Integrated interconnect and method of manufacture therefor
View Patent ↗An integrated interface structure for a nested body to provide an electrical connection. The interface structure includes nested bond pads which electrically interface with leads. The nested bond pads are fabricated on a microstructure to provide an interface to drive circuitry for transducer elements of a slider or head supported by the microstructure.
1. An interconnect assembly for a microstructure comprising:
a base having first and second opposing surfaces, a cavity extending into said base from said first opposing surface, and a trench extending into said base from said first opposing surface, wherein said trench includes a distal end adjacent to said cavity; and
a bond pad formed on a side wall of said cavity adjacent said trench.
2. The interconnect assembly of claim 1 wherein the base includes a lead formed in said trench and conductively coupled to the bond pad on the side wall of said cavity.
3. The interconnect assembly of claim 1 wherein the trench is etched in the base and the bond pad is formed in said etched trench.
4. The interconnect assembly of claim 1 wherein the bond pad includes a raised surface spaced from the side wall of said cavity.
5. The interconnect assembly of claim 1 wherein said cavity is etched and said bond pad is formed on the etched cavity wall.
6. The interconnect assembly of claim 1 wherein the base includes a base portion and a floating portion movable relative to said base portion and said cavity is formed in the floating portion.
7. The interconnect assembly of claim 1 and further comprising the microstructure disposed in said cavity and the microstructure including at least one bond pad to interface with the bond pad formed on the side wall of said cavity.
8. The interconnect assembly of claim 1 wherein the side wall has a generally vertical orientation when the first and second opposing surfaces are orientated generally horizontally.
9. An electrical interconnect of a microstructure comprising:
a frame having a cavity and a trench etched in said frame;
an electrical lead deposited in said trench; and
a bond pad embedded in a side wall of said cavity of said frame, said bond pad being electrically coupled to said electrical lead.
10. The electrical interconnect of claim 9 comprising a plurality of bond pads embedded in said side wall of said cavity.
11. The electrical interconnect of claim 9 and further comprising a microstructure body disposed in said cavity having a bond pad to interface with the bond pad on said side wall of said cavity.
12. The electrical interconnect of claim 11 wherein the microstructure body is a slider including at least one transducer element.
13. The electrical interconnect of claim 9 wherein the frame includes a base portion and a floating portion and said cavity is formed in the floating portion.
14. The electrical interconnect of claim 9 wherein the embedded bond pad is formed in a trench opened to said cavity.
15. An integrated interconnect assembly for a microstructure comprising:
a microstructure body including a microstructure cavity having a bond pad formed on an inner side wall of the microstructure cavity and conductively coupled to a lead embedded below an external surface of the microstructure body.
16. The integrated interconnect of claim 15 wherein the bond pad is formed on an etched cavity wall.
17. The integrated interconnect of claim 15 wherein the lead is formed in an etched trench on the microstructure body.
18. The integrated interconnect of claim 15 and comprising a slider disposed in said microstructure cavity having at least one bond pad.
19. The integrated interconnect of claim 15 wherein the microstructure body includes a floating portion and said microstructure cavity is formed in the floating portion.
20. The integrated interconnect of claim 15 wherein the bond pad is embedded below an etched surface of the inner side wall.