High-resolution in-line metrology for roll-to-roll processing operations
A substrate is tested with an interferometer in-line in a roll-to-roll processing operation to detect defects and exclude them from further processing. A tilt is introduced in the illumination path of the interferometer to allow detection of best fringes in a selected measurement field of view (FOV) that is smaller than the camera FOV in the direction transverse to the fringes. At each acquisition frame, the measurement FOV is shifted to track the best-fringe position within the camera field of view based on irradiance acquired at the previous step. As a result, the system is able to accommodate substrate flutter and roller runout and maintain focus on the substrate that allows precise identification of defects and their isolation for subsequent processing.
1. A method of testing a substrate for defects in-line while traveling on a roller in a roll-to-roll processing operation, the method comprising the following steps:
providing an interferometer including a reference surface and a camera, said interferometer having an illumination path directed to said substrate;
selecting a portion of a field of view of said camera to define a size of a measurement field of view (FOV) in a longitudinal direction of the camera FOV;
tilting the interferometer along a direction of substrate travel so as to enable detection of best-fringe signals within said measurement FOV;
selecting an initial longitudinal position of the measurement FOV within the camera FOV based on an expected location of an initial interferometric best-fringe signal;
beginning acquisition of fringe data detected by the camera during successive data acquisition steps;
at selected acquisition steps following an initial acquisition step, updating a longitudinal position of the measurement FOV within the camera FOV based on a best-fringe-signal location within the camera FOV acquired during a previous step;
profiling the substrate using data acquired from a current measurement FOV;
analyzing profiles so generated to identify locations of defects in the substrate; and
stopping further processing of the substrate at said locations of defects in the substrate.
2. The method of claim 1 , wherein said updating step is carried out at each acquisition step.
3. The method of claim 2 , wherein said reference surface conforms substantially to a curvature of said a roller in the roll-to-roll processing operation.
4. The method of claim 2 , wherein said step of selecting an initial longitudinal position of the measurement FOV within the camera FOV is carried out by adjusting the interferometer so as to focus on a center of the camera FOV.
5. The method of claim 2 , wherein said step of updating the longitudinal position of the measurement FOV within the camera FOV is carried out based on irradiance signals acquired from a plurality of longitudinal pixel rows of the camera FOV during the previous step.
6. The method of claim 2 , wherein said updating step is carried out at each acquisition step; said reference surface conforms substantially to a curvature of said a roller in the roll-to-roll processing operation; said step of selecting an initial longitudinal position of the measurement FOV within the camera FOV is carried out by adjusting the objective so as to focus on a center of the camera FOV; and said step of updating the longitudinal position of the measurement FOV within the camera FOV is carried out based on irradiance signals acquired from a plurality of longitudinal pixel rows of the camera FOV during the previous step.
7. The method of claim 1 , wherein said interferometer is a spatial-carrier interferometer.
8. The method of claim 1 , wherein said interferometer is a polarization interferometer.
9. A method of testing a substrate for defects in-line while traveling on a roller in a roll-to-roll processing operation, the method comprising the following steps:
providing an interferometer including a reference surface and a camera, said interferometer having an illumination path directed to said substrate, and said reference surface conforming substantially to a curvature of said a roller in the roll-to-roll processing operation;
selecting a portion of a field of view of said camera to define a size of a measurement field of view (FOV) in a longitudinal direction of the camera FOV;
tilting the interferometer along a direction of substrate travel so as to enable detection of best-fringe signals within said measurement FOV;
selecting an initial longitudinal position of the measurement FOV within the camera FOV by adjusting the interferometer so as to focus on a center of the camera FOV;
beginning acquisition of fringe data detected by the camera during successive data acquisition steps;
at each acquisition step following an initial acquisition step, updating a longitudinal position of the measurement FOV within the camera FOV based on irradiance signals acquired from a plurality of longitudinal pixel rows of the camera FOV during a previous step;
at each data acquisition step, profiling the substrate using data acquired from a current measurement FOV;
analyzing profiles so generated to identify locations of defects in the substrate; and
stopping further processing of the substrate at said locations of defects in the substrate.
10. The method of claim 9 , wherein said interferometer is a spatial-carrier interferometer.
11. The method of claim 9 , wherein said interferometer is a polarization interferometer.