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Granted Patent Utility
US 9,263,249 · Confirmation No. 3379

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

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2016-01-27 ISSUE.NTF Issue Notification 1 View
2016-01-07 IFEE Issue Fee Payment (PTO-85B) 1 View
2016-01-07 WFEE Fee Worksheet (SB06) 2 View
2016-01-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-01-07 TRAN.LET Transmittal Letter 1 View
2015-10-07 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2015-10-07 SRFW Search information including classification, databases and other search related notes 2 View
2015-10-07 BIB Bibliographic Data Sheet 1 View
2015-10-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2015-10-07 FWCLM Index of Claims 1 View
2015-10-07 SRNT Examiner's search strategy and results 10 View
2015-10-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2015-09-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2015-09-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2015-09-23 A.NE Response After Final Action 1 View
2015-09-23 CLM Claims 3 View
2015-09-23 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2015-09-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-09-23 WFEE Fee Worksheet (SB06) 1 View
2015-09-17 PA.. Power of Attorney 2 View
2015-09-17 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2015-09-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-07-29 CTFR Final Rejection 10 View
2015-07-29 892 List of references cited by examiner 1 View
2015-07-29 SRFW Search information including classification, databases and other search related notes 2 View
2015-07-29 SRNT Examiner's search strategy and results 10 View
2015-06-17 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2015-06-17 IMIS Miscellaneous Internal Document 3 View
2015-06-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-06-10 CLM Claims 3 View
2015-06-10 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2015-06-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-06-10 WFEE Fee Worksheet (SB06) 1 View
2015-04-10 CTNF Non-Final Rejection 8 View
2015-03-24 RCEX Request for Continued Examination (RCE) 3 View
2015-03-24 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2015-03-24 CLM Claims 3 View
2015-03-24 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2015-03-24 WFEE Fee Worksheet (SB06) 2 View
2015-03-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-03-24 WFEE Fee Worksheet (SB06) 1 View
2015-02-12 CTFR Final Rejection 11 View
2015-01-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-01-29 CLM Claims 3 View
2015-01-29 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2015-01-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-01-29 WFEE Fee Worksheet (SB06) 1 View
2014-10-29 CTNF Non-Final Rejection 9 View
2014-10-29 892 List of references cited by examiner 1 View
2014-10-29 SRFW Search information including classification, databases and other search related notes 2 View
2014-10-29 SRNT Examiner's search strategy and results 9 View
2014-09-19 RCEX Request for Continued Examination (RCE) 3 View
2014-09-19 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-09-19 CLM Claims 3 View
2014-09-19 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-09-19 WFEE Fee Worksheet (SB06) 2 View
2014-09-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-09-19 WFEE Fee Worksheet (SB06) 1 View
2014-07-15 CTFR Final Rejection 11 View
2014-07-15 INTV.SUM.EX Examiner initiated interview summary (PTOL-413B) 1 View
2014-07-15 FWCLM Index of Claims 1 View
2014-04-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2014-04-24 CLM Claims 3 View
2014-04-24 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-04-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-04-24 WFEE Fee Worksheet (SB06) 1 View
2014-03-14 CTNF Non-Final Rejection 10 View
2014-03-14 FWCLM Index of Claims 1 View
2014-02-19 RCEX Request for Continued Examination (RCE) 3 View
2014-02-19 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2014-02-19 CLM Claims 3 View
2014-02-19 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2014-02-19 WFEE Fee Worksheet (SB06) 2 View
2014-02-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-04 CTFR Final Rejection 8 View
2013-12-04 SRFW Search information including classification, databases and other search related notes 2 View
2013-12-04 SRNT Examiner's search strategy and results 8 View
2013-12-04 FWCLM Index of Claims 1 View
2013-11-20 RCEX Request for Continued Examination (RCE) 3 View
2013-11-20 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2013-11-20 CLM Claims 3 View
2013-11-20 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2013-11-20 WFEE Fee Worksheet (SB06) 2 View
2013-11-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-11-20 WFEE Fee Worksheet (SB06) 1 View
2013-10-04 CTFR Final Rejection 8 View
2013-10-04 FWCLM Index of Claims 1 View
2013-07-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-07-25 CLM Claims 3 View
2013-07-25 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2013-07-25 LET. Miscellaneous Incoming Letter 1 View
