Semiconductor device having a bandgap wider than that of silicon
An interlayer insulating film is formed on a gate insulating film and a gate electrode, and the interlayer insulating film is opened forming contact holes. Next, the interlayer insulating film and regions exposed by the contact holes are covered by a titanium nitride film, and the titanium nitride film is etched to remain only at portions of the gate insulating film and the interlayer insulating film exposed in the contact holes. The interlayer insulating film and the regions exposed by the contact holes are covered by a nickel film, and after the nickel film directly contacting the interlayer insulating film 8 is removed, the nickel film is heat treated and a nickel silicide layer is formed.
1. A semiconductor device comprising:
a wide bandgap semiconductor substrate of a first conductivity type, formed of a semiconductor having a bandgap that is wider than that of silicon;
a wide bandgap semiconductor deposition layer of the first conductivity type, deposited on a front surface of the wide bandgap semiconductor substrate, the wide bandgap semiconductor deposition layer having an impurity concentration that is lower than that of the wide bandgap semiconductor substrate;
second-conductivity-type regions selectively provided in a surface layer of the wide bandgap semiconductor deposition layer, the surface layer located on an opposite side of the wide bandgap semiconductor deposition layer with respect to the wide bandgap semiconductor substrate;
first-conductivity-type regions selectively provided in the second-conductivity-type regions;
a gate insulating film provided on a surface of the wide bandgap semiconductor deposition layer between the second-conductivity-type regions and on surfaces of the second-conductivity-type regions;
a gate electrode provided on the gate insulating film;
an interlayer insulating film covering the gate electrode;
contact holes opened in the interlayer insulating film and reaching the second-conductivity-type regions and the first-conductivity-type regions;
nickel silicide layers contacting the second-conductivity-type regions and the first-conductivity-type regions at bottoms of the contact holes;
a front surface electrode provided on the nickel silicide layers; and
a rear surface electrode provided on a rear surface of the wide bandgap semiconductor substrate, wherein
ends of the gate insulating film and ends of the interlayer insulating film exposed in the contact hole are covered by a titanium nitride film.