Protection of active layers of memory cells during processing of other elements
View Patent ↗A method of fabricating an electronic structure by providing a conductive layer, providing a dielectric layer over the conductive layer, providing first and second openings through the dielectric layer, providing first and second conductive bodies in the first and second openings respectively and in contact with the conductive layer, providing a memory structure over the first conductive body, providing a protective element over the memory structure, and undertaking processing on the second conductive body.
1. A method of fabricating an electronic structure comprising:
providing a base structure;
providing a memory structure over a portion of the base structure;
providing a protective element over the memory structure; and
undertaking processing on the base structure in a region thereof not under the protective element, wherein the protective element comprises conductive material.
2. The method of claim 1 wherein the protective element comprises titanium.
3. The method of claim 1 wherein processing on the base structure comprises a cleaning process.
4. The method of claim 3 wherein the memory structure comprises a first memory structure layer, and a second, active memory structure layer on the first memory structure layer.
5. A method of fabricating an electronic structure comprising:
providing a layer having first and second openings therein;
providing first and second bodies in the first and second openings respectively;
providing a memory structure over the first body;
providing a protective element over the memory structure; and
undertaking processing on the second body with the protective element over the memory structure;
wherein the protective element comprises conductive material.
6. The method of claim 5 wherein the memory structure comprises a first memory structure layer and a second memory structure layer.
7. The method of claim 6 wherein the first memory structure layer is on the first body, and the second memory structure layer is on the first memory structure layer.
8. The method of claim 7 wherein the first memory structure layer is a passive layer, and the second memory structure layer is an active layer.
9. The method of claim 5 wherein each of the first and second bodies comprises conductive material.
10. The method of claim 9 wherein the protective element comprises metal, and wherein each of the first and second bodies comprises metal.
11. The method of claim 5 wherein the protective element comprises titanium.
12. The method of claim 10 wherein the protective element comprises titanium.
13. The method of claim 12 wherein the layer having first and second openings therein comprises a dielectric layer.
14. The method of claim 8 wherein processing on the second body comprises a cleaning process.
15. The method of claim 14 and further comprising providing a conductive layer over the resulting structure.