IP Library Granted Patent US 9,810,713
Granted Patent B2
US 9,810,713 · App. 15/057,963 · Granted Nov 7, 2017

Method and apparatus of operating a scanning probe microscope

Inventors: Jian Shi (Ventura, CA); Yan Hu (Ventura, CA); Shuiqing Hu (Santa Barbara, CA); Ji Ma (Thousand Oaks, CA); Chanmin Su (Ventura, CA)
Assignee: Bruker Nano, Inc.
G01Q20/00B82Y35/00G01Q10/065G01Q20/02G01Q60/30G01Q60/32G01Q60/34
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Quick Facts
Patent No.
US 9,810,713
App. No.
15/057,963
Granted
Nov 7, 2017
Kind
B2
Abstract

Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

Claims (24)

1. A method for monitoring effectiveness of a scanning probe microscope (SPM), the method comprising:

providing relative motion between a probe and a sample and controlling that motion using a feedback loop in peak force tapping (PFT) mode;

detecting an attractive force between the probe and the sample; and

comparing the attractive force to a predetermined threshold in real time with operation of the controlling step.

2. The method of claim 1 , wherein the attractive force substantially results from an adhesion force between the probe and the sample.

3. The method of claim 2 , wherein the adhesion force is determined according to a maximum adhesion force.

4. The method of claim 2 , wherein the adhesion force is determined according to an integration of a work of adhesion with respect to a departure point from and a return point to a non-interacting zero force baseline.

5. The method of claim 1 , wherein the attractive force substantially results from van der Waals forces.

6. The method of claim 5 , wherein the van der Waals forces are determined according to a slope with respect to a non-interacting zero force baseline.

7. A method for monitoring tip health of a probe of a scanning probe microscope (SPM) during SPM operation, the method comprising:

providing relative motion between a probe and a sample and controlling the motion using peak force tapping (PFT) mode;

providing relative scanning motion between the probe and the sample so the controlling step is performed at multiple pixels along a scan line;

generating a force curve at each pixel; and

automatically determining tip health at each pixel in real time with the controlling step.

8. The method of claim 7 , further comprising detecting an attractive force between the probe and the sample; and

comparing the attractive force to a predetermined threshold.

9. The method of claim 8 , wherein the attractive force substantially results from an adhesion force between the probe and the sample.

10. The method of claim 9 , wherein the adhesion force is determined according to a maximum adhesion force.

11. The method of claim 9 , wherein the adhesion force is determined according to an integration of a work of adhesion with respect to a departure point from and a return point to a non-interacting zero force baseline.

12. The method of claim 8 , wherein the attractive force substantially results from van der Waals forces.

13. The method of claim 12 , wherein the van der Waals forces are determined according to a slope with respect to a non-interacting zero force baseline.

14. The method of claim 13 , wherein the determining step is performed at least every 300 microseconds.

15. The method of claim 7 , further comprising determining a slope of a portion of the force curve corresponding to an attractive force, wherein the slope is indicative of tip health.

16. The method of claim 15 , wherein the attractive force is caused by van der Waals force.

Assignments (3)
CHANGE OF NAME Recorded Nov 8, 2017
From: VEECO METROLOGY INC.
To: BRUKER NANO, INC.
Reel/Frame 044710/0947 →
CHANGE OF NAME Recorded Oct 5, 2017
From: VEECO METROLOGY INC.
To: BRUKER NANO, INC.
Reel/Frame 044208/0871 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2017
From: SHI, JIAN; HU, YAN; HU, SHUIQING; MA, JI; SU, CHANMIN
To: VEECO METROLOGY INC.
Reel/Frame 043797/0445 →
Continuity (6)
Division 14172710 · Feb 4, 2014
Division 12958323 · Dec 1, 2010
Continuation In Part 12618641 · Nov 13, 2009
Provisional Application 61265655 · Dec 1, 2009
Provisional Application 61114399 · Nov 13, 2008
Related Publication 20160258979A1 · Sep 8, 2016