Nonvolatile memory device for storing multi-bit data
View Patent ↗A semiconductor nonvolatile memory device for storing multi-bit data has a memory cell having a source region S and a drain region D formed at the surface of a semiconductor substrate, a gate insulator film and a control gate CG formed on a channel region CH between the source region S and the drain region D and a nonconductive trap gate in the gate insulator film. An indentation is provided at the surface of the semiconductor substrate covering a region from a position in the vicinity of the drain region in the channel region to the drain region. By providing the indentation on the drain region side of the channel region, the trap gate is positioned in the direction of a channel current flowing from the source region S to the drain region D. Then, a charge having run through the channel region CH is injected efficiently into the trap gate on the indentation.
1. A method of manufacturing a semiconductor nonvolatile memory device for storing multi-bit data, the method comprising:
forming an indentation at a surface of a semiconductor substrate having a first conducting type;
forming a gate insulator film and a control gate on a horizontal surface of the semiconductor substrate and on the indentation, the gate insulator film comprising a first oxide film, a nitride film representing a nonconductive trap gate instead of a floating gate, and a second oxide film; and
forming a source region of a second conducting type opposite to the first conducting type at the horizontal surface of the semiconductor substrate and a drain region of the second conducting type at the bottom of the indentation using the control gate as a mask.
2. The method of manufacturing a semiconductor nonvolatile memory device according to claim 1 , wherein the indentation is formed in a region which is a part along the gate width, the method further comprising implanting a dopant of the first conducting type into the semiconductor substrate on both sides of the control gate using the control gate as a mask, wherein the forming the source region and the drain region includes forming the source region and the drain region by forming side wall layers on the side walls on both sides of the control gate, removing the side wall layer on the indentation, and implanting a dopant of the second conducting type into the semiconductor substrate using the control gate and the remaining side wall layer as a mask.
3. The method of manufacturing a semiconductor nonvolatile memory device according to claim 1 , wherein the forming the indentation comprises:
forming a silicon oxide film on the surface of the semiconductor substrate; and
forming a silicon nitride film on the silicon oxide film.
4. The method of manufacturing a semiconductor nonvolatile memory device according to claim 3 , wherein the forming the indentation further comprises:
forming a mask on the silicon nitride film to define the indentation; and
etching the silicon nitride film based on the mask.
5. The method of manufacturing a semiconductor nonvolatile memory device according to claim 4 , wherein the forming the indentation further comprises:
forming a region of the second conducting type in the semiconductor substrate by using the etched silicon nitride film as a mask;
forming a thick silicon oxide film by using the etched silicon nitride film as a mask; and
removing the silicon nitride film, the silicon oxide film, and the thick silicon oxide film to form the indentation.
6. The method of manufacturing a semiconductor nonvolatile memory device according to claim 5 , wherein the forming the region of the second conducting type comprises:
implanting dopant of the second conducting type.
7. The method of manufacturing a semiconductor nonvolatile memory device according to claim 5 , wherein the forming the thick silicon oxide film comprises:
utilizing a thermal oxidation atmosphere to form the thick silicon oxide film.
8. The method of manufacturing a semiconductor nonvolatile memory device according to claim 1 , wherein the first and second oxide films comprise silicon oxide, and wherein the nitride film comprises silicon nitride.
9. A method of manufacturing a semiconductor nonvolatile memory device for storing multi-bit data, the method comprising:
forming a first indentation of a first memory cell and a second indentation of a second memory cell at a surface of a semiconductor substrate having a first conducting type using a shared mask, wherein the first and second memory cells are adjacent to each other;
for the first and second memory cells, forming a gate insulator film and a control gate on a horizontal surface of the semiconductor substrate and on the respective indentation, the gate insulator film comprising a first oxide film, a nitride film representing a nonconductive trap gate instead of a floating gate, and a second oxide film; and
for the first and second memory cells, forming a source region of the second conducting type at the horizontal surface of the semiconductor substrate and a drain region of the second conducting type at the bottom of the respective indentation using the respective control gate as a mask.
10. The method of manufacturing a semiconductor nonvolatile memory device according to claim 9 , wherein the forming the first indentation comprises:
forming a silicon oxide film on the surface of the semiconductor substrate;
forming a silicon nitride film on the silicon oxide film;
forming the shared mask on the silicon nitride film to define the first and second indentations; and
etching the silicon nitride film based on the shared mask.
11. The method of manufacturing a semiconductor nonvolatile memory device according to claim 10 , further comprising:
for the first and second memory cells, forming a region of a second conducting type in the semiconductor substrate by using the etched silicon nitride film as a mask and forming a thick silicon oxide film by using the etched silicon nitride film as a mask and removing the silicon nitride film, the silicon oxide film, and the thick silicon oxide film to form the first and second indentations.
12. The method of manufacturing a semiconductor nonvolatile memory device according to claim 11 , wherein the forming the region of the second conducting type comprises:
implanting dopant of the second conducting type.
13. The method of manufacturing a semiconductor nonvolatile memory device according to claim 11 , wherein the forming the thick silicon oxide film comprises:
utilizing a thermal oxidation atmosphere to form the thick silicon oxide film.
14. The method of manufacturing a semiconductor nonvolatile memory device according to claim 9 , wherein the first and second oxide films comprise silicon oxide, and wherein the nitride film comprises silicon nitride.
15. A method of manufacturing a semiconductor nonvolatile memory device for storing multi-bit data, the method comprising:
forming an indentation at a surface of a semiconductor substrate having a first conducting type, wherein the indentation comprises a slope portion and a horizontal portion;
forming a region of the first conducting type in an area adjacent to the slope portion of the indentation;
forming a gate insulator film and a control gate on a horizontal surface of the semiconductor substrate and on the indentation, the gate insulator film comprising a first oxide film, a nitride film representing a nonconductive trap gate instead of a floating gate, and a second oxide film; and
forming a source region of a second conducting type opposite to the first conducting type at the horizontal surface of the semiconductor substrate and a drain region of the second conducting type at the bottom of the indentation using the control gate as a mask.
16. The method of manufacturing a semiconductor nonvolatile memory device according to claim 15 , wherein the forming the indentation comprises:
forming a silicon oxide film on the surface of the semiconductor substrate; and
forming a silicon nitride film on the silicon oxide film.
17. The method of manufacturing a semiconductor nonvolatile memory device according to claim 16 , wherein the forming the indentation further comprises:
forming a mask on the silicon nitride film to define the indentation; and
etching the silicon nitride film based on the mask.
18. The method of manufacturing a semiconductor nonvolatile memory device according to claim 17 , wherein the forming the indentation further comprises:
forming a region of the second conducting type in the semiconductor substrate by using the etched silicon nitride film as a mask;
forming a thick silicon oxide film by using the etched silicon nitride film as a mask; and
removing the silicon nitride film, the silicon oxide film, and the thick silicon oxide film to form the indentation.
19. The method of manufacturing a semiconductor nonvolatile memory device according to claim 18 , wherein the forming the region of the second conducting type comprises:
implanting dopant of the second conducting type.
20. The method of manufacturing a semiconductor nonvolatile memory device according to claim 18 , wherein the forming the thick silicon oxide film comprises:
utilizing a thermal oxidation atmosphere to form the thick silicon oxide film.