Patent Application
Utility
App. No. 09/840,598
· Confirmation No. 3756
SIDEWALL TREATMENT FOR LOW DIELECTRIC CONSTANT (LOW K) MATERIALS BY ION IMPLANTATION
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-03-04 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-04-23 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-04-23 | SPEC |
Specification | 21 | View | |
| 2001-04-23 | CLM |
Claims | 13 | View | |
| 2001-04-23 | ABST |
Abstract | 1 | View | |
| 2001-04-23 | DRW |
Drawings-only black and white line drawings | 20 | View | |
| 2001-04-23 | OATH |
Oath or Declaration filed | 20 | View | |
| 2001-04-23 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Jeremy I. Martin
Austin, TX
Eric M. Apelgren
Austin, TX
Christian Zistl
Dresden, GERMANY
Paul R. Besser
Austin, TX
Srikantewara Dakshina-Murthy
Austin, TX
Jonathan B. Smith
Fremont, CA
Nick Kepler
Saragota, CA
Fred Cheung
Newark, CA
Attorneys & Agents of Record
Classification
USPC
438/597
H10W20/095
H10W20/084
H10P30/40
H10W20/086
H10W20/056
H10W20/071
Prosecution
- Examiner
- NGUYEN, HA TRAN
- Art Unit
- 2812
- Customer No.
- 10742
- Docket No.
- 2000.034500
- Confirmation No.
- 3756
Patent Term Adjustment
-8days
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
from
MARTIN, JEREMY K.,
APELGREN, ERIC M.,
ZISTL, CHRISTIAN,
KEPLER, NICK,
BESSER, PAUL R.,
DAKSHINA-MURTHY, SRIKANTEWARA,
SMITH, JONATHAN B.,
CHEUNG, FRED
CORRECTIVE ASSIGNMENT TO CORRECT THE INVENTOR'S NAME PREVIOUSLY RECORDED ON REEL 011750 FRAME 0153
Recorded 2001-07-20
from
SMITH, JONATHAN B.,
ZISTL, CHRISTIAN,
BESSER, PAUL R.,
KEPLER, NICK,
DAKSHINA-MURTHY, SRIKANTEWARA,
APELGREN, ERIC M.,
MARTIN, JEREMY I.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-23
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Quick Facts
- App. No.
- 09/840,598
- Filed
- 2001-04-23
- Granted
- 2003-02-04
- Examiner
- NGUYEN, HA TRAN
- Art Unit
- 2812
- PTA
- -8 days
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