IP Library Granted Patent US 7,320,455
Granted Patent B2
US 7,320,455 · App. 10/693,222 · Granted Jan 22, 2008

Instrumented platform for vibration-sensitive equipment

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Quick Facts
Patent No.
US 7,320,455
App. No.
10/693,222
Granted
Jan 22, 2008
Kind
B2
Abstract

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

Claims (28)

1. A platform assembly that supports a vibration-sensitive payload, comprising:

a platform having a first surface coupled to a vibration-sensitive payload, a second surface, and a honeycomb inner core located between and coupled to the first and second surfaces; and

at least one vibration sensor located within said inner core and configured to sense a vibration of a surface of the platform.

2. The assembly of claim 1 , wherein said first surface extends along a first plate and said vibration sensor is attached to said first plate.

3. The assembly of claim 1 , further comprising an electrical connector attached to an external surface of said platform and coupled to said vibration sensor.

4. The assembly of claim 1 , further comprising a damper located within said inner core.

5. The assembly of claim 4 , wherein said damper includes an active actuator that is coupled to said vibration sensor.

6. The assembly of claim 5 , further comprising a control circuit coupled to said vibration sensor and said active actuator.

7. The assembly of claim 1 , further comprising a monitor coupled to said vibration sensor.

8. The assembly of claim 6 , wherein said control circuit causes said active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of said first surface.

9. A platform assembly that supports a vibration-sensitive payload, comprising:

a platform having a first surface coupled to the vibration-sensitive payload, a second surface, and a honeycomb inner core located between and coupled to the first and second surfaces;

at least one vibration sensor positioned within the inner core and coupled to at least one of the first surface and the second surface;

a damper positioned within the inner core and coupled to at least one of the first surface and the second surface; and

a control circuit in communication with the vibration sensor and the damper.

10. The assembly of claim 9 , wherein said first surface extends along a first plate and said vibration sensor includes a vibration sensor attached to said first plate.

11. The assembly of claim 9 , further comprising an electrical connector attached to an external surface of said table and coupled to said vibration sensor.

12. The assembly of claim 9 , wherein said damper includes an active actuator that is coupled said vibration sensor.

13. The assembly of claim 12 , further comprising a control circuit coupled to said vibration sensor and said active actuator.

14. The assembly of claim 9 , further comprising a monitor coupled to said vibration sensor.

15. The assembly of claim 13 , wherein said control circuit causes said active actuator to create an active force that emulates an effect on a viscous damper in a frequency domain of a flexural vibration of said first surface.

16. A platform assembly that supports a vibration-sensitive payload, comprising:

a platform having a first surface configured to support a vibration-sensitive payload, a second surface, and a honeycomb inner core located between and coupled to the first and second surfaces;

one or more vibration sensors located within the inner core configured to sense a vibration of a surface of the platform;

a damper located within the inner core configured to apply a force to a surface of the platform; and

a monitor in communication with the one or more sensors and the dampener, the monitor configured to receive vibration information from the one or more sensors and provide an excitation signal to the damper.

17. The device of claim 16 further comprising a control circuit coupled to the vibration sensor and the active actuator.

18. The device of claim 17 wherein the damper is configured to apply an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface in response to the excitation signal from the control circuit in communication with the monitor.

Assignments (13)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2003
From: RYABOY, VYACHESLAV; BOOTH, WARREN
To: NEWPORT CORPORATION
Reel/Frame 014644/0171 →