Display device and method for manufacturing display device
View Patent ↗A highly flexible display device and a method for manufacturing the display device are provided. A transistor including a light-transmitting semiconductor film, a capacitor including a first electrode, a second electrode, and a dielectric film between the first electrode and the second electrode, and a first insulating film covering the semiconductor film are formed over a flexible substrate. The capacitor includes a region where the first electrode and the dielectric film are in contact with each other, and the first insulating film does not cover the region.
1. A display device comprising:
a bonding layer over a flexible substrate;
an oxide semiconductor film having a light-transmitting property over the flexible substrate; a source electrode and a drain electrode in direct contact with the oxide semiconductor film;
an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode; and
a capacitor over the flexible substrate, the capacitor comprising a first electrode on a same surface as the oxide semiconductor film, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film,
wherein the first electrode is electrically connected to one of the source electrode and the drain electrode,
wherein a portion of the dielectric film is over the insulating film, and
wherein a portion of the second electrode is over the insulating film.
2. The display device according to claim 1 , wherein the oxide semiconductor film comprises indium, gallium, and zinc.
3. The display device according to claim 1 , wherein the first electrode comprises indium, gallium, zinc, and hydrogen.
4. The display device according to claim 1 , further comprising a first gate electrode under the oxide semiconductor film and a second gate electrode over the oxide semiconductor film, each of the first gate electrode and the second gate electrode overlapping with the oxide semiconductor film, and the second gate electrode comprising a same element as the second electrode.
5. The display device according to claim 1 , wherein the source electrode or the drain electrode covers an end portion of the first electrode.
6. A display device comprising:
a bonding layer over a flexible substrate;
an oxide semiconductor film having a light-transmitting property over the flexible substrate; a source electrode and a drain electrode in direct contact with the oxide semiconductor film;
an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode;
a capacitor over the flexible substrate, the capacitor comprising a first electrode being electrically connected to one of the source electrode and the drain electrode, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film; and
a light-emitting element over the flexible substrate,
wherein a portion of the dielectric film is over the insulating film,
wherein a portion of the second electrode is over the insulating film, and
wherein the first electrode is on a same surface as the oxide semiconductor film.
7. The display device according to claim 6 , wherein the oxide semiconductor film comprises indium, gallium, and zinc.
8. The display device according to claim 6 , wherein the first electrode comprises indium, gallium, zinc, and hydrogen.
9. The display device according to claim 6 , further comprising a first gate electrode under the oxide semiconductor film and a second gate electrode over the oxide semiconductor film, each of the first gate electrode and the second gate electrode overlapping with the oxide semiconductor film, and the second gate electrode comprising a same element as the second electrode.
10. The display device according to claim 6 , wherein the light-emitting element is configured to emit white light.
11. The display device according to claim 6 , further comprising a coloring layer overlapping with the light-emitting element.
12. The display device according to claim 6 , wherein the display device has a top-emission structure.
13. The display device according to claim 6 , wherein the display device has a bottom-emission structure.
14. The display device according to claim 6 , wherein the source electrode or the drain electrode covers an end portion of the first electrode.
15. A display device comprising: a bonding layer over a flexible substrate;
a transistor comprising:
a first gate electrode over the flexible substrate;
a gate insulating film over the first gate electrode;
an oxide semiconductor film over the first gate electrode with the gate insulating film interposed therebetween;
a source electrode and a drain electrode in direct contact with the oxide semiconductor film; and
an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode;
a capacitor comprising:
a first electrode over the flexible substrate, the first electrode having a light-transmitting property and being electrically connected to one of the source electrode and the drain electrode of the transistor;
a dielectric film in direct contact with the first electrode, the dielectric film over the insulating film and comprising silicon, nitride, and hydrogen; and
a second electrode over the insulating film and the dielectric film; a planarization film over the insulating film and the second electrode, the planarization film having a contact hole; and
a third electrode over the planarization film and in the contact hole,
wherein the first electrode is on a same surface as the oxide semiconductor film.
16. The display device according to claim 15 , wherein the oxide semiconductor film comprises indium, gallium, and zinc.
17. The display device according to claim 15 , wherein the first electrode comprises indium, gallium, zinc, and hydrogen.
18. The display device according to claim 15 , further comprising a second gate electrode over and overlapping with the oxide semiconductor film, the second gate electrode comprising a same element as the second electrode.
19. The display device according to claim 15 , wherein the transistor is a channel-etched transistor.
20. The display device according to claim 15 , further comprising a light-emitting element,
wherein the light-emitting element is configured to emit white light.
21. The display device according to claim 20 , further comprising a coloring layer overlapping with the light-emitting element.
22. The display device according to claim 15 , wherein the display device has a top-emission structure.
23. The display device according to claim 15 , wherein the display device has a bottom-emission structure.
24. The display device according to claim 15 , wherein the source electrode or the drain electrode covers an end portion of the first electrode.
25. The display device according to claim 15 , wherein the third electrode is electrically connected to the transistor.
26. A display device comprising:
a transistor over a flexible substrate, the transistor comprising an oxide semiconductor film having a light-transmitting property, a source electrode, and a drain electrode;
a capacitor over the flexible substrate, the capacitor comprising a first electrode on a same surface as the oxide semiconductor film, a dielectric film in direct contact with the first electrode, and a second electrode over the dielectric film; and
an insulating film covering the oxide semiconductor film, the source electrode, and the drain electrode,
wherein the flexible substrate includes a polyimide resin,
wherein the first electrode is electrically connected to one of the source electrode and the drain electrode of the transistor,
wherein a portion of the dielectric film is over the insulating film, and
wherein a portion of the second electrode is over the insulating film.
27. The display device according to claim 26 , wherein the oxide semiconductor film comprises indium, gallium, and zinc.
28. The display device according to claim 26 , wherein the first electrode comprises indium, gallium, zinc, and hydrogen.
29. The display device according to claim 26 , further comprising a first gate electrode under the oxide semiconductor film and a second gate electrode over the oxide semiconductor film, each of the first gate electrode and the second gate electrode overlapping with the oxide semiconductor film, and the second gate electrode comprising a same element as the second electrode.
30. The display device according to claim 26 , wherein the source electrode or the drain electrode covers an end portion of the first electrode.