Semiconductor device
View Patent ↗Disclosed is a semiconductor device has a semiconductor substrate of a first conductivity type in which at least a first element-forming region and a second element-forming region are formed. Wells are formed in respective ones of the element-forming regions of the semiconductor substrate, and the well of at least one element-forming region is of the first conductivity type. A guard ring of a second conductivity type is formed between the wells of the first and second element-forming regions, and a region of the first conductivity type having an impurity concentration lower than that of the well of the one element-forming region is formed between the guard ring and the well of the one element-forming region.
1. A semiconductor device comprising:
a semiconductor substrate of a first conductivity type in which at least a first element-forming region and a second element-forming region are formed;
a first well and a second well being formed in the first and second element-forming regions of said semiconductor substrate, respectively;
at least one of said first and second wells being of the first conductivity type;
an element isolation film formed above at least one of said wells;
a guard ring of a second conductivity type being formed between said wells of said first and second element-forming regions; and
a first region of the first conductivity type having an impurity concentration lower than that of at least one of the first and second wells of the element-forming regions and being disposed between said guard ring and said at least one of the first and second wells of the element-forming regions.
2. The device according to claim 1 , wherein the well of the other element-forming region is of the first conductivity type; and
a second region of the first conductivity type having an impurity concentration lower than that of said well of said other element-forming region is disposed between said guard ring and said well of said other element-forming region.
3. The device according to claim 1 , wherein the impurity concentration of the first region is approximately equal to that of said semiconductor substrate.
4. The device according to claim 1 , wherein said guard ring comprises:
a first diffusion layer of the second conductivity type; and
a second diffusion layer of the second conductivity type joined to said first diffusion layer and formed in an element-forming surface of said semiconductor substrate;
wherein an impurity concentration of said second diffusion layer is higher than that of said first diffusion layer.
5. The device according to claim 1 , wherein said semiconductor substrate further comprises a deep well of the second conductivity type, said deep well being joined to said guard ring and covering a bottom side of said at least one well of the first conductivity type of one of the element-forming regions.
6. The device according to claim 1 , wherein said guard ring surrounds said at least one well of the first conductivity type of one of the element-forming regions.
7. The device according to claim 1 , wherein one of the element-forming regions is an analog-circuit forming region, and the other element-forming region is a digital-circuit forming region.
8. The device according to claim 1 , wherein the guard ring is confined to a second region between said wells of the first and second element-forming regions.