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US 6,852,649 · Confirmation No. 6118

MULTI-STEP HIGH DENSITY PLASMA (HDP) PROCESS TO OBTAIN UNIFORMLY DOPED INSULATING FILM

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2004-12-28 LET. Miscellaneous Incoming Letter 1 View
2004-12-28 DRW Drawings-only black and white line drawings 2 View
2004-12-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-09-24 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-09-24 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-09-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-09-24 BIB Bibliographic Data Sheet 1 View
2004-09-24 FWCLM Index of Claims 1 View
2004-09-24 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-08 SRNT Examiner's search strategy and results 1 View
2004-07-02 AP.B Appeal Brief Filed 27 View
2004-05-10 N/AP Notice of Appeal Filed 2 View
2004-04-13 CTAV Advisory Action (PTOL-303) 3 View
2004-04-05 WFEE Fee Worksheet (SB06) 1 View
2004-04-05 FWCLM Index of Claims 1 View
2004-03-29 A.NE Response After Final Action 2 View
2004-03-29 SPEC Specification 1 View
2004-03-29 CLM Claims 4 View
2004-03-29 REM Applicant Arguments/Remarks Made in an Amendment 13 View
2004-02-05 CTFR Final Rejection 11 View
2004-02-05 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-05 FWCLM Index of Claims 1 View
2003-12-16 WFEE Fee Worksheet (SB06) 1 View
2003-11-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-11-14 SPEC Specification 1 View
2003-11-14 CLM Claims 1 View
2003-11-14 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-11-14 LET. Miscellaneous Incoming Letter 1 View
2003-08-29 CTNF Non-Final Rejection 9 View
2003-08-29 892 List of references cited by examiner 1 View
2003-06-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-06-18 SPEC Specification 1 View
2003-06-18 CLM Claims 1 View
2003-06-18 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-03-20 CTNF Non-Final Rejection 9 View
2003-03-20 892 List of references cited by examiner 1 View
2003-01-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-01-13 SPEC Specification 1 View
2003-01-13 CLM Claims 1 View
2003-01-13 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-01-13 OATH Oath or Declaration filed 2 View
2003-01-13 DRW Drawings-only black and white line drawings 3 View
2002-10-07 CTNF Non-Final Rejection 9 View
2002-10-07 892 List of references cited by examiner 1 View
2002-10-07 1449 List of References cited by applicant and considered by examiner 1 View
2002-07-08 ELC. Response to Election / Restriction Filed 2 View
2002-07-08 LET. Miscellaneous Incoming Letter 1 View
2002-06-26 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-06-06 CTRS Requirement for Restriction/Election 5 View
2001-05-30 PEFN Pre-Exam Formalities Notice 1 View
2001-03-30 TRNA Transmittal of New Application 2 View
2001-03-30 SPEC Specification 13 View
2001-03-30 CLM Claims 5 View
2001-03-30 ABST Abstract 1 View
2001-03-30 DRW Drawings-only black and white line drawings 3 View
2001-03-30 OATH Oath or Declaration filed 2 View
2001-03-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-03-30 SRFW Search information including classification, databases and other search related notes 1 View
2001-03-30 FWCLM Index of Claims 1 View
2001-03-30 WFEE Fee Worksheet (SB06) 1 View
2001-03-30 WFEE Fee Worksheet (SB06) 1 View
2001-03-30 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,852,649
App. No.
09/823,839
Filed
2001-03-30
Granted
2005-02-08
Art Unit
2822
PTA
-58 days