IP Library Granted Patent US 9,761,538
Granted Patent B1
US 9,761,538 · App. 15/068,752 · Granted Sep 12, 2017

Method for making a shielded integrated circuit (IC) package with an electrically conductive polymer layer

Inventors: Rennier Rodriguez (Bulacan, PH); Frederick Arellano (Pulo Cabuyao Laguna, PH); Aiza Marie Agudon (Calamba, PH)
Assignee: STMICROELECTRONICS, INC.
H01L23/552H01L21/4814H01L21/561H01L21/78H01L23/29H01L23/3135
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Quick Facts
Patent No.
US 9,761,538
App. No.
15/068,752
Granted
Sep 12, 2017
Kind
B1
Abstract

A method for making shielded integrated circuit (IC) packages includes providing spaced apart IC dies carried by a substrate and covered by a common encapsulating material, and cutting through the common encapsulating material between adjacent IC dies to define spaced apart IC packages carried by the substrate. An electrically conductive layer is positioned over the spaced apart IC packages and fills spaces between adjacent IC packages. The method further includes cutting through the electrically conductive layer between adjacent IC packages and through the substrate to form the shielded IC packages.

Claims (56)

1. A method for making a plurality of shielded integrated circuit (IC) packages comprising:

providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material;

cutting through the common encapsulating material between adjacent IC dies to define a plurality of spaced apart IC packages carried by the substrate;

positioning an electrically conductive layer over the plurality of spaced apart IC packages and completely filling spaces between adjacent IC packages, wherein the completely filling the spaces between the adjacent IC packages is performed by a deposition process without filling the spaces followed by a drive-in process; and

cutting through the electrically conductive layer between adjacent IC packages and through the substrate to form the plurality of shielded IC packages.

2. The method according to claim 1 , wherein positioning the electrically conductive layer comprises:

positioning an electrically conductive polymer layer over the plurality of spaced apart IC packages and over the spaces between adjacent IC packages, with the electrically conductive polymer layer being a solid material carried by a film;

applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the plurality of spaced apart IC packages and filling the spaces between adjacent IC packages; and

cooling the electrically conductive polymer layer from the soft material back to the solid material providing the electrically conductive layer.

3. The method according to claim 2 , further comprising separating the film from the electrically conductive layer.

4. The method according to claim 1 , wherein the substrate is exposed after cutting the encapsulating material between adjacent IC dies.

5. The method according to claim 1 , wherein the electrically conductive layer is on an upper surface and sidewalls of each IC package.

6. The method according to claim 2 , wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.

7. The method according to claim 6 , wherein the non-conductive polymer is thermosetting.

8. The method according to claim 2 , wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C.

9. The method according to claim 2 , wherein the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.

10. The method according to claim 1 , wherein a thickness of the electrically conductive layer is within a range of 5-15 microns.

11. The method according to claim 1 , wherein the substrate is exposed after cutting the encapsulating material between adjacent IC dies, and wherein the electrically conductive layer is on an upper surface and sidewalls of each IC package.

12. A method for making a plurality of shielded integrated circuit (IC) packages comprising:

providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material;

forming openings in the common encapsulating material between adjacent IC dies;

forming an electrically conductive layer over the common encapsulating material and the openings;

after forming the electrically conductive layer, transporting material from the electrically conductive layer to fill the opening; and

cutting through the electrically conductive layer between adjacent ones of the plurality of spaced apart IC dies and through the substrate to form the plurality of shielded IC packages.

13. The method according to claim 11 , wherein positioning the electrically conductive layer comprises:

positioning an electrically conductive polymer layer over the plurality of spaced apart IC packages and over the spaces between adjacent IC packages, with the electrically conductive polymer layer being a solid material carried by a film;

applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the plurality of spaced apart IC packages and filling the spaces between adjacent IC packages; and

cooling the electrically conductive polymer layer from the soft material back to the solid material providing the electrically conductive layer.

14. The method according to claim 13 , further comprising separating the film from the electrically conductive layer.

15. The method according to claim 13 , wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.

16. The method according to claim 15 , wherein the non-conductive polymer is thermosetting.

17. The method according to claim 13 , wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C.; and the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.

18. The method according to claim 11 , wherein a thickness of the electrically conductive layer is within a range of 5-15 microns.

19. A method for making a plurality of shielded integrated circuit (IC) packages comprising:

providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material;

cutting through the common encapsulating material between adjacent IC dies to define a plurality of spaced apart IC packages carried by the substrate;

positioning an electrically conductive polymer layer over the plurality of spaced apart IC packages and over the spaces between adjacent IC packages, with the electrically conductive polymer layer being a solid material carried by a film;

applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the plurality of spaced apart IC packages and filling the spaces between adjacent IC packages;

cooling the electrically conductive polymer layer from the soft material back to the solid material providing an electrically conductive layer; and

cutting through the electrically conductive layer between adjacent IC packages and through the substrate to form the plurality of shielded IC packages.

20. The method according to claim 19 , further comprising separating the film from the electrically conductive layer.

21. The method according to claim 19 , wherein the substrate is exposed after cutting the encapsulating material between adjacent IC dies.

22. The method according to claim 19 , wherein the electrically conductive layer is on an upper surface and sidewalls of each IC package.

23. The method according to claim 19 , wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.

24. The method according to claim 23 , wherein the non-conductive polymer is thermosetting.

25. The method according to claim 19 , wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C., and the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.

26. A method for making a plurality of shielded integrated circuit (IC) packages comprising:

providing a plurality of spaced apart IC dies carried by a substrate and covered by a common encapsulating material;

positioning an electrically conductive polymer layer over the common encapsulating material, with the electrically conductive polymer layer being a solid material carried by a film;

applying pressure and heat to the electrically conductive polymer layer so that the solid material transforms to a soft material so as to flow over the common encapsulating material;

cooling the electrically conductive polymer layer from the soft material back to the solid material providing; and

cutting through the electrically conductive layer between adjacent IC dies, through the common encapsulating material and through the substrate to form the plurality of shielded IC packages.

27. The method according to claim 26 , further comprising separating the film from the electrically conductive layer.

28. The method according to claim 26 , wherein the electrically conductive polymer layer comprises a non-conductive polymer with conductive fillers mixed therein.

29. The method according to claim 28 , wherein the non-conductive polymer is thermosetting.

30. The method according to claim 26 , wherein the heat applied to the electrically conductive polymer layer is within a range of 100-150° C., and wherein the pressure applied to the electrically conductive polymer layer is within a range of 200-400 kPa.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 1, 2022
From: STMICROELECTRONICS, INC.
To: STMICROELECTRONICS INTERNATIONAL N.V.
Reel/Frame 061608/0550 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2016
From: RODRIGUEZ, RENNIER; ARELLANO, FREDERICK; AGUDON, AIZA MARIE
To: STMICROELECTRONICS, INC.
Reel/Frame 037988/0613 →