Methods and systems for fabricating high quality superconducting tapes
View Patent ↗An MOCVD system fabricates high quality superconductor tapes with variable thicknesses. The MOCVD system can include a gas flow chamber between two parallel channels in a housing. A substrate tape is heated and then passed through the MOCVD housing such that the gas flow is perpendicular to the tape's surface. Precursors are injected into the gas flow for deposition on the substrate tape. In this way, superconductor tapes can be fabricated with variable thicknesses, uniform precursor deposition, and high critical current densities.
1. A metal organic chemical vapor deposition system, comprising:
a housing comprising:
a chamber for flowing at least one superconductor precursor in a gas phase, the chamber positioned between two parallel channels, and
a groove in fluid communication with the chamber, wherein the groove traverses the housing and is accessible at a first end and second end of the housing;
a first roller positioned exterior to the housing and configured to heat a superconductor substrate tape and guide the heated superconductor substrate tape to the groove at the first end of the housing; and
a second roller positioned exterior to the housing and configured to heat the superconductor substrate tape and guide the heated superconductor substrate tape out of the second end of the housing via the groove;
wherein the first roller and the second roller are configured to heat the superconductor substrate tape through ohmic heating.
2. The metal organic chemical vapor deposition system of claim 1 , further comprising one or more temperature monitoring devices in fluid communication with the tape in the groove.
3. The metal organic chemical vapor deposition system of claim 2 , wherein the one or more temperature monitoring devices comprise at least one optical crystal probe.
4. The metal organic chemical vapor deposition system of claim 2 , wherein the one or more temperature monitoring devices send temperature readings to the first roller and the second roller in a closed loop to maintain the superconductor substrate tape at a constant temperature.
5. The metal organic chemical vapor deposition system of claim 1 , wherein the first roller and the second roller are configured to heat the superconductor substrate tape to between approximately 700° C. and approximately 800° C.
6. The metal organic chemical vapor deposition system of claim 1 , wherein the precursor flows through the chamber in a direction at least one of parallel to a surface of the superconductor substrate tape and perpendicular to the long axis of the superconductor substrate tape.
7. The metal organic chemical vapor deposition system of claim 1 , wherein the precursor enters the chamber by passing through an inlet pressure buffer chamber and at least one inlet dispersion plate.
8. The metal organic chemical vapor deposition system of claim 1 , wherein the chamber further comprises an array of one or more parallel-plate capacitive electrodes, and wherein the one or more parallel-plate capacitive electrodes is configured to activate the superconductor precursor by plasma activation.
9. The metal organic chemical vapor deposition system of claim 1 , wherein the first roller and the second roller are configured to pre-heat the superconductor substrate tape through ohmic heating.
10. The metal organic chemical vapor deposition system of claim 1 , wherein the precursor flows through the chamber in a direction parallel to a surface of the superconductor substrate tape and perpendicular to the long axis of the superconductor substrate tape.