Semiconductor device and fabrication method therefor
View Patent ↗A semiconductor device is provided which includes a semiconductor substrate ( 10 ), an ONO film ( 16 ) provided on the semiconductor substrate ( 10 ), and a bit line ( 14 ) formed in the semiconductor substrate ( 10 ) and connected to a contact ( 34 ) provided on the bit line ( 14 ), the semiconductor substrate ( 10 ) having trench isolation regions ( 50 ) provided at both sides of the bit line ( 14 ), the contact ( 34 ) being interposed between the trench isolation regions ( 50 ). Accordingly, even if the bit line ( 14 ) and the contact ( 34 ) is overlapped in a misaligned manner in a direction vertical to the bit line ( 14 ), the leakage current does not flow between the bit line ( 14 ) and the semiconductor substrate ( 10 ) via the contact ( 34 ), because the contact ( 34 ) is formed on the trench isolation region ( 50 ). This makes it possible to make the overlapping margin of the bit line ( 14 ) and the contact ( 34 ) large, thereby providing a semiconductor device in which the memory cell can be downsized.
1. A semiconductor device comprising:
a semiconductor substrate;
a plurality of bit lines formed in first regions of the semiconductor substrate;
an ONO film provided at a plurality of locations on the semiconductor substrate and centered above second regions of the semiconductor substrate, each of the second regions located between adjacent ones of the first regions;
a plurality of word lines formed over portions of the ONO film; and
one or more contacts provided on each of the plurality of bit lines and connected to the plurality of bit lines only in bit line connecting regions defined between selected pairs of adjacent ones of the plurality of word lines,
the semiconductor substrate having trench isolation regions formed therein and provided only within the bit line connecting regions, the trench isolation regions provided at both sides of each of the plurality of bit lines within the bit line connecting regions and located adjacent to each of the one or more contacts, the one or more contacts interposed between the adjacent ones of the selected pairs of adjacent ones of the plurality of word lines, wherein the trench isolation regions are only provided between the contacts in each of the bit line connecting regions.
2. The semiconductor device as claimed in claim 1 , wherein each of the plurality of bit lines contacts the trench isolation regions in the bit line connecting regions.
3. The semiconductor device as claimed in claim 1 , further comprising sidewalls provided on sides of the adjacent ones of the selected pairs of adjacent ones of the plurality of word lines facing the one or more contacts.
4. The semiconductor device as claimed in claim 3 , wherein each of the plurality of bit lines contacts adjacent ones of the trench isolation regions.
5. The semiconductor device as claimed in claim 3 , wherein the sidewalls comprise a silicon nitride film
6. The semiconductor device as claimed in claim 5 , wherein each of the plurality of bit lines contacts adjacent ones of the trench isolation regions.
7. The semiconductor device as claimed in claim 1 , wherein each of the plurality of bit lines contacts adjacent ones of the trench isolation regions.
8. The semiconductor device as claimed in claim 1 , wherein the selected pair of adjacent ones of the plurality of word lines are separated from other selected pairs of adjacent ones of the plurality of word lines by intervals of one or more word lines.
9. A method of fabricating a semiconductor device comprising the steps of:
forming trench isolation regions only in predetermined bit line connecting regions in a semiconductor substrate;
forming a plurality of bit lines in first regions of the semiconductor substrate, the first regions extending in a first direction and portions of each of the plurality of bit lines formed between the trench isolation regions, wherein the trench isolation regions are provided at both sides of each of the plurality of bit lines;
providing an ONO film on the semiconductor substrate;
forming a plurality of word lines on the ONO film, the plurality of word lines extending in a second direction perpendicular to the first direction, wherein the predetermined bit line connecting regions also extend in the second direction, and wherein selected pairs of adjacent ones of the plurality of word lines are formed on either side of the bit line connecting regions; and
forming one or more contacts through the ONO film in the predetermined bit line connecting regions and connected to the portions of each of the plurality of bit lines formed between the trench isolation regions, wherein the trench isolation regions are only provided between the contacts in each of the bit line connecting regions.
10. The method as claimed in claim 9 , further comprising:
forming sidewalls on sides of the selected pairs of adjacent ones of the plurality of word lines facing the one or more contacts.
11. The method as claimed in claim 10 , wherein the step of forming the plurality of bit lines comprises a step of implanting ions in the first regions in which the plurality of bit lines are to be formed and additional regions that are located on the trench isolation regions which are adjacent to the plurality of bit lines in the predetermined bit line connecting regions.
12. The method as claimed in claim 10 , wherein the step of forming sidewalls includes a step of forming sidewalls on the sides of gates in a peripheral circuit region simultaneously with forming the sidewalls provided on the sides of the selected pairs of adjacent ones of the plurality of word lines facing the one or more contacts.
13. The method as claimed in claim 12 , wherein the step of forming the plurality of bit lines comprises a step of implanting ions in the first regions in which the plurality of bit lines are to formed and additional regions that are located on the trench isolation regions which are adjacent to the plurality of bit lines in the predetermined bit line connecting regions.
14. The method as claimed in claim 13 , wherein the step of forming the plurality of bit lines further comprises a step of thermal treatment of the ions implanted in the first regions in which the plurality of bit lines are to be formed to form the plurality of bit lines.
15. The method as claimed in claim 9 , wherein the selected pairs of adjacent ones of the plurality of word lines are separated from other selected pairs of adjacent ones of the plurality of word lines by intervals of one or more word lines.