Semiconductor device including a plurality of circuit element chips and a manufacturing method thereof
View Patent ↗A semiconductor device includes a first circuit element chip including a first surface on which a plurality of first electrodes are arranged, and a second circuit element chip including a first surface on which a plurality of second electrodes are arranged. The second circuit element chip is mounted on the first circuit element chip. The semiconductor device further includes an insulating film disposed on a side surface of the second circuit element chip and disposed between the first surfaces of the first and second circuit element chips. The semiconductor device still further includes a resin layer covering the second circuit element chip and the insulating film. Also, there is provided a manufacturing method of the semiconductor device which includes forming the insulating film after the second circuit element chip is mounted on the first circuit element chip.
1. A manufacturing method of a semiconductor device, comprising:
providing a substrate which includes a circuit element region, wherein the circuit element region includes a plurality of first electrodes formed thereon;
providing a circuit element chip which includes a first surface, wherein the first surface includes a plurality of second electrodes formed thereon;
mounting the circuit element chip on the circuit element region of the substrate with a gap therebetween, the first surface of the circuit element chip facing the circuit element region;
forming an insulating film between the substrate and the circuit element chip after said mounting, so that the gap between the substrate and the circuit element chip is filled with the insulating film; and
forming a resin layer to cover the substrate, the circuit element chip and the insulating film.
2. The manufacturing method according to claim 1 , further comprising:
forming the insulating film on a side surface of the circuit element chip.
3. The manufacturing method according to claim 1 , further comprising:
forming a first protective film on the circuit element region that exposes the first electrodes; and
forming a second protective film on the first surface of the circuit element chip that exposes the second electrodes,
wherein said forming an insulating film includes disposing the insulating film between the first protective film and the second protective film, to contact both the first protective film and the second protective film.
4. The manufacturing method according to claim 1 ,
wherein said providing a substrate includes providing a plurality of the circuit element regions,
wherein said providing a circuit element chip includes providing a plurality of the circuit element chips,
wherein said mounting the circuit element chip includes mounting the circuit element chips on the circuit element regions respectively,
wherein said forming an insulating film includes forming the insulating film between the substrate and each of the circuit element chips, and
wherein said forming a resin layer includes forming the resin layer to cover the circuit element chips.
5. The manufacturing method according to claim 4 , further comprising:
dividing the substrate covered by the resin layer into individual semiconductor devices which respectively include each of the circuit element regions and each of the circuit element chips.