2013-07-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-07-25 WFEE Fee Worksheet (SB06) 1 View
2013-06-19 CTNF Non-Final Rejection 9 View
2013-06-19 FWCLM Index of Claims 1 View
2012-12-05 RCEX Request for Continued Examination (RCE) 3 View
2012-12-05 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-12-05 CLM Claims 3 View
2012-12-05 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2012-12-05 WFEE Fee Worksheet (SB06) 2 View
2012-12-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-12-05 WFEE Fee Worksheet (SB06) 1 View
2012-09-11 CTFR Final Rejection 9 View
2012-09-11 SRNT Examiner's search strategy and results 7 View
2012-09-11 FWCLM Index of Claims 1 View
2012-09-11 SRFW Search information including classification, databases and other search related notes 1 View
2012-08-29 RCEX Request for Continued Examination (RCE) 3 View
2012-08-29 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-08-29 CLM Claims 3 View
2012-08-29 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2012-08-29 WFEE Fee Worksheet (SB06) 2 View
2012-08-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-29 WFEE Fee Worksheet (SB06) 1 View
2012-05-29 CTFR Final Rejection 9 View
2012-05-29 FWCLM Index of Claims 1 View
2012-05-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-05-09 CLM Claims 3 View
2012-05-09 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2012-05-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-05-09 WFEE Fee Worksheet (SB06) 1 View
2012-03-28 SRFW Search information including classification, databases and other search related notes 1 View
2012-03-27 CTNF Non-Final Rejection 8 View
2012-03-27 892 List of references cited by examiner 1 View
2012-03-27 FWCLM Index of Claims 1 View
2012-03-27 BIB Bibliographic Data Sheet 1 View
2012-03-27 SRFW Search information including classification, databases and other search related notes 1 View
2012-03-27 SRNT Examiner's search strategy and results 6 View
2012-02-22 RCEX Request for Continued Examination (RCE) 3 View
2012-02-22 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-02-22 CLM Claims 3 View
2012-02-22 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2012-02-22 WFEE Fee Worksheet (SB06) 2 View
2012-02-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-22 WFEE Fee Worksheet (SB06) 1 View
2011-11-22 CTFR Final Rejection 10 View
2011-11-22 FWCLM Index of Claims 1 View
2011-11-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-11-15 CLM Claims 3 View
2011-11-15 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2011-11-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-11-15 WFEE Fee Worksheet (SB06) 1 View
2011-09-01 CTNF Non-Final Rejection 8 View
2011-09-01 892 List of references cited by examiner 1 View
2011-09-01 SRNT Examiner's search strategy and results 5 View
2011-09-01 FWCLM Index of Claims 1 View
2011-09-01 BIB Bibliographic Data Sheet 1 View
2011-09-01 SRFW Search information including classification, databases and other search related notes 1 View
2011-08-15 SRNT Examiner's search strategy and results 1 View
2011-08-05 ELC. Response to Election / Restriction Filed 1 View
2011-08-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2011-08-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-05 WFEE Fee Worksheet (SB06) 1 View
2011-07-05 CTRS Requirement for Restriction/Election 6 View
2010-02-16 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-07-20 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-07-20 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-07-10 PA.. Power of Attorney 1 View
2009-07-10 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2009-07-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-04-07 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-04-07 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-03-24 PA.. Power of Attorney 3 View
2009-01-08 NTC.PUB Notice of Publication 1 View
2008-10-30 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 26 View
2008-10-02 APP.FILE.REC Filing Receipt 3 View
2008-09-22 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2008-09-22 OATH Oath or Declaration filed 2 View
2008-09-22 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2008-09-22 DRW.NONBW Drawings-other than black and white line drawings 1 View
2008-09-22 WFEE Fee Worksheet (SB06) 2 View
2008-09-22 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-09-22 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2008-07-22 NTC.MISS.PRT Notice to File Missing Parts 2 View
2008-07-22 APP.FILE.REC Filing Receipt 3 View
2008-07-01 ADS Application Data Sheet 4 View
2008-07-01 SPEC Specification 18 View
2008-07-01 CLM Claims 3 View
2008-07-01 ABST Abstract 1 View
2008-07-01 WFEE Fee Worksheet (SB06) 2 View
2008-07-01 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-07-01 136A Authorization for Extension of Time all replies 3 View
2008-07-01 DRW Drawings-only black and white line drawings 13 View
2008-07-01 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 9,263,249
App. No.
12/166,290
Filed
2008-07-01
Granted
2016-02-16
Pub. No.
US20090011600A1
Art Unit
1716
PTA
0 days