Mechanisms for forming three-dimensional integrated circuit (3DIC) stacking structure
Embodiments of mechanisms of forming a semiconductor device are provided. The semiconductor device includes a first semiconductor wafer comprising a first transistor formed in a front-side of the first semiconductor wafer. The semiconductor device also includes a second semiconductor wafer comprising a second transistor formed in a front-side of the second semiconductor wafer, and a backside of the second semiconductor wafer is bonded to the front-side of the first semiconductor wafer. The semiconductor device further includes an first interconnect structure formed between the first semiconductor wafer and the second semiconductor wafer, and the first interconnect structure comprises a first cap metal layer formed over a first conductive feature. The first interconnect structure is electrically connected to first transistor, and the first cap metal layer is configured to prevent diffusion and cracking of the first conductive feature.
1. A semiconductor device structure, comprising:
a first semiconductor wafer comprising a first transistor formed in a front-side of the first semiconductor wafer;
a second semiconductor wafer comprising a second transistor formed in a front-side of the second semiconductor wafer, wherein a backside of the second semiconductor wafer is bonded to the front-side of the first semiconductor wafer;
a bonding structure formed between the first semiconductor wafer and the second semiconductor wafer, wherein the bonding structure is made of a dielectric layer, the bonding structure comprising a first dielectric layer adjacent the backside of the second semiconductor wafer and a second dielectric layer interposed between the first dielectric layer and the first semiconductor wafer, the first dielectric layer being bonded to the second dielectric layer;
a first interconnect structure formed between the first semiconductor wafer and the second semiconductor wafer, the first interconnect structure located directly below the second dielectric layer of the bonding structure, wherein the first interconnect structure comprises a first cap metal layer formed over a first conductive feature, and the first interconnect structure is electrically connected to the first transistor, the first conductive feature extending through a third dielectric layer and into a fourth dielectric layer, the first conductive feature having an upper surface level with an upper surface of the third dielectric layer, the first cap metal layer extending above the upper surface of the third dielectric layer, wherein the first cap metal layer is configured to prevent diffusion and cracking of the first conductive feature; and
at least one through substrate via (TSV) formed in the second semiconductor wafer, wherein the TSV passes through the first dielectric layer and the second dielectric layer of the bonding structure, ends at the first cap metal layer of the first interconnect structure, and is in direct contact with the first cap metal layer of the first interconnect structure,
wherein the first interconnect structure is located in direct contact with the second dielectric layer of the bonding structure, and the second dielectric layer of the bonding structure is located in direct contact with the first cap metal layer, the first cap metal layer having a thickness less than a thickness of the second dielectric layer.
2. The semiconductor device structure as claimed in claim 1 , wherein the first cap metal layer is made of Ni, NiB, NiWB, Co, CoWB, CoWP, or NiReP.
3. The semiconductor device structure as claimed in claim 1 , wherein the first cap metal layer has a thickness in a range from about 5 A to about 700 A.
4. The semiconductor device structure as claimed in claim 1 , wherein the first conductive feature is made of copper, copper alloy, aluminum, or aluminum alloys.
5. The semiconductor device structure as claimed in claim 1 , wherein the first interconnect structure further comprises:
a second conductive feature formed below the first conductive feature; and
a second cap metal layer formed over the second conductive feature.
6. The semiconductor device structure as claimed in claim 1 , further comprising:
a diffusion barrier layer surrounding the first conductive feature.
7. The semiconductor device structure as claimed in claim 1 , further comprising:
a second interconnect structure formed on the second semiconductor wafer.
8. The semiconductor device structure as claimed in claim 7 , further comprising:
the through substrate via (TSV) extending from the second interconnect structure to the first interconnect structure.
9. The semiconductor device structure as claimed in claim 7 , wherein the second interconnect structure is electrically connected to the second transistor.
10. A semiconductor device structure, comprising:
a first semiconductor wafer comprising a first transistor formed in a front-side of the first semiconductor wafer;
a second semiconductor wafer comprising a second transistor formed in a front-side of the second semiconductor wafer, wherein a backside of the second semiconductor wafer is bonded to the front-side of the first semiconductor wafer;
a bonding structure formed between the first semiconductor wafer and the second semiconductor wafer, the bonding structure comprising a first dielectric layer adjacent the backside of the second semiconductor wafer and a second dielectric layer interposed between the first dielectric layer and the first semiconductor wafer, the first dielectric layer being bonded to the second dielectric layer;
a first interconnect structure formed between the first semiconductor wafer and the second semiconductor wafer, the first interconnect structure located directly below the second dielectric layer of the bonding structure, wherein the first interconnect structure comprises a first cap metal layer formed over a first conductive feature, an upper surface of the first conductive feature being level with an upper surface of a third dielectric layer, and the first interconnect structure is electrically connected to the first transistor; and
at least one through substrate via (TSV) extending from the front-side of the second semiconductor wafer to the first cap metal layer of the first semiconductor wafer, wherein the TSV passes through the first dielectric layer and the second dielectric layer of the bonding structure, ends at the first cap metal layer of the first interconnect structure, and is in direct contact with the first cap metal layer of the first interconnect structure,
wherein the first interconnect structure is located in direct contact with the bonding structure, and the bonding structure is in direct contact with the first cap metal layer, and the first cap metal layer has a thickness less than a thickness of the second dielectric layer.
11. The semiconductor device structure as claimed in claim 10 , wherein the first cap metal layer is made of Ni, NiB, NiWB, Co, Co WB, Co WP, or NiReP.
12. The semiconductor device structure as claimed in claim 10 , the first interconnect structure further comprises:
a second conductive feature formed below the first conductive feature; and
a second cap metal layer formed over the second conductive feature, wherein the second cap metal layer is electrically connected to the TSV.
13. The semiconductor device structure as claimed in claim 10 , wherein the first interconnect structure is electrically connected to the first transistor.
14. The semiconductor device structure as claimed in claim 10 , wherein the first cap metal layer has a thickness in a range from about 5 A to about 700 A.
15. The semiconductor device structure as claimed in claim 10 , wherein the first conductive feature is made of copper, copper alloy, aluminum, or aluminum alloys.
16. The semiconductor device structure as claimed in claim 10 , further comprising:
a diffusion barrier layer surrounding the first conductive feature.
17. The semiconductor device structure as claimed in claim 10 , further comprising:
a second interconnect structure formed over the front-side of the second semiconductor wafer, wherein the second interconnect structure is electrically connected to the first interconnect structure via the TSV.
18. The semiconductor device structure as claimed in claim 17 , wherein the second interconnect structure is electrically connected to the second transistor.