MEMORY DEVICE DESIGN
Memory elements and methods for making memory elements. One method of making a memory element includes forming a first electrode, forming an electrically conductive current densifying element and a memory cell on the first electrode, the memory cell and the current densifying element adjacent to each other. A second electrode is formed over the current densifying element and the memory cell. The memory elements may be resistance random access memory elements.
1 . A method of making a memory element comprising:
forming a first electrode;
forming an electrically conductive current densifying element and a memory cell in electrical contact with the first electrode, the memory cell and the current densifying element adjacent to each other; and
patterning a second electrode over the current densifying element and the memory cell.
2 . The method of claim 1 wherein forming the current densifying element is done before forming the memory cell.
3 . The method of claim 2 wherein forming the current densifying element and forming the memory cell comprises forming the electrically conductive current densifying element and the memory cell in a hole in an electrically insulating layer over the first electrode.
4 . The method of claim 3 wherein forming the electrically conductive current densifying element and the memory cell in a hole in an electrically insulating layer comprises applying a barrier layer in the hole prior to forming the electrically conductive current densifying element and the memory cell.
5 . The method of claim 3 , after forming the current densifying element and forming the memory cell, polishing the memory cell.
6 . The method of claim 5 wherein polishing the memory cell comprises chemical-mechanical polishing (CMP) of the memory cell.
7 . The method of claim 1 wherein forming the current densifying element is done after forming the memory cell.
8 . The method of claim 7 wherein forming the current densifying element and forming the memory cell comprises forming the electrically conductive current densifying element and the memory cell in a hole in an electrically insulating layer over the first electrode.
9 . The method of claim 8 wherein forming the electrically conductive current densifying element and the memory cell in a hole in an electrically insulating layer comprises applying a barrier layer in the hole prior to forming the electrically conductive current densifying element and the memory cell.
10 . The method of claim 8 , after forming the current densifying element and forming the memory cell, polishing the current densifying element.
11 . The method of claim 10 wherein polishing the current densifying element comprises chemical-mechanical polishing (CMP) of the current densifying element.
12 . The method of claim 1 wherein forming a memory cell comprises forming a resistance random access memory cell.
13 . A method of making a memory element comprising:
forming a first electrode;
providing a hole in an electrically insulating layer, the hole extending to the first electrode;
forming an electrically conductive current densifying element in the hole;
forming a memory cell in the hole, the memory cell and the current densifying element adjacent to each other and filling the hole; and
patterning a second electrode over the filled hole.
14 . The method of claim 13 wherein forming an electrically conductive current densifying element in the hole is done prior to forming a memory cell in the hole.
15 . The method of claim 13 wherein forming an electrically conductive current densifying element in the hole is done after forming a memory cell in the hole.
16 . A memory element comprising:
a first electrode having a first area;
a current densifying element having a second area less than the first area;
a memory cell; and
a second electrode having a third area greater than the second area,
with each of the first electrode, the current densifying element, the memory cell and the second electrode in electrical connection.
17 . The memory element of claim 16 wherein the memory cell is a resistance random access memory cell.
18 . The memory element of claim 16 wherein the current densifying element comprises Al or W.
19 . The memory element of claim 16 wherein the current densifying element has a diameter of 50 nm to 200 nm.
20 . The memory element of claim 19 wherein the current densifying element has a diameter of 100 nm to 150 nm.