Semiconductor device comprising a capacitor using a ferroelectric material
View Patent ↗A semiconductor device comprises a bottom electrode, a top electrode, and a dielectric film provided between the bottom electrode and the top electrode and made of a perovskite type ferroelectrics containing Pb, Zr, Ti and O, the dielectric film comprising a first portion formed of a plurality of crystal grains partitioned by grain boundaries having a plurality of directions.
1. A semiconductor device comprising:
a bottom electrode;
a top electrode; and
a dielectric film provided between the bottom electrode and the top electrode and made of a perovskite type ferroelectrics containing Pb, Zr, Ti and O, the dielectric film comprising a first portion formed of a plurality of crystal grains partitioned by grain boundaries having a plurality of directions, wherein the crystal grain contained in the first portion is shaped conical or oval.
2. The semiconductor device according to claim 1 , wherein the dielectric film further comprises a second portion provided between the bottom electrode and the first portion and formed of a plurality of crystal grains partitioned by grain boundaries extending in one direction.
3. The semiconductor device according to claim 2 , wherein the crystal grain contained in the second portion is shaped columnar.
4. The semiconductor device according to claim 2 , wherein the dielectric film further comprises a third portion provided between the top electrode and the first portion and formed of a plurality of crystal grains partitioned by grain boundaries extending in one direction.
5. The semiconductor device according to claim 4 , wherein the crystal grain contained in the third portion is shaped columnar.
6. The semiconductor device according to claim 1 , wherein the dielectric film further comprises a second portion provided between the top electrode and the first portion and formed of a plurality of crystal grains partitioned by grain boundaries extending in one direction.
7. The semiconductor device according to claim 6 , wherein the crystal grain contained in the second portion is shaped columnar.
8. The semiconductor device according to claim 1 , wherein at least one of the bottom electrode and the top electrode includes a film containing Ru.
9. A semiconductor device comprising:
a bottom electrode;
a top electrode; and
a dielectric film provided between the bottom electrode and the top electrode and made of a perovskite type ferroelectrics containing Pb, Zr, Ti and O, the dielectric film comprising a first portion formed of a plurality of crystal grains partitioned by grain boundaries having a plurality of directions, wherein a cross section of the crystal grain contained in the first portion is wedge-shaped or shaped elliptical.
10. A semiconductor device comprising:
a bottom electrode;
a top electrode; and
a dielectric film provided between the bottom electrode and the top electrode and made of a perovskite type ferroelectrics containing Pb, Zr, Ti and O, the dielectric film comprising a first portion formed of a plurality of crystal grains partitioned by grain boundaries having a plurality of directions, wherein the crystal grains contained in the first portion and positioned adjacent to each other have different heights.