Multilayer element including base multilayer body, magnetic sensor and microwave assisted magnetic head
A base multilayer body is made by laminating a seed layer and a buffer layer in respective order. The seed layer is an alloy layer containing tantalum (Ta) and at least one type of other metal, and having an amorphous structure or a microcrystal structure. The buffer layer is an alloy layer having a [001] plane orientation hexagonal close-packed structure and containing at least one type of a group VI metal and at least one type of a group IX metal in the periodic table. With this configuration, a magnetic layer providing a desired magnetic characteristic(s) can be laminated on the thinned base multilayer body.
1. A base multilayer body including a seed layer and a buffer layer laminated in respective order, wherein
the seed layer is an alloy layer that includes tantalum (Ta) and at least one type of other metal, and that has an amorphous structure or a microcrystal structure, and
the buffer layer is an alloy layer that has a [001] plane orientation hexagonal close-packed structure and that includes at least one type of a group VI metal and at least one type of a group IX metal in the periodic table.
2. The base multilayer body according to claim 1 , wherein the seed layer is an alloy layer including tantalum (Ta) and at least one type of metal selected from a group of V, Ti, Cr, Mn, Fe, Co, Ni and Cu.
3. The base multilayer body according to claim 1 , wherein the seed layer is an alloy layer including tantalum (Ta), and Fe, Co or Ni.
4. The base multilayer body according to claim 1 , wherein the seed layer is an alloy layer including 60 at % or less of tantalum (Ta).
5. The base multilayer body according to claim 1 , wherein the buffer layer is an alloy layer including Cr as the group VI metal and Rh or Ir as the group IX metal.
6. The base multilayer body according to claim 1 , wherein the buffer layer includes 30 at % or greater of the group VI metal(s) and 30 at % or greater of the group IX metal(s).
7. A multilayer element, comprising the base multilayer body according to claim 1 , a first ferromagnetic layer, a second ferromagnetic layer and a nonmagnetic spacer layer, wherein the first ferromagnetic layer, the nonmagnetic spacer layer and the second ferromagnetic layer are laminated on the buffer layer in respective order.
8. The multilayer element according to claim 7 , wherein either the first ferromagnetic layer or the second ferromagnetic layer is a spin injection layer, and the other of either the first ferromagnetic layer or the second ferromagnetic layer is a magnetic field generation layer.
9. A microwave assisted magnetic head, comprising:
a main magnetic pole that generates a recording magnetic field to be applied to a magnetic recording medium,
a trailing shield that forms a magnetic path with the main magnetic pole, and
the multilayer element according to claim 8 that is provided in a write gap between the main magnetic pole and the trailing shield.
10. The multilayer element according to claim 7 , wherein either the first ferromagnetic layer or the second ferromagnetic layer is a free layer having a magnetization direction that is changed according to an external magnetic field, and the other of either the first ferromagnetic layer or the second ferromagnetic layer is a pinned layer having a pinned magnetization direction.
11. A magnetic sensor, comprising the multilayer element according to claim 7 .