Semiconductor device including fuse elements and bonding pad
A semiconductor device includes a lower-layer substrate, a fuse above the lower-layer substrate and blown by radiation with light, a silicon oxide film on the fuse and on an exposed portion of the surface of the lower-layer substrate, and a silicon nitride film on the silicon oxide film. The portion of the silicon oxide film on the surface of the lower-layer substrate is thicker than the fuse, and the silicon oxide film has an opening opposite the fuse.
1. A semiconductor device including fuse elements electrically opened by irradiation with laser light that melts and thereby cuts the fuse elements, the semiconductor device comprising:
a semiconductor substrate;
a first insulating film supported by said semiconductor substrate and including a pair of via holes;
fuse elements comprising respective portions of an aluminum layer disposed on said first insulating film, one of said fuse elements electrically connecting together metals filling said pair of via holes in said first insulating film, said pair of metals electrically connecting together a respective pair of metal wirings;
a bonding pad comprising a portion of said aluminum layer disposed on said first insulating film;
a second insulating film of a silicon oxide covering said fuse elements, said first insulating film between said fuse elements, and part of said bonding pad, said second insulating film having a first hole through which at least part of said bonding pad is exposed; and
a third insulating film of a nitride covering said second insulating film and having a second hole through which at least part of said bonding pad is exposed, wherein each of said fuse elements is thinner than the total thickness of said third insulating film and said second insulating film at locations between one of said fuse elements and said bonding pad.
2. A semiconductor device including fuse elements electrically opened by irradiation with laser light that melts and thereby cuts the fuse elements, the semiconductor device comprising:
a semiconductor substrate;
a first insulating film supported by said semiconductor substrate and including a pair of via holes;
fuse elements comprising respective portions of an aluminum layer disposed on said first insulating film, one of said fuse elements electrically connecting together metals filling said pair of via holes in said first insulating film, said pair of metals electrically connecting together a respective pair of metal wirings;
a bonding pad comprising a portion of said aluminum layer disposed on said first insulating film;
a second insulating film covering said fuse elements, said first insulating film between said fuse elements, and part of said bonding pad, said second insulating film having a first hole through which at least part of said bonding pad is exposed; and
a third insulating film covering said second insulating film and having a second hole though which at least part of said bonding pad is exposed, wherein each of said fuse elements is thinner than the total thickness of said third insulating film and said second insulating film at locations between one of said fuse elements and said bonding pad, wherein
said third insulating film has a third hole through which a region of said second insulating film is exposed,
said fuse elements are located below said region of said second insulating film exposed by the third hole,
said second insulating film includes planar portions between said fuse elements, and ridged portions opposite said fuse elements, and
each of said fuse elements is thinner than the thickness of said planar portions of said second insulating film.
3. A semiconductor device including fuse elements electrically opened by irradiation with laser light that melts and thereby cuts the fuse elements, the semiconductor device comprising:
a semiconductor substrate;
a first insulating film supported by said semiconductor substrate and including a pair of via holes;
fuse elements comprising respective portions of an aluminum layer disposed on said first insulating film, one of said fuse elements electrically connecting together metals filling said pair of via holes in said first insulating film, said pair of metals electrically connecting together a respective pair of metal wirings;
a bonding pad comprising a portion of said aluminum layer disposed on said first insulating film;
a second insulating film, including a silicon oxide film, covering said fuse elements, said first insulating film between said fuse elements, and part of said bonding pad, said second insulating film having
a first hole through which at least part of said bonding pad is exposed,
planar portions between said fuse elements, and
ridged portions opposite said fuse elements; and
a third insulating film, including a silicon nitride film,
covering said second insulating film,
having a second hole through which at least part of said bonding pad is exposed, and
having a third hole through which a region of said second insulating film is exposed, wherein
said fuse elements are located below said region of said second insulating film exposed by the third hole, and
each of said fuse elements is thinner than the thickness of said planar portions of said second insulating film.