Patent Application
Utility
App. No. 12/662,189
· Confirmation No. 3070
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING REMOVING A CONDUCTIVE FILM FORMED OVER A TOP SURFACE OF AN INTERLAYER FILM WHILE LEAVING THE CONDUCTIVE FILM FORMED ON A SIDE SURFACE AND A BOTTOM SURFACE OF FIRST AND SECOND TRENCHES
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-05-11 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-05-11 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-05-06 | ABN |
Abandonment | 2 | View | |
| 2015-05-04 | PA.. |
Power of Attorney | 2 | View | |
| 2015-05-04 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2015-05-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-10-14 | CTFR |
Final Rejection | 13 | View | |
| 2014-10-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2014-10-14 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2014-10-14 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2014-10-14 | FWCLM |
Index of Claims | 1 | View | |
| 2014-09-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2014-09-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-08-05 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2014-08-05 | CLM |
Claims | 5 | View | |
| 2014-08-05 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2014-08-05 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-08-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-08-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2014-03-05 | CTNF |
Non-Final Rejection | 9 | View | |
| 2014-03-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2014-03-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2014-03-05 | FWCLM |
Index of Claims | 1 | View | |
| 2014-03-05 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2013-08-07 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2013-08-07 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2013-08-07 | SPEC |
Specification | 1 | View | |
| 2013-08-07 | CLM |
Claims | 4 | View | |
| 2013-08-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2013-08-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-08-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-08-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-06-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-06-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-05-14 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2013-05-14 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2013-05-08 | A.NE |
Response After Final Action | 1 | View | |
| 2013-05-08 | SPEC |
Specification | 1 | View | |
| 2013-05-08 | CLM |
Claims | 4 | View | |
| 2013-05-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2013-05-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-05-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-02-08 | CTFR |
Final Rejection | 16 | View | |
| 2013-02-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2013-02-08 | FWCLM |
Index of Claims | 1 | View | |
| 2013-02-08 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2013-02-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-12-05 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-12-05 | CLM |
Claims | 4 | View | |
| 2012-12-05 | SPEC |
Specification | 1 | View | |
| 2012-12-05 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2012-12-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-12-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-09-05 | CTNF |
Non-Final Rejection | 12 | View | |
| 2012-09-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-09-05 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2012-09-05 | FWCLM |
Index of Claims | 1 | View | |
| 2012-09-05 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2012-09-05 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2012-09-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-08-10 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2012-08-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2012-07-11 | CTRS |
Requirement for Restriction/Election | 5 | View | |
| 2010-10-14 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2010-08-02 | PD.FILED.E |
Priority Documents electronically retrieved by USPTO from a participating IP Office | 44 | View | |
| 2010-07-15 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2010-07-15 | SPEC |
Specification | 37 | View | |
| 2010-07-15 | CLM |
Claims | 5 | View | |
| 2010-07-15 | ABST |
Abstract | 1 | View | |
| 2010-07-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-06-22 | A.PE |
Preliminary Amendment | 1 | View | |
| 2010-06-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2010-06-22 | SPEC |
Specification | 1 | View | |
| 2010-06-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2010-06-22 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2010-06-22 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 6 | View | |
| 2010-06-22 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2010-06-02 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2010-06-02 | NT.INC.REPLY |
Notice of Incomplete Reply | 3 | View | |
| 2010-06-02 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2010-05-21 | A.PE |
Preliminary Amendment | 1 | View | |
| 2010-05-21 | SPEC |
Specification | 1 | View | |
| 2010-05-21 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2010-05-21 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2010-04-23 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-04-23 | NTC.OMIT.APP |
Notice of Omitted Items Application | 3 | View | |
| 2010-04-05 | TRNA |
Transmittal of New Application | 8 | View | |
| 2010-04-05 | SPEC |
Specification | 38 | View | |
| 2010-04-05 | CLM |
Claims | 5 | View | |
| 2010-04-05 | ABST |
Abstract | 1 | View | |
| 2010-04-05 | OATH |
Oath or Declaration filed | 2 | View | |
| 2010-04-05 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2010-04-05 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-04-05 | 136A |
Authorization for Extension of Time all replies | 8 | View | |
| 2010-04-05 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2010-04-05 | FOR |
Foreign Reference | 43 | View | |
| 2010-04-05 | FOR |
Foreign Reference | 20 | View | |
| 2010-04-05 | FOR |
Foreign Reference | 27 | View | |
| 2010-04-05 | FOR |
Foreign Reference | 16 | View | |
| 2010-04-05 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2010-04-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-04-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-04-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Tsuyoshi Tomoyama
Tokyo, JAPAN
Keisuke Otsuka
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
257/534
H10D1/042
H10D1/68
H10B12/033
H10B12/09
H10D1/716
Prosecution
- Examiner
- MAI, ANH D
- Art Unit
- 2829
- Customer No.
- 36491
- Docket No.
- FPA-2009-0465-ELP-US-MAa
- Confirmation No.
- 3070
Foreign Priority
2009-093849
·
2009-04-08
·
JAPAN
Publication
- Pub. No.
- US20100258907A1
- Pub. Date
- 2010-10-14
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Quick Facts
- App. No.
- 12/662,189
- Filed
- 2010-04-05
- Pub. No.
- US20100258907A1
- Examiner
- MAI, ANH D
- Art Unit
- 2829
External Links