IP Library Granted Patent US 9,960,310
Granted Patent B1
US 9,960,310 · App. 15/343,081 · Granted May 1, 2018

Rapid pulse annealing of CdZnTe detectors for reducing electronic noise

Inventors: Lars Voss (Livermore, CA); Adam Conway (Livermore, CA); Art Nelson (Livermore, CA); Rebecca J. Nikolic (Oakland, CA); Stephen A. Payne (Castro Valley, CA); Erik Lars Swanberg, Jr. (Livermore, CA)
Assignee: Lawrence Livermore National Security, LLC
H01L31/115G01T1/24H01L31/02161H01L31/02966H01L31/022408H01L31/1832H01L31/1864
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Quick Facts
Patent No.
US 9,960,310
App. No.
15/343,081
Granted
May 1, 2018
Kind
B1
Abstract

A combination of doping, rapid pulsed optical and/or thermal annealing, and unique detector structure reduces or eliminates sources of electronic noise in a CdZnTe (CZT) detector. According to several embodiments, methods of forming a detector exhibiting minimal electronic noise include: pulse-annealing at least one surface of a detector comprising CZT for one or more pulses, each pulse having a duration of ˜0.1 seconds or less. The at least one surface may optionally be ion-implanted. In another embodiment, a CZT detector includes a detector surface with two or more electrodes operating at different electric potentials and coupled to the detector surface; and one or more ion-implanted CZT surfaces on or in the detector surface, each of the one or more ion-implanted CZT surfaces being independently connected to one of the two or more electrodes and the surface of the detector. At least two of the ion-implanted surfaces are in electrical contact.

Claims (28)

1. A method of forming a detector exhibiting minimal electronic noise, the method comprising:

pulse-annealing at least one surface of a detector comprising CdZnTe (CZT) for one or more pulses, each pulse being characterized by a duration of approximately 0.1 seconds or less.

2. The method as recited in claim 1 , further comprising chemically oxidating some or all portions of the at least one surface of the detector.

3. The method as recited in claim 1 , wherein the pulse-annealing comprises optical annealing; and

wherein the optical annealing is performed using at least one optical source selected from: a flash lamp, and a light emitting diode.

4. The method as recited in claim 1 , further comprising plasma etching some or all portions of the at least one surface of the detector.

5. The method as recited in claim 1 , wherein the pulse-annealing comprises thermal annealing using a chemical energy source.

6. The method as recited in claim 5 , wherein the thermal annealing comprises initiating a thermitic reaction on the at least one surface of the detector.

7. The method as recited in claim 5 , wherein the thermal annealing comprises: an exothermic intermetallic reaction.

8. The method as recited in claim 5 , wherein pulse-annealing the detector reduces dark current generated by the detector by a factor of at least 2 relative to a dark current generated by the detector prior to the pulse-annealing.

9. A method of forming a detector exhibiting minimal electronic noise, the method comprising:

pulse-annealing at least one surface of a detector comprising ion-implanted CdZnTe (CZT) for one or more pulses, each pulse being characterized by a duration of approximately 0.1 seconds or less.

10. The method as recited in claim 9 , further comprising chemically oxidating some or all portions of the at least one surface of the detector.

11. The method as recited in claim 9 , wherein the pulse-annealing comprises optical annealing; and

wherein the optical annealing is performed using at least one optical source selected from: a flash lamp, and a light emitting diode.

12. The method as recited in claim 9 , further comprising plasma etching some or all portions of the at least one surface of the detector.

13. The method as recited in claim 9 , wherein the pulse-annealing comprises thermal annealing using a chemical energy source.

14. The method as recited in claim 13 , wherein the thermal annealing comprises initiating a thermitic reaction on the at least one surface of the detector.

15. The method as recited in claim 13 , wherein the thermal annealing comprises: an exothermic intermetallic reaction initiated in a film in close proximity to the CZT.

16. The method as recited in claim 13 , wherein pulse-annealing the detector reduces dark current generated by the detector by a factor of at least 2 relative to a dark current generated by the detector prior to the pulse-annealing.

17. A CdZnTe (CZT) detector comprising:

a detector surface with two or more electrodes operating at different electric potentials and coupled to the detector surface; and

one or more ion-implanted CZT surfaces on or in the detector surface, each of the one or more ion-implanted CZT surfaces being independently connected to one of the two or more electrodes and the surface of the detector, wherein at least two of the ion-implanted surfaces are in electrical contact.

18. The detector of claim 17 , wherein the two or more electrodes are arranged in a coplanar grid.

19. The detector as recited in claim 17 , wherein the ion-implanted CZT surfaces comprise one or more ionic species of one or more materials selected from: Group III, Group V, and Group VII.

20. The detector as recited in claim 17 , comprising a passivating layer formed on the surface of the detector in a region between the electrodes.

21. The detector as recited in claim 17 , comprising one or more additional ion: implanted CZT surfaces on or in the detector surface, each of the one or more additional ion-implanted CZT surfaces being located in a region of the detector surface that is not connected to any of the two or more electrodes.

22. The detector as recited in claim 21 , wherein the one or more ion-implanted CZT surfaces comprise one or more ionic species of one or more materials selected from Group VII.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 17, 2017
From: VOSS, LARS; CONWAY, ADAM; NELSON, ART; NIKOLIC, REBECCA J.; PAYNE, STEPHEN A.; SWANBERG, ERIK LARS, JR.
To: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
Reel/Frame 042028/0559 →
CONFIRMATORY LICENSE Recorded Dec 13, 2016
From: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 040719/0357 →