Method of producing a semiconductor device having an oxide film
View Patent ↗A semiconductor device having excellent characteristics is provided without deteriorated film quality. A first oxide film is divided into three regions A, B and C. Lengths I, II and III of the regions A, B and C in a plane direction of the silicon substrate are set equal to each other. In the first oxide film, a thermal treatment is carried out such that the film thicknesses of the regions A and C are increased. The thermal treating time, the thermal treating temperature and other parameters are adjusted such that sectional areas of the regions A and C become 1.5 times of a sectional area of the region B, while a film thickness of the region B is maintained.
1. A producing method of a semiconductor device comprising:
forming a trapezoidal portion including a first oxide film which functions as a gate oxide film and a plurality of other films,
wherein said first oxide film has a first peripheral region including an end face of said first oxide film, and a first central region surrounded by said first peripheral region; and
adjusting a thermal treatment of said trapezoidal portion so that a film thickness of said first oxide film in said first peripheral region is thicker than a film thickness of said first oxide film in said first central region,
wherein a length from the end face to a midpoint of the first central region of said first oxide film of said trapezoidal portion is L, and a length of said first peripheral region from the end face of said first oxide film is 2L/3.
2. A producing method of a semiconductor device according to claim 1 , wherein after the thermal treatment, said first oxide film has a bird's beak shape from said end face of said first oxide film.
3. A producing method of a semiconductor device according to claim 1 , wherein an average film thickness of said first oxide film in said first central region is t 1 , and an average film thickness of said first oxide film in said first peripheral region is 1.5*t 1 subsequent the thermal treatment.
4. A producing method of a semiconductor device according to claim 1 , wherein after the thermal treatment, a film thickness of said end face of said first oxide film is two times an average film thickness of said first oxide film in said first central region.
5. A producing method of a semiconductor device according to claim 1 , wherein said forming a trapezoidal portion includes forming a floating gate film as one of said plurality of other films, and wherein said first oxide film is located below said floating gate film.
6. A producing method of a semiconductor device according to claim 1 , wherein said forming a trapezoidal portion includes forming a second oxide film as one of said plurality of other films,
wherein said second oxide film has a second peripheral region including an end face of said second oxide film, and a second central region surrounded by said second peripheral region, and
wherein after the thermal treatment, a film thickness of said second oxide film in said second peripheral region is thicker than a film thickness of said second oxide film in said second central region.
7. A producing method of a semiconductor device according to claim 6 , wherein a length from the end face of said second oxide film to a midpoint of the second central region of said second oxide film of said trapezoidal portion is L, and a length of said second peripheral region from the end face of said second oxide film is 2L/3.
8. A producing method of a semiconductor device according to claim 6 , wherein after the thermal treatment, said second oxide film has a bird's beak shape from said end face of said second oxide film.
9. A producing method of a semiconductor device according to claim 6 , wherein an average film thickness of said second oxide film in said second central region is t 2 , and an average film thickness of said second oxide film in said second peripheral region is 1.5*t 2 subsequent the thermal treatment.
10. A producing method of a semiconductor device according to claim 6 , wherein after the thermal treatment, a film thickness of said end face of said second oxide film is two times an average film thickness of said second oxide film in said second central region.
11. A producing method of a semiconductor device according to claim 6 , wherein said forming a trapezoidal portion includes forming a floating gate film as one of said plurality of other films, and
wherein said first oxide film is located below said floating gate film, and said second oxide film is located above said floating gate film.