Semiconductor device and method of fabricating the same
View Patent ↗A protective film ( 56 ) having a water/hydrogen blocking function is formed so as to cover the periphery of a pad electrode ( 54 a ) while being electrically isolated from the pad electrode. A material selected in the embodiment for composing the protective film is a highly moisture-proof material having a water/hydrogen blocking function considerably superior to that of the insulating material, such as palladium (Pd) or palladium-containing material, and iridium (Ir) or iridium oxide (IrO x : typically x=2) or an iridium- or iridium oxide-containing material. An FeRAM capable of reliably preventing water/hydrogen from entering inside, and of maintaining high performance of the ferroelectric capacitor structure ( 30 ) may be realized only by a simple configuration.
1. A semiconductor device comprising:
a semiconductor substrate;
a capacitor structure formed over said semiconductor substrate, and having a dielectric film held between a lower electrode and an upper electrode;
an interconnect structure formed over said capacitor structure, and electrically connected to said capacitor structure; and
a pad electrode electrically connected to said interconnect structure so as to establish electrical connection with externals;
wherein a protective film composed of a palladium-containing material is formed so as to cover the periphery of said pad electrode, while being electrically isolated from said pad electrode, and
wherein said pad electrode and said protective film are formed in the same level, are composed of the same material and have the same film thickness.
2. The semiconductor device according to claim 1 , wherein said protective film is formed so as to cover the entire range over said semiconductor substrate excluding a site of formation of said pad electrode.
3. The semiconductor device according to claim 1 , wherein said dielectric film is composed of a ferroelectric material having a ferroelectric characteristic.
4. The semiconductor device according to claim 1 , further comprising a silicon nitride film formed over said protective film, wherein said silicon nitride film is formed so as to cover the inner wall surface of a contact hole of said pad electrode.
5. A semiconductor device comprising:
a semiconductor substrate;
a capacitor structure formed over said semiconductor substrate, and having a dielectric film held between a lower electrode and an upper electrode;
an interconnect structure formed over said capacitor structure, and electrically connected to said capacitor structure; and
a pad electrode electrically connected to said interconnect structure so as to establish electrical connection with externals;
wherein a protective film composed of an iridium- or iridium oxide-containing material is formed so as to cover the periphery of said pad electrode, while being electrically isolated from said pad electrode, and
wherein said pad electrode and said protective film are formed in the same level, are composed of the same material and have the same film thickness.
6. The semiconductor device according to claim 5 , wherein said protective film is formed so as to cover the entire range over said semiconductor substrate excluding a site of formation of said pad electrode.
7. The semiconductor device according to claim 5 , wherein said dielectric film is composed of a ferroelectric material having a ferroelectric characteristic.
8. The semiconductor device according to claim 5 , further comprising a silicon nitride film formed over said protective film, wherein said silicon nitride film is formed so as to cover the inner wall surface of a contact hole of said pad electrode.
9. A method of manufacturing a semiconductor device comprising:
forming, over a semiconductor substrate, a capacitor structure having a dielectric film held between a lower electrode and an upper electrode;
forming an insulating film over said capacitor structure;
forming an interconnect structure in the insulating film as being electrically connected to said capacitor structure;
forming a palladium-containing layer on the insulating film and on the interconnect structure; and
patterning the palladium-containing layer to form a pad electrode and a protective film, the pad electrode connects to said interconnect structured, and the protective film covers the periphery of said pad electrode, while being electrically isolated from said pad electrode.
10. The method of manufacturing a semiconductor device according to claim 9 , wherein said protective film is formed so as to cover the entire range over said semiconductor substrate excluding a site of formation of said pad electrode.
11. The method of manufacturing a semiconductor device according to claim 9 , wherein said dielectric film is formed using a ferroelectric material having a ferroelectric characteristic.
12. A method of manufacturing a semiconductor device comprising:
forming, over a semiconductor substrate, a capacitor structure having a dielectric film held between a lower electrode and an upper electrode;
forming an insulating film over said capacitor structure;
forming an interconnect structure in the insulating film as being electrically connected to said capacitor structure;
forming an iridium- or iridium oxide-containing layer on the insulating film and on the interconnect structure; and
patterning the iridium- or iridium oxide-containing layer to form a pad electrode and a protective film, the pad electrode connects to said interconnect structure, and the protective film covers the periphery of said pad electrode, while being electrically isolated from said pad electrode.
13. The method of manufacturing a semiconductor device according to claim 12 , wherein said protective film is formed so as to cover the entire range over said semiconductor substrate excluding a site of formation of said pad electrode.
14. The method of manufacturing a semiconductor device according to claim 12 , wherein said dielectric film is formed using a ferroelectric material having a ferroelectric characteristic.