Acceleration sensor chip
View Patent ↗An acceleration sensor chip has a frame portion having a frame body portion and protruding portions. The acceleration sensor chip also includes a mobile structure having a central weight portion supported movably by four beam portions. The mobile structure also has four rectangular parallelepiped-form protruding weight portions The acceleration sensor chip also includes a plurality of stoppers extending above the protruding weight portions.
1. An acceleration sensor chip comprising:
a frame portion having a frame body portion with a rectangular upper surface, and two protruding portions extending respectively from a central portion of each short side of said rectangular upper surface toward an opposite short side;
four beam portions including two beam portions extending respectively from a central portion of each long side of said frame body portion toward an opposite long side, and two other beam portions extending respectively from two ends of said two protruding portions; and
a mobile structure supported movably inside said frame body portion by said four beam portions, including a single rectangular parallelepiped-form central weight portion and four rectangular parallelepiped-form protruding weight portions connected respectively to four corner portions of said central weight portion, and being spaced from said frame portion and said beam portions.
2. The acceleration sensor chip according to claim 1 , wherein said four beam portions have an equal length.
3. The acceleration sensor chip according to claim 1 , further comprising a plurality of stoppers extending respectively from said frame body portion above parts of said protruding weight portions.
4. The acceleration sensor chip according to claim 3 , wherein said stoppers include four triangular wing-form bodies provided at four corners of said frame body portion.
5. The acceleration sensor chip according to claim 4 , wherein said stoppers include another four triangular wing-form bodies provided at four corners made by said short sides and said protruding portions.
6. The acceleration sensor chip according to claim 3 , wherein said stoppers are four rectangular elements provided for said four protruding weight portions, respectively, each said rectangular element extending along said short side of said frame body portion from said long side of said frame body portion to said protruding portion.
7. The acceleration sensor chip according to claim 3 , wherein said parts of said protruding weight portions are stepped portions which are thinner than other parts of said protruding weight portions, and an upper surface of said other parts of said protruding weight portions is coplanar with an upper surface of said stoppers.
8. The acceleration sensor chip according to claim 1 , wherein said four beam portions have different lengths.
9. The acceleration sensor chip according to claim 1 , wherein said beam portions are thinner than said frame body portion.
10. The acceleration sensor chip according to claim 1 , wherein a thickness of said protruding portions is equal to a thickness of said frame body portion.
11. The acceleration sensor chip according to claim 1 , wherein said four beam portions have different shapes.
12. The acceleration sensor chip according to claim 1 , wherein a plurality of piezo elements are provided on said four beam portions.
13. An acceleration sensor chip, comprising:
a frame portion having a rectangular frame defined by two opposing long sides, and two opposing short sides which are shorter than the long sides, said frame portion further having two protruding portions, each protruding portion extending from a central portion of a respective short side of said rectangular frame toward an opposite short side, each protruding portion having a thickness;
four beam portions, including two beam portions each extending from a central portion of a respective long side of said rectangular frame toward an opposite long side, and two other beam portions each extending from an end of a respective protruding portion so as to be co-linear therewith, said beam portions having a thickness that is less than the thickness of said protruding portions; and
a mobile structure movably supported inside said rectangular frame by said four beam portions, and including a single rectangular parallelepiped-form central weight portion, and four rectangular parallelepiped-form protruding weight portions connected respectively to four corner portions of said central weight portion and which are all spaced by a gap from said frame portion and said beam portions.