Manufacturing method of semiconductor device
View Patent ↗A miniaturized transistor with less variation and highly stable electrical characteristics is provided. Further, high performance and high reliability of a semiconductor device including the transistor are achieved. A semiconductor and a conductor are formed over a substrate, a sacrificial layer is formed over the conductor, and an insulator is formed to cover the sacrificial layer. After that, a top surface of the insulator is removed to expose a top surface of the sacrificial layer. The sacrificial layer and a region of the conductor overlapping with the sacrificial layer are removed, whereby a source region, a drain region, and an opening are formed. Next, a gate insulator and a gate electrode are formed in the opening.
1. A method for manufacturing a semiconductor device, comprising:
forming a semiconductor over a substrate;
forming a first conductor over the semiconductor;
forming a sacrificial layer over the first conductor;
forming a first insulator so as to cover the semiconductor, the first conductor, and the sacrificial layer;
exposing a top surface of the sacrificial layer;
removing the sacrificial layer to form an opening in the first insulator, so that part of the first conductor is exposed;
forming a pair of electrodes by removing part of the first conductor;
forming a second insulator so as to cover the first insulator and the opening;
forming a second conductor over the second insulator; and
removing part of the second conductor.
2. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the semiconductor is an oxide semiconductor including indium, an element M, and zinc, and
wherein the element M is one of gallium, aluminum, yttrium, and tin.
3. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the first conductor comprises one of a metal film and a metal nitride film, and
wherein each of the metal film and the metal nitride film includes one of molybdenum, titanium, tantalum, tungsten, aluminum, copper, chromium, neodymium, and scandium.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein the first conductor comprises a material including one of indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, and indium tin oxide containing silicon oxide.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein an etching rate of the sacrificial layer is higher than that of the first conductor.
6. The method for manufacturing a semiconductor device according to claim 1 , wherein the sacrificial layer includes one of boron, nitrogen, oxygen, fluorine, silicon, phosphorus, aluminum, titanium, chromium, manganese, cobalt, nickel, copper, zinc, gallium, yttrium, zirconium, molybdenum, ruthenium, silver, indium, tin, tantalum, and tungsten.
7. The method for manufacturing a semiconductor device according to claim 1 , wherein the sacrificial layer comprises one of a silicon film, a chromium film, a molybdenum film, a tungsten film, a zinc oxide film, and a molybdenum oxide film.
8. The method for manufacturing a semiconductor device according to claim 1 , wherein the step of removing the sacrificial layer is performed by a wet etching method.
9. The method for manufacturing a semiconductor device according to claim 1 , wherein the step of exposing the top surface of the sacrificial layer is performed by a chemical mechanical polishing method.
10. The method for manufacturing a semiconductor device according to claim 1 , wherein the step of removing the part of the second conductor is performed by a chemical mechanical polishing method.