Metal nitride material for thermistor, method for producing same, and film type thermistor sensor
Provided are a metal nitride material for a thermistor, which exhibits high reliability and high heat resistance and can be directly deposited on a film or the like without firing, a method for producing the metal nitride material for a thermistor, and a film type thermistor sensor. The metal nitride material for a thermistor consists of a metal nitride represented by the general formula: Ti x Al y N z (where 0.70≦y/(x+y)≦0.95, 0.4≦z≦0.5, and x+y+z=1), and the crystal structure thereof is a hexagonal wurtzite-type single phase.
1. A thermistor made of a metal nitride material, the metal nitride material consisting of a metal nitride represented by the general formula: TixAlyNz (where 0.70≦y/(x+y)≦0.95, 0.4≦z≦0.5, and x+y+z=1), wherein the crystal structure thereof is a hexagonal wurtzite-type single phase, wherein the rising rate of specific resistance at 25° C. after heat resistance test at 125° C. for 1,000 hours is less than 5%.
2. The thermistor according to claim 1 , wherein the metal nitride material is deposited as a film and is a columnar crystal extending in a vertical direction to a surface of the film.
3. The thermistor according to claim 1 , wherein the metal nitride material is deposited as a film and is strongly oriented along a c-axis more than an a-axis in a vertical direction to a surface of the film.
4. A film type thermistor sensor comprising:
an insulating film;
a thin film thermistor portion made of the metal nitride material according to claim 1 on the insulating film; and
a pair of pattern electrodes formed at least on the top or the bottom of the thin film thermistor portion.
5. A method for producing the thermistor according to claim 1 , the method comprising:
a depositing step of performing film deposition by reactive sputtering in a nitrogen-containing atmosphere using a Ti-Al alloy sputtering target.
6. The method for producing the thermistor according to claim 5 , wherein a sputtering gas pressure during the reactive sputtering is set to less than 0.67 Pa.
7. The method for producing the thermistor according to claim 5 , the method comprising:
a step of irradiating the formed film with nitrogen plasma after the depositing step.
8. A thermistor made of a metal nitride material, the metal nitride material consisting of a metal nitride represented by the general formula: TixAlyNz (where 0.70≦y/(x+y)≦0.95, 0.4≦z≦ 0 . 5 , and x+y+z=1), wherein the crystal structure thereof is a hexagonal wurtzite-type single phase, wherein the B constant thereof calculated based on resistance values at temperatures of 25° C. and 50° C. is 1500 K or greater.
9. The thermistor according to claim 8 , wherein the metal nitride material is deposited as a film and is a columnar crystal extending in a vertical direction to a surface of the film.
10. The thermistor according to claim 8 , wherein the metal nitride material is deposited as a film and is strongly oriented along a c-axis more than an a-axis in a vertical direction to a surface of the film.
11. A film type thermistor sensor comprising:
an insulating film;
a thin film thermistor portion made of the metal nitride material according to claim 8 on the insulating film; and
a pair of pattern electrodes formed at least on the top or the bottom of the thin film thermistor portion.
12. A thermistor made of a metal nitride material, the metal nitride material consisting of a metal nitride represented by the general formula: TixAlyNz (where 0.70≦y/(x+y)≦0.95, 0.4≦z≦0.5, and x+y+z=1), wherein the crystal structure thereof is a hexagonal wurtzite-type single phase, wherein the specific resistivity value thereof is 100 Ωcm or greater.
13. The thermistor according to claim 12 , wherein the metal nitride material is deposited as a film and is a columnar crystal extending in a vertical direction to a surface of the film.
14. The thermistor according to claim 12 , wherein the metal nitride material is deposited as a film and is strongly oriented along a c-axis more than an a-axis in a vertical direction to a surface of the film.
15. A film type thermistor sensor comprising:
an insulating film;
a thin film thermistor portion made of the metal nitride material according to claim 12 on the insulating film; and
a pair of pattern electrodes formed at least on the top or the bottom of the thin film thermistor portion.