Compensation and calibration of multiple mass MEMS sensor
View Patent ↗A system includes a MEMS sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense contacts. The switch system is configured to enable a sense mode and various test modes for the MEMS sensor. When the switch system enables a sense mode, output signals from the sense contacts can be combined to produce sense signals. When the switch system enables a test mode, the second contacts are electrically decoupled from one another to disassociate the output signals from one another. The independent sense contacts and switch system enable the concurrent compensation and calibration of the proof masses along two different sense axes.
1. A system comprising:
a microelectromechanical systems (MEMS) sensor having a first movable element and a second movable element suspended from a substrate;
a first sense contact configured to provide a first output signal corresponding to physical displacement of said first movable element;
a second sense contact configured to provide a second output signal corresponding to said physical displacement of said second movable element;
a switch system in communication with said first and second sense contacts, said switch system being configured to enable a sense mode and a test mode of said MEMS sensor, wherein said first and second sense contacts are electrically coupled with one another to produce a sense signal as a combination of said first and second output signals when said switch system enables said sense mode, and said first and second sense contacts are electrically decoupled from one another to disassociate said first output signal from said second output signal when said switch system enables said test mode; and
a control circuit configured to determine at first trim value associated with said first movable element in response to said first output signal and a second trim value associated with said second movable element in response to said second output signal.
2. The system of claim 1 wherein said first and second movable elements are configured to move independent from one another in response to force imposed upon said first and second movable elements.
3. The system of claim 1 wherein: said first and second movable elements are configured to move independent from one another in at least two orthogonal directions;
said first and second output signals correspond to said physical displacement of said first and second movable elements resulting from force imposed on said first and second movable elements in a first direction;
said sensor system further comprises: a third sense contact configured to provide a third output signal corresponding to said physical displacement of said first movable element resulting from a force imposed on said first movable element in a second direction, said second direction being orthogonal to said first direction; and
a fourth sense contact configured to provide a fourth output signal corresponding to said physical displacement of said second movable element resulting from force imposed on said second movable element in said second direction; and
said switch system is in communication with said third and fourth sense contacts, wherein said third and fourth sense contacts are electrically coupled with one another to produce a second sense signal as a combination of said third and fourth output signals when said switch system enables said sense mode, and said third and fourth sense contacts are electrically decoupled from one another to disassociate said third output signal from said fourth output signal when said switch system enables said test mode.
4. A system comprising:
a microelectromechanical systems (MEMS) sensor having a first movable element and a second movable element suspended from a substrate;
a first sense contact configured to provide a first output signal corresponding to physical displacement of said first movable element;
a second sense contact configured to provide a second output signal corresponding to said physical displacement of said second movable element;
a switch system in communication with said first and second sense contacts, said switch system being configured to enable a sense mode and a test mode of said MEMS sensor, wherein said first and second sense contacts are electrically coupled with one another to produce a sense signal as a combination of said first and second output signals when said switch system enables said sense mode, and said first and second sense contacts are electrically decoupled from one another to disassociate said first output signal from said second output signal when said switch system enables said test mode; and
a control circuit electrically coupled to said MEMS sensor, wherein:
when said switch system enables said test mode, said control circuit is configured to provide a first stimulus signal to said first sense contact, said first stimulus signal being configured to cause said physical displacement of said first movable element; and
when said switch system enables said test mode, said control circuit is further configured to provide a second stimulus signal to said second sense contact, said second stimulus signal being configured to cause said physical displacement of said second movable element.
5. The system of claim 4 wherein:
said first stimulus signal is provided to said first movable element during a first interval;
said first output signal responsive to said physical displacement of said first movable element is detected during a second interval;
said second stimulus signal is provided to said second movable element during a third interval; and
said second output signal responsive to said physical displacement of said second movable element is detected during a fourth interval.
6. The system of claim 5 wherein said first and third intervals occur concurrently and said second and fourth intervals occur concurrently.
7. A system comprising:
a microelectromechanical systems (MEMS) sensor having a first movable element and a second movable element suspended from a substrate;
a first sense contact configured to provide a first output signal corresponding to physical displacement of said first movable element;
a second sense contact configured to provide a second output signal corresponding to said physical displacement of said second movable element;
a switch system in communication with said first and second sense contacts, said switch system being configured to enable a sense mode and a test mode of said MEMS sensor, wherein said first and second sense contacts are electrically coupled with one another to produce a sense signal as a combination of said first and second output signals when said switch system enables said sense mode, and said first and second sense contacts are electrically decoupled from one another to disassociate said first output signal from said second output signal when said switch system enables said test mode;
wherein:
said first and second movable elements are configured to move independent from one another in at least two orthogonal directions;
said first and second output signals correspond to said physical displacement of said first and second movable elements resulting from force imposed on said first and second movable elements in a first direction;
said sensor system further comprises:
a third sense contact configured to provide a third output signal corresponding to said physical displacement of said first movable element resulting from a force imposed on said first movable element in a second direction, said second direction being orthogonal to said first direction; and
a fourth sense contact configured to provide a fourth output signal corresponding to said physical displacement of said second movable element resulting from force imposed on said second movable element in said second direction;
said switch system is in communication with said third and fourth sense contacts, wherein said third and fourth sense contacts are electrically coupled with one another to produce a second sense signal as a combination of said third and fourth output signals when said switch system enables said sense mode, and said third and fourth sense contacts are electrically decoupled from one another to disassociate said third output signal from said fourth output signal when said switch system enables said test mode; and
a control circuit electrically coupled to said MEMS sensor, wherein:
when said switch system enables said test mode, said control circuit is configured to provide a first stimulus signal to said first sense contact, said first stimulus signal being configured to cause said physical displacement of said first movable element, said first stimulus signal simulating a first force imposed on said first movable element in said first direction; and
when said switch system enables said test mode, said control circuit is further configured to provide a second stimulus signal to said third sense contact, said second stimulus signal being configured to cause said physical displacement of said second movable element, said second stimulus signal simulating a second force imposed on said second movable element in said second direction.
8. The MEMS system of claim 7 wherein said physical displacement of said first movable element differs from said physical displacement of said second movable element.
9. The MEMS system of claim 7 wherein:
said first stimulus signal is provided to said first sense contact and said second stimulus signal is provided to said third contact during a first interval; and
said first output signal responsive to said physical displacement of said first movable element is provided at said first sense contact and a third output signal responsive to said physical displacement of said second movable element is provided at said third sense contact during a second interval, said second interval following said first interval.