Semiconductor device and method of manufacturing the same
A semiconductor device is provided. The semiconductor device may include stacks including conductive layers and insulating layers. The conductive layers and insulating layers may be alternately stacked. The semiconductor device may include semiconductor patterns passing through the stacks. The semiconductor device may include plug patterns located on the semiconductor patterns and protruding compared to the stacks. The semiconductor device may include insulating patterns located on the stacks and the plug patterns and each including an edge area having a height at a level lower than a central area. The semiconductor device may include slit insulating layers located between the stacks and between the insulating patterns.
1. A semiconductor device comprising:
stacks including conductive layers and insulating layers, the conductive layers and insulating layers alternately stacked;
semiconductor patterns configured to pass through the stacks;
plug patterns located on the semiconductor patterns and configured to protrude compared to the stacks;
insulating patterns located on the stacks and the plug patterns, and each insulating pattern including an edge area having a height at a level lower than a central area; and
slit insulating layers located between the stacks and between the insulating patterns,
wherein each of the insulating patterns is formed to surround side walls and upper portions of two or more plug patterns among the plug patterns, a lower side wall of each of the insulating patterns protrudes in a side direction more than an upper side wall, and the insulating patterns are formed in a single-layer structure.
2. The semiconductor device of claim 1 , wherein sidewalls of insulating patterns have a step-shape.
3. The semiconductor device of claim 1 , wherein at least one of the slit insulating layers has an upper part wider than a lower part.
4. The semiconductor device of claim 1 , wherein at least one of the slit insulating layers includes an air gap.
5. The semiconductor device of claim 1 , wherein at least one of the slit insulating layers includes a metal residue.
6. The semiconductor device of claim 5 , wherein the metal residue is located at a level lower than upper surfaces of the insulating patterns.
7. The semiconductor device of claim 5 , wherein the metal residue is located at a level lower than upper surfaces of the plug patterns.
8. The semiconductor device of claim 5 , wherein the metal residue includes substantially the same material as the conductive layers.
9. The semiconductor device of claim 8 ,
wherein the conductive layers include titanium (Ti), tantalum (Ta), titanium nitride (TiN), tantalum nitride (TaN), tungsten (W), or tungsten nitride (WNx), and
wherein the insulating layers include either an oxide or a nitride.
10. The semiconductor device of claim 1 , further comprising:
a metal residue located inside at least one of the slit insulating layers.
11. The semiconductor device of claim 1 , further comprising:
at least one other slit insulating layer located between the stacks and including an upper surface connected to the insulating pattern.
12. The semiconductor device of claim 11 , wherein the upper surface of the at least one other slit insulating layer is substantially in-line with the central area of an insulating pattern.
13. The semiconductor device of claim 11 , wherein the semiconductor patterns are substantially U-shaped.