Method of fabricating a double gate field effect transistor device, and such a double gate field effect transistor device
View Patent ↗The present invention discloses a method of forming a double gate field effect transistor device, and such a device formed with the method. One starts with a semiconductor-on-insulator substrate, and forms a first gate, source, drain and extensions, and prepares the second gate. Then the substrate is bonded to a second carrier, exposing a second side of the semiconductor layer. Next, an annealing step is performed as a diffusionless annealing, which has the advantage that the semiconductor layer not only has a substantially even thickness, but also has a substantially flat surface. This ensures the best possible annealing action of said annealing step. Very sharp abruptness of the extensions is achieved, with very high activation of the dopants.
1. Method of fabricating a double gate field effect transistor device with ultra shallow junctions, comprising the steps of
providing a substrate having a first carrier layer, a first insulator layer and a semiconductor layer;
forming a first gate structure on a first surface of the semiconductor layer,
forming a source and a drain, and a source extension and a drain extension in said semiconductor layer, using an amorphization step,
preparing a second gate region by a through-the-first-gate-implant process,
depositing a second insulator layer over the whole of the substrate at the first surface thereof,
bonding the substrate to a second carrier layer,
removing the first carrier layer and the first insulator layer,
wherein subsequently a step of activating at least the source extension and the drain extension is performed with a substantially diffusionless annealing step.
2. Method according to claim 1 , wherein the substantially diffusionless annealing step is a laser thermal annealing step.
3. Method according to claim 1 , wherein the substantially diffusionless annealing step comprises solid phase epitaxy regrowth.
4. Method according to claim 3 , wherein the temperature during solid phase epitaxy regrowth is between 550 and 650° C.
5. Double gate field effect transistor device, comprising a semiconductor layer with a first gate structure and a second gate structure, a source and a drain, a source extension and a drain extension in contact with the first and second gate structures, wherein an abruptness of a dopant profile of the source extension and drain extension is better than 2 nm/decade, the device obtainable by a method according to claim 1 .
6. Device according to claim 5 , wherein an exposed surface of the semiconductor layer is substantially flat.
7. Device according to claim 5 , wherein the abruptness of the dopant profile of the source extension and drain extension is not greater than about 1 nm/decade.
8. Device according to claim 5 , wherein an exposed surface of the semiconductor layer is not substantially flat.
9. Device according to claim 5 , wherein the second gate structure is not within the semiconductor layer but rather protrudes from the semiconductor layer.