Semiconductor device having a multilayer interconnection structure
A structure device having a multilayer interconnection structure; such a structure includes at least a first interconnection layer and a second interconnection layer; the first interconnection layer includes a first conductor pattern embedded in a first interlayer insulation film and a second conductor pattern embedded in said first interlayer insulation film; the second interconnection layer includes a third conductor pattern embedded in a second interlayer insulation film; the third conductor pattern being coupled to an extension part in a part thereof so as to extend in said second interlayer insulation film in a plane of said second interlayer insulation film; the extension part of said third conductor pattern, said first via-plug and said second viaplug forming help form a dual damascene structure.
1. A semiconductor device having a multilayer interconnection structure,
said multilayer interconnection structure comprising at least a first interconnection layer and a second interconnection layer formed over said first interconnection layer;
said first interconnection layer comprising a first conductor pattern embedded in a first interlayer insulation film and constituting a part of an interconnection pattern in said first interconnection layer, and a second conductor pattern different from the first conductor pattern embedded in said first interlayer insulation film,
said second interconnection layer comprising a third conductor pattern embedded in a second interlayer insulation film and constituting a part of an interconnection pattern in said second interconnection layer,
said third conductor pattern being coupled to an extension part in a part thereof so as to extend in said second interlayer insulation film in a plane of said second interlayer insulation film, said extension part extending from an edge of said third conductor pattern and having a width smaller than a length of said edge when viewed from a direction perpendicular to said plane of said second interlayer insulation film,
said third conductor pattern being electrically connected to said first conductor pattern at a first region of said extension part via a first via plug,
said extension part making a contact with said second conductor pattern at a second region further away from said third conductor pattern with regard to said first region via a second via-plug of a diameter smaller than said first via-plug,
said extension part of said third conductor pattern, said first via-plug and said second via-plug forming, together with said second interlayer insulation film, a dual damascene structure.
2. The semiconductor device as claimed in claim 1 , wherein said third conductor pattern has a rectangular shape defined by a first edge on which said extension part is formed and a second edge perpendicular thereto, said first edge being longer than said second edge.
3. The semiconductor device as claimed in claim 1 , wherein said first through third conductor patterns and said first and second via-plugs are formed of Cu.