogen of 20˜60 sccm, carbonyl sulfide of 0.5˜3 sccm at 700˜1050° C., to perform sulfur doping for 5˜20 min.
9. The sulfur doping method for graphene according to claim 1 , characterized in that: in step 4), the hydrogen has an airflow range of 10˜40 sccm, the inert gas has an airflow of 50˜200 sccm.