IP Library Granted Patent US 9,754,680
Granted Patent B2
US 9,754,680 · App. 15/336,365 · Granted Sep 5, 2017

Method and device for compact eFuse array

Inventor: Chia Chi Yang (Shanghai, CN)
Assignees: Semiconductor Manufacturing International (Beijing) Corporation; Semiconductor Manufacturing International (Shanghai) Corporation
G11C17/18G11C17/16
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Quick Facts
Patent No.
US 9,754,680
App. No.
15/336,365
Granted
Sep 5, 2017
Kind
B2
Abstract

An electrical fuse (eFuse) array includes eFuse cells arranged in multiple rows and columns. Each eFuse cell has an eFuse, a first diode, and a second diode coupled to an internal node, each eFuse cell further having first, second, and third terminals coupled, respectively, to the first diode, the second diode, and the eFuse. The eFuse array further includes a shared NMOSFET for each of the multiple rows, with a drain coupled to the third terminal of each of the plurality of eFuse cells in that row and a gate coupled to a word line. Each column includes a write bit line coupled to the second terminal of each of the eFuse cells in that column, and a read bit line coupled to the first terminal of the eFuse cell.

Claims (49)

1. An electrical fuse (eFuse) memory device, comprising:

an eFuse array having a plurality of electrical fuse (eFuse) cells arranged in multiple rows and columns, each eFuse cell having an eFuse, a first diode, and a second diode coupled to an internal node, each eFuse cell further having first, second, and third terminals, wherein:

the first diode is coupled between the first terminal and the internal node;

the second diode is coupled between the second terminal and the internal node; and

the eFuse is coupled between the third terminal and the internal node;

a shared NMOSFET for each of the multiple rows, with a drain coupled to the third terminal of each of the plurality of eFuse cells in that row, a source coupled to a ground terminal, and a gate coupled to a word line;

a write bit line for each column, the write bit line coupled to the second terminal of each of the eFuse cells in that column; and

a read bit line for each column, the read bit line coupled to the first terminal of the eFuse cell.

2. The memory device of claim 1 , wherein each eFuse cell comprises a PNP bipolar transistor, wherein the first diode is formed by a first PN junction of the bipolar transistor, the second diode is formed by a second PN junction of the bipolar transistor, and the internal node is a base of the bipolar transistor.

3. The memory device of claim 1 , wherein an anode of the first diode is coupled to the first terminal, and a cathode of the first diode is coupled to the internal node.

4. The memory device of claim 1 , wherein an anode of the second diode is coupled to the second terminal, and a cathode of the second is coupled to the internal node.

5. The memory device of claim 1 , wherein the plurality of electrical fuse (eFuse) cells comprises n by m eFuse cells arranged in an n by m matrix with n rows and m columns, n and m being integers;

the memory device further comprises n shared NMOSFETs and m write bit lines;

in the ith row, “i” being an integer, the ith shared NMOSFET is coupled to each of the eFuse cells in the ith row;

in the jth column, “j” being an integer, the jth write bit line is coupled to the second diode in each of the eFuse cells in the jth column.

6. The memory device of claim 1 , wherein each eFuse cell further comprises a read operation MOSFET coupled between the first diode and the read bit line, a gate terminal of the read operation MOSFET being coupled to a read control line.

7. The memory device of claim 6 , wherein the read operation MOSFET is an NMOSFET with a source coupled to the anode of the first diode and a drain coupled to the read bit line.

8. The memory device of claim 6 , wherein the read operation MOSFET is a PMOSFET with a drain coupled to the anode of the first diode and a source coupled to the read bit line.

9. The memory device of claim 6 , further comprising a word line decoder and write operation decoder, and a read unit.

10. The memory device of claim 9 , further comprising a bit line PMOSFET for each of the m columns.

11. The memory device of claim 9 , wherein each eFuse cell is coupled to a read bit line.

12. The memory device of claim 1 , wherein each eFuse cell comprises a conductive material which is configured to transition from a low resistive state to a high resistive state when a programming current is applied.

13. An electrical fuse (eFuse) cell, comprising:

first, second, and third terminals;

an eFuse; and

a PNP bipolar transistor having a first P-type region, an N-type base region, and a second P-type region;

wherein:

the first terminal is coupled to the first P-type region and configured for coupling to a read bit line;

the second terminal is coupled to the second P-type region and configured for coupling to a write bit line; and

the eFuse is coupled between the third terminal and the N-type base region of the bipolar transistor, the third terminal being configured for coupling to a shared NMOSFET, and the shared NMOSFET being configured for coupling to the third terminals of all eFuse cells in a row of an array.

14. The eFuse cell of claim 13 , wherein the eFuse comprises a conductive material which is configured to transition from a low resistive state to a high resistive state when a programming current is applied.

15. An electrically programmable fuse (eFuse) cell, comprising:

first, second, and third terminals;

an eFuse;

a first diode; and

a second diode;

wherein:

the eFuse, the first diode, and the second diode are coupled to an internal node,

the first diode is coupled between the first terminal and the internal node;

the second diode is coupled between the second terminal and the internal node;

the eFuse is coupled between the third terminal and the internal node;

the first terminal is configured for coupling to a read bit line;

the second terminal is configured for coupling to a write bit line; and

the third terminal is configured for coupling to a shared NMOSFET, the shared NMOSFET configured for coupling to the third terminals of all eFuse cells in a row of an array.

16. The eFuse cell of claim 15 , wherein each eFuse cell comprises a PNP bipolar transistor, wherein the first diode is formed by a first PN junction of the bipolar transistor, the second diode is formed by a second PN junction of the bipolar transistor, and the internal node is a base of the bipolar transistor.

17. The eFuse cell of claim 15 , wherein the eFuse comprises a conductive material which is configured to transition from a low resistive state to a high resistive state when a programming current is applied.

18. The eFuse cell of claim 17 , wherein the eFuse comprises a polysilicon material with an overlying silicide layer.

19. The eFuse cell of claim 13 , wherein the first P-type region is an anode and the N-type base region is a cathode of a first diode; and the second P-type region is an anode and the N-type base region is a cathode of a second diode.

20. The eFuse cell of claim 13 , wherein the shared NMOSFET has a drain coupled to the eFuse, a gate coupled to a word line, and a source coupled to a ground terminal.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 27, 2016
From: YANG, CHIA CHI
To: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION; SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
Reel/Frame 040155/0151 →
Priority Claims (1)
CN 2015 1 0731242 · Nov 2, 2015 · national
Continuity (1)
Related Publication 20170125120A1 · May 4, 2017