Manufacturing method of semiconductor device and manufacturing method of lead frame
View Patent ↗Improvement in the reliability of a semiconductor device is aimed at. By heating a lead frame, after preparing a lead frame with a tape, until a resin molding is performed, at the temperature 160 to 300° C. (preferably 180 to 300° C.) for a total of more than 2 minutes in the atmosphere which has oxygen, crosslinkage density becoming high in resin of adhesives, a low molecular compound volatilizes and jumps out outside, therefore as a result, since a low molecular compound does not remain in resin of adhesives, the generation of copper migration can be prevented.
1. A manufacturing method of a semiconductor device assembled using a lead frame which has a plurality of leads, comprising the steps of:
(a) providing the lead frame comprised of copper or copper alloy, the lead frame having a chip mounting portion, the plurality of leads arranged around the chip mounting portion, and a tape steadying each of the plurality of leads, the tape being arranged over the plurality of leads via adhesives, wherein the adhesives are mixed adhesives comprised primarily of phenol resin and bismaleimide resin, and including acetaldehyde, methanol or acetone;
(b) mounting a semiconductor chip on the chip mounting portion, the semiconductor chip having a main surface, and a plurality of pads formed on the main surface;
(c) electrically connecting the plurality of pads of the semiconductor chip with the plurality of leads via a plurality of wires, respectively;
(d) forming a sealed body for sealing the semiconductor chip, the plurality of wires, and the plurality of leads with a resin such that a part of each of the plurality of leads is exposed from the sealed body;
wherein before step (b), the lead frame is heated, at a temperature between 180 degrees and 300 degrees for between 2 minutes and 5 minutes, in an atmosphere including oxygen.
2. A manufacturing method of a semiconductor device according to claim 1 , wherein a thickness of the tape is 50 μm.