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US 8,169,013 · Confirmation No. 9143

METAL-INSULATOR-METAL (MIM) CAPACITOR HAVING CAPACITOR DIELECTRIC MATERIAL SELECTED FROM A GROUP CONSISTING OF ZRO2, HFO2, (ZRX, HF1-X)O2 (0<X<1), (ZRy, Ti (O<y<1), (Hfz, Ti-z)O2 (O<z<1) AND (Zrk, Ti1, Hfm)O2 (O<k, 1, m<1, k+1+m=1)

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Quick Facts
Patent No.
US 8,169,013
App. No.
11/637,147
Filed
2006-12-12
Granted
2012-05-01
Pub. No.
US20070152256A1
Examiner
MAI, ANH D
Art Unit
2889
PTA
-48 days